Servicing a plasma processing system with a robot

• US 8,764,907 B2
• Filed: 09/29/2009
• Issued: 07/01/2014
• Est. Priority Date: 03/28/2005
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Bailey, Andrew D. III
• Primary Examiner(s): Hassanzadeh, Parviz
• Assistant Examiner(s): Ford, Nathan K
• Application Number:
  US12/569,674
• Publication Number:
  US 20100024186A1
• Time in Patent Office: 1,736 Days
• Field of Search: 216/67, 427/255.28
• US Class Current: 134/8
• CPC Class Codes: B08B 1/00 Cleaning by methods involving the use of tools cleaning hollow articles by methods or apparatus specially adapted thereto B08B9/00
• CPC Class Codes: B08B 9/00 Cleaning hollow articles by methods or apparatus specially adapted thereto B08B6/00 takes precedence
• CPC Class Codes: B25J 5/00 Manipulators mounted on wheels or on carriages B25J1/00 takes precedence; programme-controlled manipulators B25J9/00 ; vehicle aspects B60, B62, e.g. remote-controlled steering for motor vehicles B62D1/24; control of position of vehicles G05D1/00
• CPC Class Codes: H01J 37/32743 for introducing the material into processing chamber
• CPC Class Codes: H01J 37/32862 In situ cleaning of vessels and/or internal parts
• CPC Class Codes: H01L 21/67751 vertical transfer of a single workpiece
• CPC Class Codes: Y10T 29/49723 including reconditioning of part

Abstract

A method for servicing a plasma processing system. The plasma processing system may include a plasma chamber. The plasma chamber may include a top piece and a bottom piece, wherein the top piece may be disposed above the bottom piece. The method may include using a robot device to control a lift mechanism to lift the top piece from the bottom piece. The method may also include extending a first member of the robot device into the top piece to perform a first set of tasks according to a first set of service procedures. The method may also include extending a second member of the robot device into the bottom piece to perform a second set of tasks according to a second set of service procedures.

Claims

1. A method of servicing a plasma processing system, the plasma processing system including at least a plasma chamber, the method comprising:

docking a robot device to a docking port of the plasma processing system, the docking of the robot device to the docking port including aligning a docking probe of the robot device with a docking port of the plasma processing system using one or more alignment mechanisms, thereby aligning the robot device with the plasma chamber, the robot device being coupled to an ambulatory platform;

using the robot device to control a lift mechanism to lift a to piece of the plasma processing system relative to a bottom piece of the plasma chamber;

extending a first member of the robot device into an opening between the to piece and the bottom piece of the plasma chamber; and

after the extending, performing a set of tasks according to a set of procedures.

2. The method of claim 1 wherein the set of tasks includes at least cleaning at least a set of inside walls of the plasma chamber, the method further comprising stopping the cleaning when a color of a surface of the set of inside wall of the plasma chamber matches a reference sample color.

3. The method of claim 1 wherein the set of tasks includes at least removing a plasma chamber part inside the plasma chamber.

4. The method of claim 1 wherein the set of tasks includes at least placing a plasma chamber part inside the plasma chamber.

5. The method of claim 1 wherein the set of tasks includes at least aligning a plasma chamber part inside the plasma chamber.

6. The method of claim 1 wherein the set of tasks includes performing programmed dipping inside the plasma chamber.

7. The method of claim 1 wherein the set of tasks includes performing grinding with brushes inside the plasma chamber.

8. The method of claim 1 wherein the set of tasks includes performing vacuuming for removing particles from inside of the plasma-chamber.

9. The method of claim 1 further comprising determining a set of weight and geometry constraints, wherein the set of tasks includes at least removing consumable structures from inside of the plasma chamber according to the set weight and geometry constraints.

10. The method of claim 1 further comprising determining a set of torque requirements, wherein the set of tasks includes at least tightening a set of bolts inside the plasma chamber according to the set of torque requirements.

11. A method of servicing a plasma processing system, the plasma processing system including at least a plasma chamber, the plasma chamber including at least a top piece and a bottom piece, the top piece being disposed above the bottom piece, the method comprising:

docking a robot device to a docking port of the plasma processing system, the docking of the robot device to the docking port including aligning a docking probe of the robot device with a docking port of the plasma processing system using one or more alignment mechanisms, thereby aligning the robot device with the plasma chamber, the robot device being coupled to an ambulatory platform;

using the robot device to control a lift mechanism to lift the top piece from the bottom piece;

extending a first member of the robot device into the top piece to perform a first set of tasks according to a first set of service procedures; and

extending a second member of the robot device into the bottom piece to perform a second set of tasks according to a second set of service procedures.

12. The method of claim 11 wherein the first set of tasks includes at least cleaning at least a set of inside walls of the top piece using a cleaning pad, the method further comprising stopping the cleaning when a measured friction between the cleaning pad and a surface of the set of inside walls of the top piece becomes less than a specified value.

13. The method of claim 11 wherein the first set of tasks includes at least removing a plasma chamber part inside the top piece.

14. The method of claim 11 wherein the first set of tasks includes at least placing a plasma chamber part inside the top piece.

15. The method of claim 11 wherein the first set of tasks includes at least aligning a plasma chamber part inside the top piece.

16. The method of claim 11 wherein the first set of tasks includes performing programmed dipping inside the top piece.

17. The method of claim 11 wherein the first set of tasks includes performing grinding with brushes inside the top piece.

18. The method of claim 11 wherein the first set of tasks includes performing vacuuming for removing particles from inside of the top piece.

19. The method of claim 11 further comprising determining a set of weight and geometry constraints, wherein the first set of tasks includes at least removing consumable structures from inside of the top piece according to the set of weight and geometry constraints.

20. The method of claim 11 further comprising determining a set of torque requirements, wherein the first set of tasks includes at least tightening a set of bolts inside the top piece according to the set of torque requirements.