Stretchable form of single crystal silicon for high performance electronics on rubber substrates

• US 8,754,396 B2
• Filed: 04/06/2012
• Issued: 06/17/2014
• Est. Priority Date: 06/04/2004
• Status: Active Grant

• Current Assignee: Board of Trustees of The University of Illinois
• Original Assignee: Board of Trustees of The University of Illinois
• Inventors: Rogers, John A., Khang, Dahl-Young, Sun, Yugang, Menard, Etienne
• Primary Examiner(s): WOJCIECHOWICZ, EDWARD JOSEPH
• Application Number:
  US13/441,618
• Publication Number:
  US 20130100618A1
• Time in Patent Office: 802 Days
• Field of Search: 257/9, 257/40, 257/619, 439/67
• US Class Current: 257/9
• CPC Class Codes: B81C 2201/0185 Printing, e.g. microcontact printing
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: H01L 21/02422 Non-crystalline insulating materials, e.g. glass, polymers
• CPC Class Codes: H01L 21/02521 Materials
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02546 Arsenides
• CPC Class Codes: H01L 21/02628 using solutions
• CPC Class Codes: H01L 21/6835 using temporarily an auxiliary support
• CPC Class Codes: H01L 2221/68368 used in a transfer process involving at least two transfer steps, i.e. including an intermediate handle substrate
• CPC Class Codes: H01L 2224/291 with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
• CPC Class Codes: H01L 2224/2919 with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
• CPC Class Codes: H01L 2224/80894 Direct bonding, i.e. joining surfaces by means of intermolecular attracting interactions at their interfaces, e.g. covalent bonds, van der Waals forces
• CPC Class Codes: H01L 2224/8385 using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
• CPC Class Codes: H01L 23/293 Organic, e.g. plastic
• CPC Class Codes: H01L 23/3157 Partial encapsulation or coating mask layer used as insulation layer H01L21/31
• CPC Class Codes: H01L 23/5387 Flexible insulating substrates H01L23/5388 takes precedence
• CPC Class Codes: H01L 23/564 Details not otherwise provided for, e.g. protection against moisture getters H01L23/26
• CPC Class Codes: H01L 24/29 of an individual layer connector
• CPC Class Codes: H01L 24/32 of an individual layer connector
• CPC Class Codes: H01L 24/80 Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
• CPC Class Codes: H01L 27/1266 : the substrate on which the devices are formed not being the final device substrate, e.g. using a temporary substrate
• CPC Class Codes: H01L 27/1285 : using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
• CPC Class Codes: H01L 27/1292 : using liquid deposition, e.g. printing
• CPC Class Codes: H01L 29/06 : characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
• CPC Class Codes: H01L 29/0665 : the shape of the body defining a nanostructure nanotechnology per se B82B
• CPC Class Codes: H01L 29/0673 : oriented parallel to a substrate
• CPC Class Codes: H01L 29/0676 : oriented perpendicular or at an angle to a substrate
• CPC Class Codes: H01L 29/068 : comprising a junction
• CPC Class Codes: H01L 29/151 : Compositional structures H01L29/157 and H01L29/158 take precedence
• CPC Class Codes: H01L 29/158 : Structures without potential periodicity in a direction perpendicular to a major surface of the substrate, i.e. vertical direction, e.g. lateral superlattices, lateral surface superlattices [LSS]
• CPC Class Codes: H01L 29/16 : including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 29/1602 : Diamond
• CPC Class Codes: H01L 29/1606 : Graphene
• CPC Class Codes: H01L 29/72 : Transistor-type devices, i.e. able to continuously respond to applied control signals
• CPC Class Codes: H01L 29/7781 : with inverted single heterostructure, i.e. with active layer formed on top of wide bandgap layer, e.g. IHEMT
• CPC Class Codes: H01L 29/78603 : characterised by the insulating substrate or support H01L29/78657 takes precedence
• CPC Class Codes: H01L 29/78681 : having a semiconductor body comprising AIIIBV or AIIBVI or AIVBVI semiconductor materials, or Se or Te
• CPC Class Codes: H01L 29/78696 : characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel H01L29/78612 takes precedence; transistors having a drain offset region or a lightly doped drain [LDD] H01L29/78621
• CPC Class Codes: H01L 2924/00 : Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 : the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/0002 : Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/01002 : Helium [He]
• CPC Class Codes: H01L 2924/01003 : Lithium [Li]
• CPC Class Codes: H01L 2924/01005 : Boron [B]
• CPC Class Codes: H01L 2924/01006 : Carbon [C]
• CPC Class Codes: H01L 2924/0101 : Neon [Ne]
• CPC Class Codes: H01L 2924/01011 : Sodium [Na]
• CPC Class Codes: H01L 2924/01013 : Aluminum [Al]
• CPC Class Codes: H01L 2924/01015 : Phosphorus [P]
• CPC Class Codes: H01L 2924/01019 : Potassium [K]
• CPC Class Codes: H01L 2924/0102 : Calcium [Ca]
• CPC Class Codes: H01L 2924/01023 : Vanadium [V]
• CPC Class Codes: H01L 2924/01024 : Chromium [Cr]
• CPC Class Codes: H01L 2924/01029 : Copper [Cu]
• CPC Class Codes: H01L 2924/0103 : Zinc [Zn]
• CPC Class Codes: H01L 2924/01032 : Germanium [Ge]
• CPC Class Codes: H01L 2924/01033 : Arsenic [As]
• CPC Class Codes: H01L 2924/01049 : Indium [In]
• CPC Class Codes: H01L 2924/01051 : Antimony [Sb]
• CPC Class Codes: H01L 2924/01067 : Holmium [Ho]
• CPC Class Codes: H01L 2924/01072 : Hafnium [Hf]
• CPC Class Codes: H01L 2924/01074 : Tungsten [W]
• CPC Class Codes: H01L 2924/01079 : Gold [Au]
• CPC Class Codes: H01L 2924/01082 : Lead [Pb]
• CPC Class Codes: H01L 2924/0132 : Binary Alloys
• CPC Class Codes: H01L 2924/07802 : not being an ohmic electrical conductor
• CPC Class Codes: H01L 2924/10329 : Gallium arsenide [GaAs]
• CPC Class Codes: H01L 2924/10336 : Aluminium gallium arsenide [AlGaAs]
• CPC Class Codes: H01L 2924/10349 : Aluminium gallium indium phosphide [AlGaInP]
• CPC Class Codes: H01L 2924/12032 : Schottky diode
• CPC Class Codes: H01L 2924/12036 : PN diode
• CPC Class Codes: H01L 2924/12041 : LED
• CPC Class Codes: H01L 2924/12042 : LASER
• CPC Class Codes: H01L 2924/13063 : Metal-Semiconductor Field-Effect Transistor [MESFET]
• CPC Class Codes: H01L 2924/13091 : Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
• CPC Class Codes: H01L 2924/1461 : MEMS
• CPC Class Codes: H01L 2924/3025 : Electromagnetic shielding
• CPC Class Codes: H01L 2924/3512 : Cracking
• CPC Class Codes: H01L 31/0392 : including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate textured substrates H01L31/02366
• CPC Class Codes: H01L 31/03925 : including AIIBVI compound materials, e.g. CdTe, CdS
• CPC Class Codes: H01L 31/03926 : comprising a flexible substrate
• CPC Class Codes: H01L 31/18 : Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
• CPC Class Codes: H01L 31/1804 : comprising only elements of Group IV of the Periodic Table
• CPC Class Codes: H05K 1/0277 : Bendability or stretchability details H05K1/038, H05K3/4691 take precedence
• CPC Class Codes: H05K 1/0283 : Stretchable printed circuits
• CPC Class Codes: Y02E 10/547 : Monocrystalline silicon PV cells
• CPC Class Codes: Y02P 70/50 : Manufacturing or production processes characterised by the final manufactured product

Abstract

The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.

Claims

1. A stretchable electronic circuit comprising:

a flexible substrate;

an intermediate layer that is at least partially supported on a surface of the flexible substrate; and

an electronic circuit that is supported by the surface of the flexible substrate and at least partially embedded in the intermediate layer;

wherein the at least partially embedded portion of the electronic circuit comprises at least one semiconductor structure having a curved internal surface that provides stretchability to isolate the electronic circuit from an applied strain.

2. The stretchable electronic circuit of claim 1, wherein the curved internal surface has at least one convex region, at least one concave region, or a combination of at least one convex region and at least one concave region.

3. The stretchable electronic circuit of claim 2, wherein the curved internal surface has a combination of convex and concave regions.

4. The stretchable electronic circuit of claim 1, wherein the curved internal surface has a contour profile comprising a periodic wave or an aperidioc wave.

5. The stretchable electronic circuit of claim 1, wherein the curved internal surface has a contour profile that varies spatially in one-dimension.

6. The stretchable electronic circuit of claim 1, wherein the electronic circuit comprises an array or pattern of stretchable semiconductor structures having curved internal surfaces.

7. The stretchable electronic circuit of claim 1, wherein the electronic circuit comprises metal interconnects having a wave-shaped or wrinkled conformation, wherein the metal interconnects electrically connect device components of the electronic circuit.

8. The stretchable electronic circuit of claim 1, further comprising an encapsulating layer or a coating, wherein the encapsulating layer or the coating at least partially encapsulates the electronic circuit.

9. The stretchable electronic circuit of claim 8, wherein the encapsulating layer or the coating comprises a polymer.

10. The stretchable electronic circuit of claim 1, wherein the intermediate layer is an adhesive layer, a laminating layer, a coating or a thin film.

11. The stretchable electronic circuit of claim 1, wherein the intermediate layer comprises a polyimide.

12. The stretchable electronic circuit of claim 1, wherein the flexible substrate comprises a polymer or paper.

13. The stretchable electronic circuit of claim 1, wherein discrete points of the semiconductor structure curved internal surface are bonded to the surface of the flexible substrate, wherein the discrete points of bonding are separated from each other by a buckled region of the semiconductor structure that is not directly bound to the flexible substrate, and wherein the buckled region of the semiconductor structure is not in physical contact with the surface of the flexible substrate.

14. The stretchable electronic circuit of claim 1, wherein the electronic circuit comprises a material selected from the group consisting of:

Si, Ge, SiC, AlP, AlAs, AlSb, GaN, GaP, GaAs, GaSb, InP, InAs, InSb, ZnO, ZnSe, ZnTe, CdS, CdSe, CdTe, HgS, PbS, PbSe, PbTe, AlGaAs, AlInAs, AlInP, GaAsP, GaInAs, GaInP, AlGaAsSb, AlGaInP, GaInAsP and carbon nanotubes.

15. The stretchable electronic circuit of claim 1, wherein the electronic circuit comprises a printable electronic circuit.

16. The stretchable electronic circuit of claim 1, wherein the flexible substrate has a first Young'"'"'s modulus, and wherein the intermediate layer has a second Young'"'"'s modulus that is less than the first Young'"'"'s modulus of the flexible substrate.

17. The stretchable electronic circuit of claim 16, further comprising an encapsulating layer or a coating, wherein the encapsulating layer or coating at least partially encapsulates the electronic circuit, and wherein the encapsulating layer or coating has a third Young'"'"'s modulus that is less than the first Young'"'"'s modulus of the flexible substrate.

31. The stretchable electronic circuit of claim 1, wherein the electronic circuit is fully embedded in the intermediate layer.

18. A stretchable electronic circuit comprising:

a flexible substrate;

an intermediate layer that is at least partially supported on a surface of the flexible substrate;

an electronic circuit that is supported on the surface of the flexible substrate and at least partially embedded in the intermediate layer, the at least partially embedded portion of the electronic circuit comprising at least one semiconductor structure having a curved internal surface to provide stretchability; and

an encapsulating layer or coating that at least partially encapsulates the electronic circuit;

wherein the encapsulating layer or coating enhances a mechanical stability of the stretchable electronic circuit.

19. The stretchable electronic circuit of claim 18, wherein the curved internal surface has a contour profile with a combination of at least one convex region and at least one concave region.

20. The stretchable electronic circuit of claim 18, wherein the intermediate layer is an adhesive layer, a laminating layer, a coating or a thin film.

21. The stretchable electronic circuit of claim 18, wherein the intermediate layer comprises a polyimide.

22. The stretchable electronic circuit of claim 18, wherein the encapsulating layer or coating comprises a polymer.

23. The stretchable electronic circuit of claim 18, wherein the flexible substrate comprises a polymer or paper.

24. The stretchable electronic circuit of claim 18, the curved internal surface of the semiconductor structure having discrete points bonded to the flexible substrate, wherein the discrete points of bonding are separated from each other by a buckled region of the semiconductor structure that is not directly bound to the flexible substrate intermediate layer, and wherein the buckled region of the semiconductor structure is not in physical contact with the surface of the flexible substrate.

25. The stretchable electronic circuit of claim 18, wherein the electronic circuit comprises a material selected from the group consisting of:

Si, Ge, SiC, AlP, AlAs, AlSb, GaN, GaP, GaAs, GaSb, InP, InAs, InSb, ZnO, ZnSe, ZnTe, CdS, CdSe, CdTe, HgS, PbS, PbSe, PbTe, AlGaAs, AlInAs, AlInP, GaAsP, GaInAs, GaInP, AlGaAsSb, AlGaInP, GaInAsP and carbon nanotubes.

26. The stretchable electronic circuit of claim 18, wherein the electronic circuit comprises a printable electronic circuit.

27. The stretchable electronic circuit of claim 18, wherein the flexible substrate has a first Young'"'"'s modulus, and wherein the encapsulating layer or coating has a second Young'"'"'s modulus that is less than the first Young'"'"'s modulus of the flexible substrate.

28. The stretchable electronic circuit of claim 27, further comprising an intermediate layer that is at least partially supported on a surface of the flexible substrate, wherein the electronic circuit is at least partially supported on a surface of the intermediate layer, wherein the intermediate has a third Young'"'"'s modulus that is less than the first Young'"'"'s modulus of the flexible substrate.

29. The stretchable electronic circuit of claim 18, wherein the electronic circuit comprises metal interconnects having a wave-shaped or wrinkled conformation, wherein the metal interconnects electrically connect device components of the electronic circuit.

30. A stretchable electronic circuit comprising:

a flexible substrate having a first Young'"'"'s modulus;

an intermediate layer that is at least partially supported on a surface of the flexible substrate, the intermediate having a second Young'"'"'s modulus that is less than the first Young'"'"'s modulus of the flexible substrate;

an electronic circuit that is supported on the surface of the flexible substrate and at least partially embedded in the intermediate layer; and

an encapsulating layer or coating that at least partially encapsulates the electronic circuit, the encapsulating layer or coating having a third Young'"'"'s modulus that is less than the first Young'"'"'s modulus of the flexible substrate.