Formed body, production method thereof, electronic device member and electronic device

• US 8,771,834 B2
• Filed: 03/14/2013
• Issued: 07/08/2014
• Est. Priority Date: 09/21/2010
• Status: Active Grant

• Current Assignee: Lintec Corporation
• Original Assignee: Lintec Corporation
• Inventors: Uemura, Kazue, Kondo, Takeshi, Suzuki, Yuta
• Primary Examiner(s): Nakarani, Dhirajlal S
• Application Number:
  US13/826,954
• Publication Number:
  US 20130202900A1
• Time in Patent Office: 481 Days
• Field of Search: 427/489, 427/496, 427/503, 427/525, 427/527, 428/451
• US Class Current: 428/451
• CPC Class Codes: B32B 27/16 specially treated, e.g. irradiated
• CPC Class Codes: C08J 2323/06 Polyethene
• CPC Class Codes: C08J 2483/16 in which all the silicon atoms are connected by linkages other than oxygen atoms
• CPC Class Codes: C08J 7/042 with two or more layers, where at least one layer of a composition contains a polymer binder
• CPC Class Codes: C08J 7/043 Improving the adhesiveness of the coatings per se, e.g. forming primers adhesives in the form of films or foils characterised by the primer layers between the polymer carriers and the adhesives C09J7/50
• CPC Class Codes: C08J 7/048 Forming gas barrier coatings
• CPC Class Codes: C08J 7/123 Treatment by wave energy or particle radiation C08J7/18 takes precedence
• CPC Class Codes: C23C 14/48 Ion implantation
• CPC Class Codes: G02F 1/133305 Flexible substrates, e.g. plastics, organic film
• CPC Class Codes: H01L 23/293 Organic, e.g. plastic
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: Y10T 428/31667 Next to addition polymer from unsaturated monomers, or aldehyde or ketone condensation product

Abstract

The present invention is a formed article sequentially comprising a base layer, a primer layer that includes a hydroxyl group-containing polymer, and a gas barrier layer, the gas barrier layer being formed of a material that includes at least an oxygen atom and a silicon atom, a surface layer part of the gas barrier layer having an oxygen atom content rate of 60 to 75%, a nitrogen atom content rate of 0 to 10%, and a silicon atom content rate of 25 to 35%, based on a total content rate of oxygen atoms, nitrogen atoms, and silicon atoms, and the surface layer part of the gas barrier layer having a film density of 2.4 to 4.0 g/cm³. According to the present invention, provided is a formed article, a method for producing the same, an electronic device member including the formed article, and an electronic device including the electronic device member, with an excellent gas barrier capability and excellent transparency.

Claims

1. A formed article sequentially comprising a base layer, a primer layer that includes a hydroxyl group-containing polymer, and a gas barrier layer, the gas barrier layer being formed of a material that includes at least an oxygen atom and a silicon atom, a surface layer part of the gas barrier layer having an oxygen atom content rate of 60 to 75%, a nitrogen atom content rate of 0 to 10%, and a silicon atom content rate of 25 to 35%, based on a total content rate of oxygen atoms, nitrogen atoms, and silicon atoms, and the surface layer part of the gas barrier layer having a film density of 2.4 to 4.0 g/cm³.

2. The formed article according to claim 1, wherein the gas barrier layer is obtained by implanting ions into a polysilazane compound-containing layer.

3. The formed article according to claim 2, wherein the ions are obtained by ionizing at least one gas selected from the group consisting of hydrogen, nitrogen, oxygen, argon, helium, neon, xenon, and krypton.

4. The formed article according to claim 3, wherein the gas barrier layer is obtained by implanting the ions into the polysilazane compound-containing layer by a plasma ion implantation method.

5. The formed article according to claim 3, wherein the polysilazane compound is perhydropolysilazane.

6. The formed article according to claim 2, wherein the gas barrier layer is obtained by implanting the ions into the polysilazane compound-containing layer by a plasma ion implantation method.

7. The formed article according to claim 6, wherein the polysilazane compound is perhydropolysilazane.

8. The formed article according to claim 2, wherein the polysilazane compound is perhydropolysilazane.

9. The formed article according to claim 2, wherein the hydroxyl group-containing polymer has a hydroxyl group-containing repeating unit content of 10 mol % or more based on total repeating units.

10. A method for producing the formed article according to claim 2, the method comprising forming a polysilazane compound-containing layer on a primer layer that is formed on a surface of a base layer and includes a hydroxyl group-containing polymer, and implanting ions into a surface area of the polysilazane compound-containing layer.

11. The method according to claim 10, comprising forming a polysilazane compound-containing layer on a primer layer that is formed on a surface of a base layer and includes a hydroxyl group-containing polymer, and implanting ions of at least one gas selected from the group consisting of hydrogen, nitrogen, oxygen, argon, helium, neon, xenon, and krypton into a surface area of the polysilazane compound-containing layer.

12. The method according to claim 10, comprising forming a polysilazane compound-containing layer on a primer layer that is formed on a surface of a base layer and includes a hydroxyl group-containing polymer, and implanting ions of at least one gas selected from the group consisting of hydrogen, nitrogen, oxygen, argon, helium, neon, xenon, and krypton into a surface area of the polysilazane compound-containing layer by a plasma ion implantation method.

13. The formed article according to claim 1, wherein the hydroxyl group-containing polymer has a hydroxyl group-containing repeating unit content of 10 mol % or more based on total repeating units.

14. The formed article according to claim 13, wherein the ions are obtained by ionizing at least one gas selected from the group consisting of hydrogen, nitrogen, oxygen, argon, helium, neon, xenon, and krypton.

15. The formed article according to claim 13, wherein the gas barrier layer is obtained by implanting the ions into the polysilazane compound-containing layer by a plasma ion implantation method.

16. The formed article according to claim 1, the formed article having a water vapor transmission rate at a temperature of 40°

C. and a relative humidity of 90% of less than 0.10 g/m²/day.

17. The formed article according to claim 1, the formed article having a total light transmittance measured in accordance with JIS K 7361-1 of 90% or more.

18. An electronic device member comprising the formed article according to claim 1.

19. An electronic device comprising the electronic device member according to claim 18.