Devices comprising nanotubes or nanowires having alterable characteristics and related methods

• US 8,770,026 B2
• Filed: 08/06/2012
• Issued: 07/08/2014
• Est. Priority Date: 06/25/2007
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Rueger, Neal R.
• Primary Examiner(s): SAINT SURIN, JACQUES M
• Application Number:
  US13/567,896
• Publication Number:
  US 20120299440A1
• Time in Patent Office: 701 Days
• Field of Search: 735/79, 735/97, 736/49, 310/23.06, 310/36, 310/37, 310/323.06
• US Class Current: 73/579
• CPC Class Codes: G01H 11/00 Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
• CPC Class Codes: H03H 3/0077 by tuning of resonance frequency

Abstract

Devices usable as sensors, as transducers, or as both sensors and transducers include one or more nanotubes or nanowires. In some embodiments, the devices may each include a plurality of sensor/transducer devices carried by a common substrate. The sensor/transducer devices may be individually operable, and may exhibit a plurality of resonant frequencies to enhance the operable frequency bandwidth of the devices. Sensor/transducer devices include one or more elements configured to alter a resonant frequency of a nanotube. Such elements may be selectively and individually actuable. Methods for sensing mechanical displacements and vibrations include monitoring an electrical characteristic of a nanotube. Methods for generating mechanical displacements and vibrations include using an electrical signal to induce mechanical displacements or vibrations in one or more nanotubes. Methods for adjusting an electrical signal include passing an electrical signal through a nanotube and changing a resonant frequency of the nanotube.

Claims

1. A sensor device comprising:

at least one element located adjacent at least one nanotube or nanowire and configured to alter at least one electrical characteristic of the at least one nanotube or nanowire by bearing on a lateral side of the at least one nanotube or nanowire; and

at least one electrode operatively coupled to the at least one nanotube or nanowire and configured to detect the at least one electrical characteristic.

2. The device of claim 1, wherein the at least one nanotube or nanowire comprises a nanowire.

3. The device of claim 1, wherein the at least one element comprises at least one piezoelectric element.

4. The device of claim 3, wherein the at least one piezoelectric element comprises a plurality of piezoelectric elements, each piezoelectric element of the plurality of piezoelectric elements located and oriented to impinge on the at least one nanotube or nanowire at a different location along a length of the at least one nanotube or nanowire.

5. The device of claim 1, wherein the at least one electrode comprises an electrode in electrical contact with an end of the at least one nanotube or nanowire.

6. The device of claim 5, wherein the at least one electrode further comprises an additional electrode in electrical contact with an opposing end of the at least one nanotube or nanowire.

7. The device of claim 1, wherein the at least one characteristic comprises at least one of a current, a voltage, and a capacitance.

8. The device of claim 1, wherein the device comprises a transducer, and wherein the device further comprises at least one electrode located and configured to generate mechanical movement of the at least one nanotube or nanowire responsive to application of an electrical potential to the at least one electrode.

9. The device of claim 8, wherein the at least one electrode comprises an electrode in electrical contact with an end of the at least one nanotube or nanowire.

10. The device of claim 9, wherein the at least one electrode further comprises an additional electrode in electrical contact with an opposing end of the at least one nanotube or nanowire.

11. A device, comprising:

at least one nanotube or nanowire;

at least one element located adjacent the at least one nanotube or nanowire and configured and located to apply a bending force to the at least one nanotube or nanowire by impinging on a lateral side of the at least one nanotube or nanowire; and

at least one electrode in electrical communication with the at least one nanotube or nanowire.

12. The device of claim 11, wherein the device comprises a sensor, and wherein the at least one electrode is configured for sensing at least one of a current, a voltage, and a capacitance using the at least one nanotube or nanowire.

13. The device of claim 11, wherein the device comprises a transducer, and wherein the at least one electrode is configured for generating mechanical movement of the at least one nanotube or nanowire responsive to application of an electrical potential to the at least one electrode.

14. A method, comprising:

applying a bending force to at least one nanotube or nanowire by impinging at least one element located adjacent the at least one nanotube or nanowire against a lateral side surface of the at least one nanotube or nanowire;

altering at least one electrical characteristic of the at least one nanotube or nanowire responsive to application of the bending force to the at least one nanotube or nanowire; and

sensing the alteration of the at least one electrical characteristic of the at least one nanotube or nanowire usin at least one electrode in electrical communication with the at least one nanotube or nanowire.

15. The method of claim 14, wherein sensing the alteration of the at least one electrical characteristic of the at least one nanotube or nanowire comprises sensing an alteration of at least one of a current, a voltage, and a capacitance.

16. The method of claim 14, further comprising generating mechanical movement of the at least one nanotube or nanowire by applying an electrical potential to at least one electrode in electrical communication with the at least one nanotube or nanowire.

17. The method of claim 14, wherein impinging the at least one element against the lateral side surface of the at least one nanotube or nanowire comprises impinging a piezoelectric element against the lateral side surface of the at least one nanotube or nanowire.