Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same
First Claim
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1. A disk resonator gyroscope comprising:
- a quartz base;
a quartz resonator disk having a central pillar connected to the base, the quartz resonator disk having a surface facing the base and having plurality of circumferential slots in the surface of the quartz resonator disk around the central pillar; and
an electrode comprised of quartz and connected to the base, the electrode outside of an outer edge of the resonator disk and not connected to the outer edge of the resonator disk;
a conductive film on the surface of the resonator disk, the outer edge of the resonator disk, the central pillar, and an inner wall of the electrode;
wherein the inner wall of the electrode faces the outer edge of the resonator disk.
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Abstract
A disk resonator gyroscope includes a quartz base, a quartz resonator disk having a central pillar connected to the base, the quartz resonator disk having a surface facing the base and having plurality of circumferential slots in the surface of the quartz resonator disk around the central pillar, and an electrode comprised of quartz and connected to the base outside of an outer edge of the resonator disk.
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Citations
28 Claims
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1. A disk resonator gyroscope comprising:
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a quartz base; a quartz resonator disk having a central pillar connected to the base, the quartz resonator disk having a surface facing the base and having plurality of circumferential slots in the surface of the quartz resonator disk around the central pillar; and an electrode comprised of quartz and connected to the base, the electrode outside of an outer edge of the resonator disk and not connected to the outer edge of the resonator disk; a conductive film on the surface of the resonator disk, the outer edge of the resonator disk, the central pillar, and an inner wall of the electrode; wherein the inner wall of the electrode faces the outer edge of the resonator disk. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A disk resonator gyroscope comprising:
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a quartz base; a quartz resonator disk having a central pillar connected to the base, the quartz resonator disk having a surface facing the base and having plurality of circumferential slots in the surface of the quartz resonator disk around the central pillar; an electrode comprised of quartz and connected to the base, the electrode outside of an outer edge of the resonator disk and not connected to the outer edge of the resonator disk; a conductive film on the surface of the resonator disk, the outer edge of the resonator disk, the central pillar, and a surface and an inner wall of the electrode; wherein the inner wall of the electrode faces the outer edge of the resonator disk; wherein the surface of the electrode faces the base; and wherein a gap between the electrode and the outer edge of the resonator disk is less than or equal to 50 microns. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification