Semiconductor device including photosensor and transistor having oxide semiconductor

• US 8,766,338 B2
• Filed: 03/03/2011
• Issued: 07/01/2014
• Est. Priority Date: 03/12/2010
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Kurokawa, Yoshiyuki, Ikeda, Takayuki, Tamura, Hikaru, Kozuma, Munehiro
• Primary Examiner(s): VU, HUNG K
• Application Number:
  US13/039,491
• Publication Number:
  US 20110220889A1
• Time in Patent Office: 1,216 Days
• Field of Search: 257/43, 257/57, 257/291, 257/292, 257/E31.026, 257/72
• US Class Current: 257/292
• CPC Class Codes: G02F 1/13312 Circuits comprising photodetectors for purposes other than feedback
• CPC Class Codes: G02F 1/1362 Active matrix addressed cells G02F1/134336, G02F1/134363 take precedence
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/14632 Wafer-level processed structures
• CPC Class Codes: H01L 27/1464 Back illuminated imager structures
• CPC Class Codes: H01L 27/14643 Photodiode arrays; MOS imagers
• CPC Class Codes: H04N 25/75 Circuitry for providing, modifying or processing image signals from the pixel array

Abstract

An object is to achieve low-power consumption by reducing the off-state current of a transistor in a photosensor. A semiconductor device including a photosensor having a photodiode, a first transistor, and a second transistor; and a read control circuit including a read control transistor, in which the photodiode has a function of supplying charge based on incident light to a gate of the first transistor; the first transistor has a function of storing charge supplied to its gate and converting the charge stored into an output signal; the second transistor has a function of controlling reading of the output signal; the read control transistor functions as a resistor converting the output signal into a voltage signal; and semiconductor layers of the first transistor, the second transistor, and the read control transistor are formed using an oxide semiconductor.

Claims

1. A semiconductor device comprising:

a photosensor comprising;

a photodiode;

a first transistor having a gate, the gate of the first transistor being electrically connected to one electrode of the photodiode;

a second transistor having a source and a drain, one of the source and the drain of the second transistor being connected to one of a source and a drain of the first transistor; and

a read control circuit including a read control transistor having a source and a drain, one of the source and the drain of the read control transistor being connected to the other of the source and the drain of the second transistor,

wherein the read control transistor includes an oxide semiconductor in a semiconductor layer.

2. The semiconductor device according to claim 1, wherein a voltage applied to a gate of the read control transistor changes in accordance with incident light so that resistance of the read control transistor changes.

3. The semiconductor device according to claim 1, wherein the oxide semiconductor comprises at least one of indium, gallium, tin, and zinc.

4. The semiconductor device according to claim 1, wherein one of the first transistor and the second transistor includes a semiconductor layer comprising a semiconductor other than the oxide semiconductor, and

wherein the semiconductor other than the oxide semiconductor is any one of an amorphous semiconductor, a microcrystalline semiconductor, a polycrystalline semiconductor, and a single crystal semiconductor.

5. The semiconductor device according to claim 1, wherein the photodiode is selected from a PN diode, a PIN diode, and a Schottky diode.

6. The semiconductor device according to claim 1, wherein a plurality of the photosensors according to claim 1 is arranged in row and column directions over a substrate.

7. The semiconductor device according to claim 6, wherein the photosensor is configured to perform a reset operation, a storage operation, and a read operation.

8. The semiconductor device according to claim 7, wherein the plurality of the photosensors is configured to concurrently perform the reset operation and the storage operation in all the rows, and sequentially perform the read operation in each row.

9. The semiconductor device according to claim 1, wherein an off-state current of the read control transistor is less than or equal to 100 aA per 1 μ

m in a channel width.

10. The semiconductor device according to claim 1, wherein a gate of the read control transistor, each of the source and the drain of the read control transistor and the other of the source and the drain of the first transistor are electrically connected to a photosensor reading circuit.

11. A semiconductor device comprising:

a photosensor comprising;

a photodiode;

a first transistor having a source and a drain, one of the source and the drain of the first transistor being connected to one electrode of the photodiode;

a second transistor having a gate, the gate of the second transistor being connected to the other of the source and the drain of the first transistor;

a third transistor having a source and a drain, one of the source and the drain of the third transistor being connected to one of a source and a drain of the second transistor; and

a read control circuit including a read control transistor having a source and a drain, one of the source and the drain of the read control transistor being connected to the other of the source and the drain of the third transistor,

wherein the read control transistor includes an oxide semiconductor in a semiconductor layer.

12. The semiconductor device according to claim 11, wherein a voltage applied to a gate of the read control transistor changes in accordance with incident light so that resistance of the read control transistor changes.

13. The semiconductor device according to claim 11, wherein the oxide semiconductor comprises at least one of indium, gallium, tin, and zinc.

14. The semiconductor device according to claim 11, wherein at least one of the first transistor, the second transistor and the third transistor includes a semiconductor layer comprising a semiconductor other than the oxide semiconductor, and

wherein the semiconductor other than the oxide semiconductor is any one of an amorphous semiconductor, a microcrystalline semiconductor, a polycrystalline semiconductor, and a single crystal semiconductor.

15. The semiconductor device according to claim 11, wherein the photodiode is selected from a PN diode, a PIN diode, and a Schottky diode.

16. The semiconductor device according to claim 11, wherein a plurality of the photosensors according to claim 9 is arranged in row and column directions over a substrate.

17. The semiconductor device according to claim 16, wherein the photosensor is configured to perform a reset operation, a storage operation, and a read operation.

18. The semiconductor device according to claim 17, wherein the plurality of the photosensors is configured to concurrently perform the reset operation and the storage operation in all the rows, and sequentially perform the read operation in each row.

19. The semiconductor device according to claim 11, wherein an off-state current of the read control transistor is less than or equal to 100 aA per 1 μ

m in a channel width.

20. The semiconductor device according to claim 11, wherein a gate of the read control transistor, each of the source and the drain of the read control transistor and the other of the source and the drain of the second transistor are electrically connected to a photosensor reading circuit.