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Ultrasonic transmitter and receiver with compliant membrane

  • US 8,770,030 B2
  • Filed: 04/19/2011
  • Issued: 07/08/2014
  • Est. Priority Date: 04/19/2011
  • Status: Active Grant
First Claim
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1. An ultrasonic transmitter and receiver comprising:

  • a MEMS composite transducer comprisinga substrate, portions of the substrate defining an outer boundary of a cavity;

    a first MEMS transducing member including a first size, a first portion of the first MEMS transducing member being anchored to the substrate, a second portion of the first MEMS transducing member extending over at least a portion of the cavity, the second portion of the first MEMS transducing member being free to move relative to the cavity;

    a second MEMS transducing member including a second size smaller than the first size, a first portion of the second MEMS transducing member being anchored to the substrate, a second portion of the second MEMS transducing member extending over at least a portion of the cavity, the second portion of the second MEMS transducing member being free to move relative to the cavity; and

    a compliant membrane positioned in contact with the first and second MEMS transducing members, a first portion of the compliant membrane covering the first and second MEMS transducing members, and a second portion of the compliant membrane being anchored to the substrate.

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