Electrochromic devices

• US 8,764,951 B2
• Filed: 06/11/2010
• Issued: 07/01/2014
• Est. Priority Date: 04/30/2010
• Status: Active Grant

• Current Assignee: View Incorporated
• Original Assignee: View Incorporated
• Inventors: Wang, Zhongchun, Pradhan, Anshu, Rozbicki, Robert
• Primary Examiner(s): BAND, MICHAEL A
• Application Number:
  US12/814,279
• Publication Number:
  US 20110266138A1
• Time in Patent Office: 1,481 Days
• Field of Search: 204/192.15, 204/192.26, 204/192.27, 204/192.28, 204/192.29, 204/298.12, 359/265, 359/266, 359/267, 359/268, 359/269, 359/270, 359/271, 359/272, 359/273
• US Class Current: 204/192.26
• CPC Class Codes: C23C 14/083 of refractory metals or yttrium
• CPC Class Codes: G02F 1/1525 characterised by a particular ion transporting layer, e.g. electrolyte

Abstract

Conventional electrochromic devices frequently suffer from poor reliability and poor performance. Improvements are made using entirely solid and inorganic materials. Electrochromic devices are fabricated by forming an ion conducting electronically-insulating interfacial region that serves as an IC layer. In some methods, the interfacial region is formed after formation of an electrochromic and a counter electrode layer. The interfacial region contains an ion conducting electronically-insulating material along with components of the electrochromic and/or the counter electrode layer. Materials and microstructure of the electrochromic devices provide improvements in performance and reliability over conventional devices.

Claims

1. A method of fabricating an electrochromic device, the method comprising:

(a) forming either an electrochromic layer including an electrochromic material or a counter electrode layer including a counter electrode material by sputtering with a first sputter gas having an oxygen concentration;

(b) forming an intermediate layer over the electrochromic layer or the counter electrode layer by sputtering with a second sputter gas, wherein the second sputter gas has a higher concentration of oxygen than the first sputter gas, to thereby form a stack comprising a bilayer or graded layer comprising (i) the electrochromic layer or the counter electrode layer formed in (a), and (ii) the intermediate layer, where the intermediate layer includes an oxygen rich form of the electrochromic material or the counter electrode material, wherein the intermediate layer is in direct physical contact with the electrochromic or counter electrode layer formed in (a);

(c) exposing the intermediate layer to lithium;

(d) depositing the other of the electrochromic layer and the counter electrode layer on the intermediate layer; and

(e) converting at least part of the intermediate layer to an ion conducting region, coextensive with the intermediate layer, comprising an electronically-insulating ionically-conducting material and the material of the intermediate layer.

2. The method of claim 1, wherein (a) comprises forming the electrochromic layer by depositing tungsten oxide.

3. The method of claim 1, wherein the ion conducting region is a non-homogeneous mixture of the electronically-insulating ionically-conducting material and the material of the intermediate layer.

4. The method of claim 2, wherein depositing tungsten oxide comprises sputtering using a tungsten target to reach a thickness of between about 350 nm and about 450 nm, and heating, at least intermittently, to between about 150°

C. and about 450°

C. during formation of the electrochromic layer, and wherein the first sputter gas comprises between about 40% and about 80% O₂ and between about 20% and about 60% Ar.

5. The method of claim 4, wherein the electrochromic layer is substantially polycrystalline.

6. The method of claim 2, wherein (b) comprises sputtering WO₃ using a tungsten target to reach a thickness of between about 10 nm and about 200 nm, without heating, and wherein the second sputter gas comprises between about 70% and 100% O₂ and between 0% and about 30% Ar.

7. The method of claim 6, wherein (c) comprises delivering lithium to the intermediate layer until at least blind charge is satisfied.

8. The method of claim 7, wherein (d) comprises forming the counter electrode layer via sputtering NiWO onto the intermediate layer.

9. The method of claim 8, wherein the NiWO is substantially amorphous.

10. The method of claim 8, wherein NiWO is between about 150 nm and about 300 nm thick.

11. The method of claim 10, further comprising delivering lithium to the counter electrode layer until the counter electrode layer is substantially bleached.

12. The method of claim 11, further comprising sputtering an additional amount of lithium, between about 5% and about 15% excess beyond quantity required to bleach the counter electrode layer, onto the counter electrode layer.

13. The method of claim 12, further comprising depositing a transparent conducting oxide layer on top of the counter electrode layer.

14. The method of claim 13, wherein the transparent conducting oxide comprises indium tin oxide.

15. The method of claim 13, further comprising heating the stack formed in (a) and (b) and the electrochromic layer or counter electrode layer formed in (d), before or after depositing the transparent conducting oxide, at between about 150°

C. and about 450°

C., for between about 10 minutes and about 30 minutes under Ar, and then for between about 1 minute and about 15 minutes under O₂.

16. The method of claim 15, further comprising heating the stack formed in (a) and (b) and the electrochromic layer or counter electrode layer formed in (d) in air at between about 250°

C. and about 350°

C., for between about 20 minutes and about 40 minutes.

17. The method of claim 16, further comprising delivering a current between the electrochromic layer and the counter electrode layer as part of an initial activation cycle of the electrochromic device.

47. The method of claim 1, wherein depositing the other of the electrochromic layer and counter electrode layer is performed without first depositing an ion conducting layer between the electrochromic layer and the counter electrode layer.

48. The method of claim 1, wherein the exposing to lithium in (c) is performed after (d) depositing the other of the electrochromic layer and the counter electrode layer on the intermediate layer.

18. A method of fabricating an electrochromic device, the method comprising:

(a) forming either an electrochromic layer including an electrochromic material or a counter electrode layer including a counter electrode material by sputtering with a sputter gas having an oxygen concentration, wherein the sputter gas used to form the electrochromic layer or counter electrode layer comprises a higher concentration of oxygen in a final portion of sputtering than in an initial portion of sputtering, wherein the layer formed comprises a stack comprising a graded layer or a bilayer, the graded layer or bilayer comprising a superstoichiometric oxygen portion in an upper region of the electrochromic or counter electrode layer and a non-superstoichiometric oxygen portion in a lower region of the electrochromic or counter electrode layer;

(b) exposing the superstoichiometric oxygen portion to lithium;

(c) depositing the other of the electrochromic layer and the counter electrode layer on the superstoichiometric oxygen portion; and

(e) converting at least part of the superstoichiometric oxygen portion to an ion conducting region comprising an electronically-insulating ionically-conducting material.

19. The method of claim 18, wherein (a) comprises forming the electrochromic layer by depositing tungsten oxide.

20. The method of claim 18, wherein the upper region comprises a non-homogeneous mixture of the electronically-insulating ionically-conducting material and the material of the superstoichiometric oxygen portion.

21. The method of claim 19, wherein depositing tungsten oxide comprises sputtering using a tungsten target, wherein the sputter gas comprises between about 40% and about 80% O₂ and between about 20% and about 60% Ar during the initial portion of sputtering the electrochromic layer, and the sputter gas comprises between about 70% and 100% O₂ and between 0% and about 30% Ar during the final portion of sputtering the electrochromic layer, and heating, at least intermittently, to between about 200°

C. and about 350°

C. at the beginning of formation of the electrochromic layer but not heating during the final portion of sputtering the electrochromic layer.

22. The method of claim 21, wherein the electrochromic layer is substantially polycrystalline.

23. The method of claim 19, wherein (b) comprises delivering lithium to the superstoichiometric oxygen portion until at least blind charge is satisfied.

24. The method of claim 23, wherein (c) comprises forming the counter electrode layer via sputtering NiWO onto the upper region of the layer formed in (a).

25. The method of claim 24, wherein the NiWO is substantially amorphous.

26. The method of claim 24, wherein NiWO is between about 150 nm and about 300 nm thick.

27. The method of claim 24, further comprising sputtering lithium onto the counter electrode layer until the counter electrode layer is substantially bleached.

28. The method of claim 27, further comprising sputtering an additional amount of lithium, between about 5% and about 15% excess beyond a quantity required to bleach the counter electrode layer, onto the counter electrode layer.

29. The method of claim 28, further comprising depositing a transparent conducting oxide layer on top of the counter electrode layer.

30. The method of claim 29, wherein the transparent conducting oxide comprises indium tin oxide.

31. The method of claim 29, further comprising heating the stack formed in (a) and the electrochromic layer or counter electrode layer formed in (c), before or after depositing the transparent conducting oxide, at between about 150°

C. and about 450°

C., for between about 10 minutes and about 30 minutes under Ar, and then for between about 1 minute and about 15 minutes under O₂.

32. The method of claim 31, further comprising heating the stack formed in (a) and the electrochromic layer or counter electrode layer formed in (c) in air at between about 250°

C. and about 350°

C., for between about 20 minutes and about 40 minutes.

33. The method of claim 32, further comprising delivering a current between the electrochromic layer and the counter electrode layer as part of an initial activation cycle of the electrochromic device.

34. The method of claim 18, wherein (b) is performed after (c).

35. The method of claim 34, wherein the electrochromic material comprises tungsten oxide.

36. The method of claim 35, wherein depositing tungsten oxide comprises sputtering using a tungsten target, wherein the sputter gas comprises between about 40% and about 80% O₂ and between about 20% and about 60% Ar during the initial portion of sputtering the electrochromic layer, and the sputter gas comprises between about 70% and 100% O₂ and between 0% and about 30% Ar during the final portion of sputtering the electrochromic layer, and heating, at least intermittently, to between about 200°

C. and about 350°

C. at the beginning of formation of the electrochromic layer but not heating during the final portion of sputtering the electrochromic layer.

37. The method of claim 35, wherein (b) comprises delivering lithium to the superstoichiometric oxygen portion until at least blind charge is satisfied.

38. The method of claim 37, wherein (c) comprises forming the counter electrode layer via sputtering NiWO onto the upper region of the layer formed in (a).

39. The method of claim 38, wherein the NiWO is substantially amorphous.

40. The method of claim 38, wherein NiWO is between about 150 nm and about 300 nm thick.

41. The method of claim 38, further comprising sputtering lithium onto the counter electrode layer until the counter electrode layer is substantially bleached.

42. The method of claim 41, further comprising sputtering an additional amount of lithium, between about 5% and about 15% excess beyond a quantity required to bleach the counter electrode layer, onto the counter electrode layer.

43. The method of claim 40, further comprising depositing a transparent conducting oxide layer on top of the counter electrode layer.

44. The method of claim 43, further comprising heating the stack formed in (a) and the electrochromic layer or counter electrode layer formed in (c), before or after depositing the transparent conducting oxide, at between about 150°

C. and about 450°

C., for between about 10 minutes and about 30 minutes under Ar, and then for between about 1 minute and about 15 minutes under O₂.

45. The method of claim 44, further comprising heating the stack formed in (a) and the electrochromic layer or counter electrode layer formed in (c) in air at between about 250°

C. and about 350°

C., for between about 20 minutes and about 40 minutes.

46. The method of claim 44, further comprising delivering a current between the electrochromic layer and the counter electrode layer as part of an initial activation cycle of the electrochromic device.

49. The method of claim 18, wherein depositing the other of the electrochromic layer and counter electrode layer is performed without first depositing an ion conducting layer between the electrochromic layer and the counter electrode layer.

50. The method of claim 18, wherein the exposing to lithium in (b) is performed after (c) depositing the other of the electrochromic layer and the counter electrode layer on the superstoichiometric oxygen portion.