Segregating wafer carrier types in semiconductor storage devices

• US 8,761,923 B2
• Filed: 11/02/2012
• Issued: 06/24/2014
• Est. Priority Date: 06/25/2007
• Status: Expired due to Fees

• Current Assignee: Alsephina Innovations Inc. (Quarterhill Inc. (f/k/a Wi-LAN Inc.))
• Original Assignee: International Business Machines Corporation
• Inventors: Menser, Clayton D. Jr., Courtois, Louise C.
• Primary Examiner(s): Rodriguez, Saul
• Assistant Examiner(s): MYERS, GLENN F
• Application Number:
  US13/667,312
• Publication Number:
  US 20130060374A1
• Time in Patent Office: 599 Days
• Field of Search: 194/901, 194/902, 194/903, 194/904, 194/905, 194/906, 414/411, 414/270, 414/940, 700/214, 700/215, 700/225, 700/213
• US Class Current: 700/214
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection
• CPC Class Codes: H01L 21/67294 using identification means, e.g. labels on substrates or labels on containers
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/67775 Docking arrangements

Abstract

A system for managing the entry of a wafer carrier into a stocker in a semiconductor manufacturing operation is disclosed. The system comprises a stocker that accepts wafer carriers via one or more input ports. The present invention provides a means for detecting the presence of a wafer carrier at the input port, means for identifying the type of the wafer carrier, and means for executing an action sequence if the stocker is not compatible with those wafer carriers. Upon detecting an erroneous condition, an action sequence is executed which may include prevention entry of the wafer carrier, and notifying an operator.

Claims

1. A system for managing the entry of a wafer carrier into a stocker in a semiconductor manufacturing operation comprising:

said stocker having at least one input port;

means for detecting the presence of the wafer carrier at the input port;

means for identifying the type of the wafer carrier;

means for identifying the model of the wafer carrier;

means for identifying the material used to construct the wafer carrier; and

means for executing an action sequence if the stocker is not compatible with the identified material used to construct the wafer carrier;

wherein the means for identifying the material used to construct the wafer carrier comprises a plurality of electromechanical identification pins on the underside of the wafer carrier, wherein said plurality of identification pins are configured and arranged to form a pattern corresponding to the wafer carrier type, said plurality of identification pins contacting a corresponding plurality of wafer carrier type detection pins disposed on the input port, thereby providing an indication of wafer carrier type.

2. The system of claim 1, wherein the plurality of identification pins comprises four identification pins, each of the plurality of identification pins having a first height or a second height, wherein the first height is not equal to the second height, thereby forming a pattern corresponding to the wafer carrier type.

3. The system of claim 1, wherein the means for executing the action sequence comprises means for issuing an operator alert.

4. The system of claim 1, wherein the means for executing the action sequence comprises means for preventing the wafer carrier from entering the stocker.

5. The system of claim 4, wherein the means for preventing the wafer carrier from entering the stocker comprises the stocker having at least one input port, the at least one input port comprising:

a plurality of guide pins disposed to guide the wafer carrier into a loading position;

a plurality of wafer carrier presence detection pins; and

a plurality of wafer carrier type detection pins;

wherein the wafer carrier comprises a plurality of identification pins on the underside of the wafer carrier, whereby said plurality of identification pins are configured and arranged to engage said plurality of wafer carrier type detection pins, thereby providing an indication of wafer carrier type.

6. The system of claim 1, wherein the means for executing the action sequence comprises means for rerouting the wafer carrier.

7. The system of claim 6, wherein the means for rerouting the wafer carrier comprises:

means for identifying a compatible stocker; and

means for transporting the wafer carrier to the compatible stocker.

8. A system for managing the entry of a wafer carrier into a stocker in a semiconductor manufacturing operation comprising:

said stocker having at least one input port;

a plurality of wafer carrier type detection pins disposed on said input port;

a plurality of electromechanical guide pins disposed on the input port, wherein the plurality of wafer carrier type detection pins are configured such that displacement of each wafer carrier type detection pin of the plurality of wafer carrier type detection pins determines a pattern that corresponds to a particular wafer carrier type, wherein the wafer carrier type includes a wafer carrier material used to construct the wafer carrier; and

a computer system interfaced with said plurality of wafer carrier type detection pins, wherein the computer system is configured to execute an action sequence when the wafer carrier material used to construct the wafer carrier is not compatible with the stocker.