Systems and method for laser voltage imaging state mapping

• US 8,754,633 B2
• Filed: 05/03/2010
• Issued: 06/17/2014
• Est. Priority Date: 05/01/2009
• Status: Active Grant

• Current Assignee: DCG Systems Incorporated (Thermo Fisher Scientific Incorporated)
• Original Assignee: DCG Systems Incorporated (Thermo Fisher Scientific Incorporated)
• Inventors: Skvortsov, Dmitry, Ng, Yin Shyang
• Primary Examiner(s): Phan, Huy Q
• Assistant Examiner(s): Astacio-Oquendo, Giovanni
• Application Number:
  US12/772,899
• Publication Number:
  US 20100277159A1
• Time in Patent Office: 1,506 Days
• Field of Search: 324/750.23, 324/750.27, 32475421-75431, 324/97, 356/445
• US Class Current: 324/97
• CPC Class Codes: G01J 2003/283 computer-interfaced
• CPC Class Codes: G01J 3/28 Investigating the spectrum using colour filters G01J3/51
• CPC Class Codes: G01R 31/311 of integrated circuits G01R31/31728 takes precedence

Abstract

An apparatus and method for laser probing of a DUT is disclosed. The system enables laser voltage imaging state mapping of devices within the DUT. A selected area of the DUT is illuminating a while the DUT is receiving test signals causing certain of the active devices to modulate. Light reflected from the DUT is collected and is converted into an electrical signal. Phase information is extracting from the electrical signal and a two-dimensional image is generated from the phase information, wherein the two-dimensional image spatially correlates to the selected area.

Claims

1. A method for state mapping of active devices within a device under test (DUT), comprising:

illuminating a selected area of the DUT while the DUT is receiving test signals causing certain of the active devices to modulate, the selected area having at least two of the active devices situated therein and the two active devices modulating at opposing logic states;

collecting reflected light from the selected area;

converting the reflected light into an electrical signal;

extracting relative phase information of the two active devices from the electrical signal to thereby extract the logic states of active devices within the DUT;

generating a two-dimensional image from the phase information, wherein the two-dimensional image spatially correlates to the selected area.

2. The method of claim 1, wherein extracting phase information comprises mixing the electrical signal with an interference signal.

3. The method of claim 2, wherein mixing comprises applying the electrical signal and an interference signal to a spectrum analyzer.

4. The method of claim 3, further comprising collecting electromagnetic radiation emitted by at least one of the DUT, a tester, a test board, a DUT board, and cables to generate the interference signal.

5. The method of claim 4, further comprising conditioning the interference signal prior to the mixing.

6. The method of claim 5, wherein conditioning comprises at least one of:

amplifying, attenuating, and phase shifting.

7. The method of claim 3, wherein mixing comprises combining the electrical signal and the interference signal in one of a summing amplifier and a voltage adder.

8. The method of claim 7, further comprising RF amplifying the electrical signal prior to combining.

9. The method of claim 3, wherein mixing comprises applying the electrical signal and the interference signal to a T-connector.

10. The method of claim 3, wherein generating a two-dimensional image comprises applying output of the spectrum analyzer to a data acquisition module.

11. The method of claim 2, wherein mixing the electrical signal with an interference signal comprises mixing the electrical signal with an RF interference signal.