Process for the manufacture of a doped III-N bulk crystal and a free-standing III-N substrate, and doped III-N bulk crystal and free-standing III-N substrate as such
First Claim
1. A process for producing a doped III-N bulk crystal, comprising:
- depositing a doped III-N bulk crystal, wherein III denotes at least one element of the main group III of the periodic system selected from Al, Ga and In, on a substrate or a template in a reactor, by a process that includes bringing species of at least one group III material and of at least one dopant into a vapor phase together and in admixture,feeding vaporized species of the at least one group III material and of the at least one dopant, or reaction products thereof, in mixed form into the reactor or towards a growth region of the reactor,feeding an N starting material into the reactor or towards a growth region of the reactor, andgrowing the doped III-N bulk crystals at a growth rate of about 200 to about 1000 μ
m/h,wherein the doped III-N bulk crystal is formed with a homogeneous incorporation of the dopant into the III-N crystal, such that the produced doped III-N bulk crystal satisfies at least one of the following conditions (a) to (c);
(a) in a micro-Raman mapping on a plane(i) parallel to a growth plane and/or(ii) in a growth direction,a standard deviation of the measured frequency positions of the LPP+-modein case of (i) is 5% or lower, andin case of (ii) is 10% or lower;
(b) in an MDP mapping on a plane(i) parallel to a growth plane and/or(ii) in a growth direction,a standard deviation of the photoconductivity signalsin case of (i) is 5% or lower, andin case of (ii) is 10% or lower;
(c) in a micro photoluminescence mapping on a plane(i) parallel to a growth plane and/or(ii) in a growth direction,a standard deviation of the line width of the D0X transitionin case of (i) is 5% or lower, andin case of (ii) is 10% or lower.
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Abstract
A process for producing a doped III-N bulk crystal, wherein III denotes at least one element of the main group III of the periodic system, selected from Al, Ga and In, wherein the doped crystalline III-N layer or the doped III-N bulk crystal is deposited on a substrate or template in a reactor, and wherein the feeding of at least one dopant into the reactor is carried out in admixture with at least one group III material. In this manner, III-N bulk crystals and III-N single crystal substrates separated therefrom can be obtained with a very homogeneous distribution of dopants in the growth direction as well as in the growth plane perpendicular thereto, a very homogeneous distribution of charge carriers and/or of the specific electric resistivity in the growth direction as well as in the growth plane perpendicular thereto, and a very good crystal quality.
36 Citations
25 Claims
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1. A process for producing a doped III-N bulk crystal, comprising:
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depositing a doped III-N bulk crystal, wherein III denotes at least one element of the main group III of the periodic system selected from Al, Ga and In, on a substrate or a template in a reactor, by a process that includes bringing species of at least one group III material and of at least one dopant into a vapor phase together and in admixture, feeding vaporized species of the at least one group III material and of the at least one dopant, or reaction products thereof, in mixed form into the reactor or towards a growth region of the reactor, feeding an N starting material into the reactor or towards a growth region of the reactor, and growing the doped III-N bulk crystals at a growth rate of about 200 to about 1000 μ
m/h,wherein the doped III-N bulk crystal is formed with a homogeneous incorporation of the dopant into the III-N crystal, such that the produced doped III-N bulk crystal satisfies at least one of the following conditions (a) to (c); (a) in a micro-Raman mapping on a plane (i) parallel to a growth plane and/or (ii) in a growth direction, a standard deviation of the measured frequency positions of the LPP+-mode in case of (i) is 5% or lower, and in case of (ii) is 10% or lower; (b) in an MDP mapping on a plane (i) parallel to a growth plane and/or (ii) in a growth direction, a standard deviation of the photoconductivity signals in case of (i) is 5% or lower, and in case of (ii) is 10% or lower; (c) in a micro photoluminescence mapping on a plane (i) parallel to a growth plane and/or (ii) in a growth direction, a standard deviation of the line width of the D0X transition in case of (i) is 5% or lower, and in case of (ii) is 10% or lower. - View Dependent Claims (2, 3, 4, 5, 6, 7, 24, 25)
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8. A process for producing a doped III-N bulk crystal, wherein III denotes at least one element of the main group III of the periodic system, selected from Al, Ga and In, in a reactor for hydride vapor phase epitaxy (HVPE), having a common source and/or a common feed-line for feeding a group III starting material and a dopant into the HVPE reactor, comprising:
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feeding a halide reaction gas into, or towards, at least one of the common source and the common feed-line to form a mixture of halides of the group III starting material and the dopant; feeding the mixture to a growth region of the HVPE reactor; feeding an N starting material into the HVPE reactor, and growing the doped III-N bulk crystal at a growth rate of about 200 to about 1000 μ
m/h,wherein the doped crystalline III-N layer or the doped III-N bulk crystal is formed with a homogeneous incorporation of the dopant into the III-N crystal, such that the produced doped III-N bulk crystal satisfies at least one of the following conditions (a) to (c); (a) in a micro-Raman mapping on a plane (i) parallel to a growth plane and/or (ii) in a growth direction, a standard deviation of the measured frequency positions of the LPP+-mode in case of (i) is 5% or lower, and in case of (ii) is 10% or lower; (b) in an MDP mapping on a plane (i) parallel to a growth plane and/or (ii) in a growth direction, a standard deviation of the photoconductivity signals in case of (i) is 5% or lower, and in case of (ii) is 10% or lower; (c) in a micro photoluminescence mapping on a plane (i) parallel to a growth plane and/or (ii) in a growth direction, a standard deviation of the line width of the D0X transition in case of (i) is 5% or lower, and in case of (ii) is 10% or lower.
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9. A process for producing a doped III-N bulk crystal, whereby III denotes at least one element of the main group III of the periodic system, selected from Al, Ga and In, comprising;
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contacting a solid solution, an alloy or a mixed melt, respectively, comprising the element of the main group III of the periodic system and the element of the dopant for the III-N material of the doped III-N bulk crystal, with a reaction gas to form mixed products of the group III element and the dopant, respectively, with a component of the reaction gas in vapor phase; contacting the thus formed mixed products with an N-starting material in vapor phase; growing the doped III-bulk crystal at a growth rate of about 200 to about 1000 μ
m/h, on a substrate or template a III-N bulk crystal with dopant being homogeneously incorporated, such that the produced doped III-N bulk crystal satisfies at least one of the following conditions (a) to (c);(a) in a micro-Raman mapping on a plane (i) parallel to a growth plane and/or (ii) in a growth direction, a standard deviation of the measured frequency positions of the LPP+-mode in case of (i) is 5% or lower, and in case of (ii) is 10% or lower; (b) in an MDP mapping on a plane (i) parallel to a growth plane and/or (ii) in a growth direction, a standard deviation of the photoconductivity signals in case of (i) is 5% or lower, and in case of (ii) is 10% or lower; (c) in a micro photoluminescence mapping on a plane (i) parallel to a growth plane and/or (ii) in a growth direction, a standard deviation of the line width of the D0X transition in case of (i) is 5% or lower, and in case of (ii) is 10% or lower. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification