Electron beam detector, electron beam processing apparatus, and method of manufacturing electron beam detector
First Claim
Patent Images
1. An electron beam detector comprising:
- a shield plate having a plurality of openings including a support of the shield plate formed into flat plate shape and a shield film supported by the support of the shield plate;
a scatterer arranged in parallel with the shield plate, including a support of the scatterer formed into flat plate shape which includes a plurality of openings formed at portions corresponding to the plurality of openings of the shield plate, and a scatterer film formed on the support of the scatterer and configured to scatter electron beam passed through the shield plate; and
a beam detection element formed into flat plate shape and arranged in parallel with the shield plate, disposed at a predetermined distance from the scatterer and configured to convert the electron beam passed through the scatterer into an electric signal.
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Accused Products
Abstract
There is provided an electron beam detector including an electron beam scatterer which is disposed at a predetermined distance below a shield including a plurality of openings formed therein, and a beam detection element disposed at a predetermined distance below the scatterer and configured to convert an electron beam into an electric signal. In the electron beam detector, the scatterer is disposed at an equal distance from any of the openings in the shield, and the beam detection element is disposed at an equal distance from any of the openings in the shield. Thus, the electron beam detector can suppress a variation in detection sensitivity depending on the position of the opening.
22 Citations
13 Claims
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1. An electron beam detector comprising:
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a shield plate having a plurality of openings including a support of the shield plate formed into flat plate shape and a shield film supported by the support of the shield plate; a scatterer arranged in parallel with the shield plate, including a support of the scatterer formed into flat plate shape which includes a plurality of openings formed at portions corresponding to the plurality of openings of the shield plate, and a scatterer film formed on the support of the scatterer and configured to scatter electron beam passed through the shield plate; and a beam detection element formed into flat plate shape and arranged in parallel with the shield plate, disposed at a predetermined distance from the scatterer and configured to convert the electron beam passed through the scatterer into an electric signal. - View Dependent Claims (2, 3, 5, 8, 12)
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4. The electron beam detector comprising:
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a shield plate having a plurality of openings including; a first support formed into flat plate shape; a second support formed on the first support; and a shield film formed on the second support, which is supported by the first support and the second support having a plurality of openings, a scatterer, arranged in parallel with the shield plate, including; a support of the scatterer formed into flat plate shape which includes a plurality of openings formed at portions corresponding to the plurality of openings of the shield plate; and a scatterer film formed on the support of the scatterer and configured to scatter electron beam passed through the shield plate; and a beam detection element formed into flat plate shape and arranged in parallel with the shield plate, disposed at a predetermined distance from the scatterer and configured to convert the electron beam passed through the scatterer into an electric signal, wherein the support of the scatterer and the first support of the shield plate are integrally bonded to each other.
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6. The electron beam detector comprising:
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a shield plate having a plurality of openings including a support of the shield plate formed into flat plate shape, and a shield film supported by the support of the shield plate; a scatterer, arranged in parallel with the shield plate, including a scatterer film formed on the support of shield plate and configured to scatter electron beam passed through the shield plate; and a beam detection element formed into flat plate shape and arranged in parallel with the shield plate, disposed at a predetermined distance from the scatterer and configured to convert the electron beam passed through the scatterer into an electric signal, wherein the shield film is formed on the scatterer film. - View Dependent Claims (7)
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9. The electron beam detector comprising:
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a shield plate including a plurality of openings formed therein; a scatterer disposed at a predetermined distance from the shield plate and configured to scatter an electron beam passed through any of the openings of the shield plate; and a beam detection element disposed at a predetermined distance from the scatterer and configured to convert the electron beam passed through the scatterer into an electric signal; wherein a scatterer film constituting the scatterer is formed on the beam detection element, and wherein a shield film constituting the shield plate and including an opening formed in its predetermined portion is formed on the scatterer film.
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10. An electron beam processing apparatus comprising:
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an electron beam irradiator configured to perform irradiation with an electron beam; a sample stage to mount a sample to be irradiated with the electron beam; and an electron beam detector placed on the sample stage and configured to detect a characteristic of the electron beam, wherein the electron beam detector includes; a shield plate having a plurality of openings including a support of the shield plate formed into flat plate shape, and a shield film supported by the support of the shield plate; a scatterer, arranged in parallel with the shield plate, including a support of the scatterer formed into flat plate shape which includes a plurality of openings formed at portions corresponding to the plurality of openings of the shield plate, and a scatterer film formed on the support of the scatterer and configured to scatter electron beam passed through the shield plate; and a beam detection element formed into flat plate shape and arranged in parallel with the shield plate, disposed at a predetermined distance from the scatterer and configured to convert the electron beam passed through the scatterer into an electric signal.
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11. A method of manufacturing an electron beam detector comprising the steps of:
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preparing a support; forming an etching stopper film on the support, the etching stopper film being made of a material different from a material of the support; forming a scatterer film on the etching stopper film, the scatterer film being made of a material different from the material of the etching stopper film; forming an opening in a predetermined portion of the support by etching; and removing selectively the etching stopper film exposed through the opening of the support, wherein the electron beam detector includes; a shield plate having a plurality of openings including a support of the shield plate formed into flat plate shape, and a shield film supported by the support of the shield plate; a scatterer, arranged in parallel with the shield plate, including a support of the scatterer formed into flat plate shape which includes a plurality of openings formed at portions corresponding to the plurality of openings of the shield plate, and a scatterer film formed on the support of the scatterer and configured to scatter electron beam passed through the shield plate; and a beam detection element formed into flat plate shape and arranged in parallel with the shield plate, disposed at a predetermined distance from the scatterer and configured to convert the electron beam passed through the scatterer into an electric signal.
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13. An electron beam detector according:
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a shield plate having a plurality of openings and including a first support formed into flat plate shape and a shield film which is supported by the first support having a plurality of openings; a scatterer film arranged in parallel with the shield plate, integrally bonded to bottom surface of the first support and configured to scatter the electron beam passed through the shield plate; and a beam detection element formed into flat plate shape arranged in parallel with the shield plate disposed at a predetermined distance from the scatterer and configured to convert the electron beam passed through the scatterer into an electric signal.
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Specification