Microlithographic projection exposure apparatus with correction optical system that heats projection objective element

• US 8,773,638 B2
• Filed: 03/19/2010
• Issued: 07/08/2014
• Est. Priority Date: 10/09/2007
• Status: Active Grant

• Current Assignee: CARL Zeiss SMT GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: CARL Zeiss SMT GmbH (Carl-Zeiss-Stiftung)
• Inventors: Dodoc, Aurelian, Bleidistel, Sascha, Conradi, Olaf, Kazi, Arif
• Primary Examiner(s): LIU, CHIA HOW MICHAEL
• Application Number:
  US12/727,482
• Publication Number:
  US 20100231883A1
• Time in Patent Office: 1,572 Days
• Field of Search: 355/70, 355/67, 355/30, 355/53
• US Class Current: 355/70
• CPC Class Codes: G03F 7/70308 Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
• CPC Class Codes: G03F 7/70891 Temperature

Abstract

A microlithographic projection exposure apparatus includes a primary illumination system producing projection light, a projection objective and a correction optical system. The correction optical system includes a secondary illumination system, which produces an intensity distribution of correction light in a reference surface, and a correction element which includes a heating material and is arranged in a plane that is at least substantially optically conjugate to the reference surface such that the correction light and the projection light pass through at least one lens contained in the projection objective before they impinge on the correction element. All lenses through which both the correction light and the projection light pass are made of a lens material which has a lower coefficient of absorption for the correction light than the heating material contained in the correction element.

Claims

1. An apparatus, comprising:

a primary illumination system configured to produce an intensity distribution of projection light in a mask plane;

a projection objective comprising a lens; and

a correction optical system, comprising;

a secondary illumination system configured to produce a variable intensity distribution of correction light in a reference surface; and

a correction element comprising a heating material, the correction element being in a plane that is at least substantially optically conjugate to the reference surface so that the correction light and the projection light pass through the lens of the projection objective before they impinge on the correction element,

wherein;

all lenses through which both the correction light and the projection light pass comprise one or more lens materials having a lower coefficient of absorption for the correction light than the heating material,

the correction optical system is configured to heat the entire correction element, and

the apparatus is a microlithographic projection exposure apparatus.

2. The apparatus of claim 1, wherein, for the correction light, a coefficient of absorption of the heating material is at least two times greater than a highest coefficient of absorption of a lens material through which the correction light passes.

3. The apparatus of claim 1, wherein, for the correction light, a coefficient of absorption of the heating material is at least five times greater than a highest coefficient of absorption of a lens material through which the correction light passes.

4. The apparatus of claim 1, wherein the projection light is selected so that a layer to be disposed in an image plane of the projection objective is sensitive to the projection light, and wherein the correction light is selected so that the layer to be disposed in the image plane of the projection objective is insensitive to the correction light.

5. The apparatus of claim 1, wherein the projection light and the correction light have different wavelengths.

6. The apparatus of claim 1, wherein the heating material comprises a synthetic quartz glass having a OH concentration of more than 500 ppm, and the correction light has a light component with a wavelength between 2.65 μ

m and 2.85 μ

m.

7. The apparatus of claim 1, wherein the correction element is a refractive optical element.

8. The apparatus of claim 7, wherein the correction element comprises a substrate configured as a plane parallel plate.

9. The apparatus of claim 1, wherein the correction element is arranged in, or in close proximity to, a pupil plane of the projection objective.

10. The apparatus of claim 9, wherein close proximity is defined by axial distances from the pupil plane at which the ratio P=h_mr/h_cr>

3, wherein h_mr is the height of a marginal ray that emerges from a point on an optical axis of the projection objective, and h_cr is the height of a chief ray that impinges on a marginal image point.

11. The apparatus of claim 10, wherein P>

5.

12. The apparatus of claim 1, wherein the correction optical system comprises a condenser through which only the correction light is allowed to propagate during use of the apparatus.

13. The apparatus of claim 12, wherein the condenser establishes a Fourier relationship between the reference surface and the mask plane or a plane which is optically conjugate to the mask plane.

14. The apparatus of claim 1, wherein the correction optical system comprises a beam folding element that feeds the correction light into a beam path of the projection objective.

15. The apparatus of claim 14, wherein the beam folding element comprises a mirror or a prism.

16. The apparatus of claim 1, wherein the correction optical system comprises a spatial light modulator that is configured to vary the intensity distribution in the reference surface.

17. The apparatus of claim 1, wherein the correction optical system comprises an optical integrator having a light exit surface arranged at least substantially in the reference surface.

18. The apparatus of claim 1, wherein the correction optical system is configured to heat portions of the correction element.

19. A method, comprising:

producing a variable intensity distribution of correction light in a reference surface;

imaging the reference surface onto a correction element in a projection objective of a microlithographic projection exposure apparatus, and

using a correction optical system, the correction optical system being configured to heat the entire correction element,

wherein both projection light of the microlithographic projection exposure apparatus and the correction light pass through at least one lens of the projection objective before they impinge on the correction element, and the correction light is more strongly absorbed in the correction element than in any lens through which both the correction light and the projection light pass.

20. The method of claim 19, wherein the correction optical system is configured to heat portions of the correction element.

21. An apparatus, comprising:

a projection objective comprising a lens; and

a correction optical system, comprising;

a light modulator system configured to produce a variable intensity distribution of correction light in a reference surface; and

a correction element in a plane that is at least substantially optically conjugate to the reference surface so that the correction light and a projection light pass through the lens of the projection objective before they impinge on the correction element,

wherein;

the correction optical system is configured to heat the entire correction element; and

the apparatus is a microlithographic projection exposure apparatus.

22. The apparatus of claim 21, wherein the light modulator system is configured to produce at least two different non-zero intensities at a plurality of points in the reference surface.

23. The apparatus of claim 21, wherein the correction optical system is configured to heat portions of the correction element.