Method and apparatus for processing metal bearing gases

• US 8,779,322 B2
• Filed: 12/23/2011
• Issued: 07/15/2014
• Est. Priority Date: 06/26/1997
• Status: Expired due to Fees

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Holber, William M., Smith, John A., Chen, Xing, Smith, Donald K.
• Primary Examiner(s): Paschall, Mark
• Application Number:
  US13/336,616
• Publication Number:
  US 20120160059A1
• Time in Patent Office: 935 Days
• Field of Search: 219/121.36, 219/121.52, 219/121.59, 219/121.4, 219/121.41, 219/121.43, 219/121.44, 118/723.R, 118/723.I, 156/345.48
• US Class Current: 219/121.41
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32174 Circuits specially adapted for controlling the RF discharge

Abstract

A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.

Claims

1. A method for processing metal bearing gases, the method comprising:

receiving a metal bearing gas in a plasma chamber at a pressure via an inlet to the plasma chamber;

forming a toroidal plasma inside the plasma chamber, by passing current, generated by a solid state switching power supply comprising one or more switching semiconductor devices, through a primary winding of a transformer having a magnetic core surrounding a portion of the plasma chamber, the toroidal plasma reacting with the metal bearing gas to produce at least one of a metallic material, a metal oxide material or a metal nitride material; and

collecting the at least one of a metallic material, a metal oxide material or a metal nitride material via a device disposed relative to the plasma chamber.

2. The method of claim 1, comprising providing at least a second gas to the plasma chamber.

3. The method of claim 2, comprising producing a metal oxide material or a metal nitride material by the interaction of the plasma, the metal bearing gas and the second gas.

4. The method of claim 1, further comprising collecting the at least one of a metallic material, a metal oxide material or a metal nitride material via the device.

5. The method of claim 1, wherein the collecting step comprises filtering the at least one of a metallic material, a metal oxide material or a metal nitride material via the device.

6. The method of claim 1, wherein the device is disposed external to the plasma chamber.

7. The method of claim 1, wherein the device is a replaceable portion of the plasma chamber.

8. The method of claim 1, wherein the device is selected from the group consisting of a filter, a particle trap, a cyclone trap or an electrostatic trap.

9. The method of claim 1, further comprising outputting the at least one of a metallic material, a metal oxide material or a metal nitride material via an outlet of the plasma chamber.

10. The method of claim 1, further comprising filtering the at least one of a metallic material, a metal oxide material or a metal nitride material via the device, wherein the device is selected from the group consisting of an external filter, particle trap, cyclone trap or electrostatic trap.