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Stretchable form of single crystal silicon for high performance electronics on rubber substrates

  • US 8,754,396 B2
  • Filed: 04/06/2012
  • Issued: 06/17/2014
  • Est. Priority Date: 06/04/2004
  • Status: Active Grant
First Claim
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1. A stretchable electronic circuit comprising:

  • a flexible substrate;

    an intermediate layer that is at least partially supported on a surface of the flexible substrate; and

    an electronic circuit that is supported by the surface of the flexible substrate and at least partially embedded in the intermediate layer;

    wherein the at least partially embedded portion of the electronic circuit comprises at least one semiconductor structure having a curved internal surface that provides stretchability to isolate the electronic circuit from an applied strain.

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