Backside depletion for backside illuminated image sensors

• US 8,759,141 B2
• Filed: 05/02/2013
• Issued: 06/24/2014
• Est. Priority Date: 09/29/2006
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Hsu, Tzu-Hsuan, Wang, Ching-Chun, Liu, Han-Chi
• Primary Examiner(s): WHALEN, DANIEL B
• Application Number:
  US13/875,659
• Publication Number:
  US 20130244368A1
• Time in Patent Office: 418 Days
• Field of Search: 438/73, 438/75, 257/447, 257/460
• US Class Current: 438/73
• CPC Class Codes: H01L 27/14603 Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
• CPC Class Codes: H01L 27/1464 Back illuminated imager structures
• CPC Class Codes: H01L 27/14683 Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof not peculiar thereto H01L21/00
• CPC Class Codes: H01L 31/0232 Optical elements or arrangements associated with the device H01L31/0236 takes precedence; for photovoltaic cells H01L31/054; for photovoltaic modules H02S40/20

Abstract

A backside illuminated image sensor is provided which includes a substrate having a front side and a backside, a sensor formed in the substrate at the front side, the sensor including at least a photodiode, and a depletion region formed in the substrate at the backside, a depth of the depletion region is less than 20% of a thickness of the substrate.

Claims

1. A method for fabricating a backside illuminated image sensor, the method comprising:

providing a substrate having a front side, a backside, and a first thickness;

forming a plurality of sensors in the substrate at the front side, wherein each of the plurality of sensors includes at least a photodiode;

reducing the thickness of the substrate from the first thickness to a second thickness;

after reducing the thickness of the substrate from the first thickness to the second thickness, forming a first doped region in the substrate proximate to the back side, the first doped region having a first conductivity type; and

forming a second doped region in the semiconductor substrate adjacent to the first doped region such that the second doped region is positioned between the first doped region and the backside of the semiconductor substrate, the second doped region having a second conductivity type that is opposite the first conductivity type.

2. The method of claim 1, wherein forming the first doped region includes implanting first ions of the first conductivity type at a first depth from the backside of the substrate;

and

wherein forming the second doped region includes implanting second ions of the second conductivity type at a second depth from the backside of the substrate, the second depth being less than the first depth.

3. The method of claim 2, wherein the implanting ions of the first conductivity type includes utilizing a p-type dopant, an energy of 500 eV to about 50 KeV, and a dosage of 10e3 atoms/cm² to about 50e5 atoms/cm².

4. The method of claim 2, wherein the implanting ions of the second conductivity type includes utilizing an n-type dopant, an energy of 500 eV to about 40 KeV, and a dosage of 10e3 atoms/cm² to about 50e5 atoms/cm².

5. The method of claim 2, wherein the performing laser annealing includes utilizing a power density of about 0.5 J/cm² to about 10 J/cm2.

6. The method of claim 1, wherein the second thickness of the substrate is about 1 μ

m to about 5 μ

m.

7. The method of claim 1, further comprising:

forming a metal interconnection layer and an interlayer dielectric on the front side of the substrate;

forming a color filter on the backside of the substrate and aligned with the sensor; and

forming a microlens formed over the color filter.

8. The method of claim 1, further comprising performing an annealing process to activate the first and second ions.

9. The method of claim 1, further comprising forming a microlens over the backside of the substrate.

10. A method comprising:

providing a semiconductor substrate having a first side and an opposing second side, the semiconductor substrate having a first conductivity type and a first doping concentration;

forming a sensor in the semiconductor substrate at the first side;

forming a first doped region in the semiconductor substrate proximate to the second side, the first doped region having the first conductivity type and a second doping concentration that is different than the first doping concentration;

forming a second doped region in the semiconductor substrate adjacent to the first doped region such that the second doped region is positioned between the first doped region and the second side of the semiconductor substrate, the second doped region having a second conductivity type that is opposite the first conductivity type; and

forming a color filter on the second side of the semiconductor substrate that is aligned with the sensor.

11. The method of claim 10, further comprising forming an interconnect structure on the first side of the semiconductor substrate.

12. The method of claim 10, further comprising performing a laser annealing process at the second side of the semiconductor substrate.

13. The method of claim 10, removing a portion of the semiconductor substrate adjacent the second side prior to forming the second doped region.

14. The method of claim 10, wherein the second doping concentration is greater than the first doping concentration, and

wherein the first conductivity type is p-type and the second conductivity type is n-type.

15. A method comprising:

providing a semiconductor substrate having a first surface and an opposing second surface, wherein the semiconductor substrate has a first thickness extending from the first surface to the second surface;

forming a sensing element in the semiconductor substrate proximate the first surface, wherein the sensing element is operable to sense light radiation directed towards the second surface;

forming an interconnection layer on the first surface of the semiconductor substrate;

removing a portion of the semiconductor substrate including the second surface such that the thickness of the semiconductor substrate is reduced from the first thickness to a second thickness, wherein the second thickness extends from the first surface to an opposing third surface of the semiconductor substrate;

after removing the portion of the semiconductor substrate, forming a first doped region in the semiconductor substrate at a first depth from the third surface;

forming a second doped region in the semiconductor substrate at a second depth from the third surface, the second depth being less than the first depth such that the second doped region is located between the first doped region and the third surface of the semiconductor substrate; and

performing a laser annealing process at the third surface of the semiconductor substrate.

16. The method of claim 15, wherein the semiconductor substrate has a first conductivity type and a first doping concentration,

wherein the first doped region has the first conductivity type and a second doping concentration that is different than the first doping concentration, and

wherein the second doped region has a second conductivity type that is opposite the first conductivity type.

17. The method of claim 16, wherein the first conductivity type is p-type and the second conductivity type is n-type.

18. The method of claim 15, further comprising:

forming a color filter formed on the third surface of the semiconductor substrate; and

forming a microlens on the color filter.

19. The method of claim 15, wherein the sensing element in the semiconductor substrate includes:

a third doped region extending from the first surface to a fourth depth into the semiconductor substrate from the first surface,

a fourth doped region extending from the first surface to a fifth depth into the semiconductor substrate from the first surface, and

a fifth doped region extending from the first surface to a sixth depth into the semiconductor substrate from the first surface, and

wherein the fourth depth is less than the fifth depth and wherein the fifth depth is less than the sixth depth.

20. The method of claim 15, wherein forming the first doped region in the semiconductor substrate at the first depth from the third surface includes implanting ions of a first conductivity type, and

wherein forming the second doped region in the semiconductor substrate at the second depth from the third surface includes implanting ions of a second conductivity type, the second conductivity type being different from the first conductivity type.