System and methods for parametric testing

• US 8,781,773 B2
• Filed: 06/21/2011
• Issued: 07/15/2014
• Est. Priority Date: 12/22/2008
• Status: Active Grant

• Current Assignee: Optimal Plus Ltd. (Emerson Electric Company)
• Original Assignee: Optimal Plus Ltd. (Emerson Electric Company)
• Inventors: Gurov, Leonid, Chufarovsky, Alexander, Balog, Gil, Linde, Reed
• Primary Examiner(s): Teixeira Moffat, Jonathan C
• Assistant Examiner(s): Casey, Liam R
• Application Number:
  US13/164,910
• Publication Number:
  US 20110251812A1
• Time in Patent Office: 1,120 Days
• Field of Search: 702/81, 702/82, 702/83, 702/118
• US Class Current: 702/82
• CPC Class Codes: G01R 31/2894 Aspects of quality control [QC] G01R31/31718 takes precedence; program control for QC G05B19/41875
• CPC Class Codes: H01L 22/14 for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

Methods, systems, computer-program products and program-storage devices for determining whether or not to perform an action based at least partly on an estimated maximum test-range. One method comprises: attaining results generated from a parametric test on semiconductor devices included in a control set; selecting from the semiconductor devices at least one extreme subset including at least one of a high-scoring subset and a low-scoring subset; plotting at least results of the at least one extreme subset; fitting a plurality of curves to a plurality of subsets of the results; extending the curves to the zero-probability axis for the low-scoring subset or the one-probability axis for the high-scoring subset to define a corresponding plurality of intersection points; defining an estimated maximum test range based on at least one of the intersection points; and determining whether or not to perform an action based at least partly on the estimated maximum test range.

Claims

1. A method of determining whether or not to perform an action based at least partly on an estimated maximum test range, the method comprising:

attaining results generated from a parametric test performed on semiconductor devices included in a control set comprising a subset of a population of semiconductor devices;

selecting from among said semiconductor devices at least one extreme subset including at least one of a high-scoring subset including all devices whose results exceed a high cut-off point and a low-scoring subset including all devices whose results fall below a low cut-off point;

plotting at least results of said at least one extreme subset as a normal probability plot located between a zero probability axis and a one probability axis;

fitting a plurality of curves to a plurality of subsets of said results of said at least one extreme subset respectively;

extending each of said plurality of curves to said zero probability axis for said low-scoring subset or to said one probability axis for said high scoring subset thereby to define a corresponding plurality of intersection points along said zero or one probability axis;

defining an estimated maximum test range based on at least one of said intersection points; and

determining whether or not to perform an action based at least partly on said estimated maximum test range, wherein at least one of said selecting, plotting, fitting, extending, defining or determining is performed by at least one processor.

2. The method of claim 1, wherein said action includes at least partly disabling said test.

3. The method of claim 1, wherein said action includes at least partly enabling said test.

4. The method of claim 3, wherein said enabling causes at least one semiconductor device, not in said control set, which had previously undergone a test program flow without said test to be tested with said test.

5. The method of claim 3, wherein said enabling causes at least one untested semiconductor device to undergo a test program flow with said test.

6. The method of claim 1, wherein said estimated maximum test range is computed on-the-fly each time testing data on an additional control semiconductor device becomes available.

7. The method of claim 1, wherein said estimated maximum test range is computed after at least all control units in a portion of said population have been tested.

8. The method of claim 7, wherein said estimated maximum test range is again computed after at least all control units in a second portion of said population have been tested, said second portion of a different size than said portion.

9. The method of claim 1, wherein said action includes:

changing the manufacturing flow for at least one device in said population.

10. The method of claim 9, wherein said changing said manufacturing flow includes:

rejecting said at least one device.

11. The method of claim 9, wherein said changing said manufacturing flow includes:

subjecting said at least one device to additional testing.

12. The method of claim 1, wherein said determining includes:

comparing said estimated maximum test range with a known pass value range defined by a specification for said test.

13. The method of claim 12, wherein said test is at least partly disabled if said estimated maximum test range falls at least partly inside said known pass value range.

14. The method of claim 12, wherein said test is at least partly disabled if said estimated maximum test range falls entirely inside said known pass value range.

15. The method of claim 12, wherein said determining includes:

making an on-the-fly determination as to whether said estimated maximum test range falls at least partly outside said known pass value range and using said on-the-fly determination as a condition for at least partly re-enabling said test, said on-the-fly determination comprising re-computing said estimated maximum test range on an on-the-fly generated control set comprising at least one tested semiconductor test absent from a previous control subset.

16. The method of claim 12, wherein said determining includes:

making an on-the-fly determination as to whether said estimated maximum test range falls entirely outside said known pass value range and using said on-the-fly determination as a condition for at least partly re-enabling said test, said on-the-fly determination comprising re-computing said estimated maximum test range on an on-the-fly generated control set comprising at least one tested semiconductor test absent from a previous control subset.

17. The method of claim 12, wherein said known pass value range has only a single endpoint and said at least one extreme subset comprises only one extreme subset.

18. The method of claim 12, wherein said known pass value range has two endpoints and said at least one extreme subset comprises two extreme subsets.

19. The method of claim 1, wherein said action includes changing a pass/fail limit, said estimated maximum test range functioning as a pass/fail test limit.

20. The method of claim 19, wherein said estimated maximum test range is re-computed if a failure rate is statistically different than expected.

21. The method of claim 19, wherein said estimated maximum test range is recomputed after an additional device, designated as belonging in said control set, has been tested.

22. The method of claim 1, wherein said action includes:

changing a sample rate, thereby changing a percentage of semiconductor devices in said population which are tested with a disabled test.

23. The method of claim 22, wherein said sample rate varies based on at least one selected from a group comprising:

relationship of said estimated maximum test range to a specification limit of said test, and incidence of test failure.

24. The method of claim 1, wherein said control set includes validation units.

25. The method of claim 1, wherein said control set includes sampled units.

26. The method of claim 1, wherein said control set includes semiconductor devices which have passed device specification limits.

27. The method of claim 1, wherein said control set includes semiconductor devices which have passed previously designated estimated maximum test range pass/fail limits.

28. The method of claim 1, wherein said control set includes semiconductor devices belonging to groups whose results are consistent with one another.

29. The method of claim 1, wherein said control set excludes semiconductor devices whose results are outliers compared to results from other tested units.

30. The method of claim 1, wherein said determining is also based at least partly on incidence of test failure.

31. The method of claim 1, wherein said determining includes determining whether or not to change a manufacturing flow based on failure incidence where said estimated maximum test range functions as a pass/fail limit.

32. The method of claim 1, wherein said estimated maximum test range is defined to at least include all of said intersection points.

33. The method of claim 32, wherein said estimated maximum test range is extended outward by a safety factor.

34. The method of claim 1, wherein said estimated maximum test range is defined to equal a lowest or highest intersection point.

35. The method of claim 1, wherein said estimated test range is defined to equal said lowest or highest intersection point extended outward by a safety factor.

36. The method of claim 1, wherein said plurality of subsets of said results comprises result pairs.

37. The method of claim 1, wherein said plurality of subsets of said results comprises all result pairs which are adjacent within a set of numerically ordered results.

38. The method of claim 1, wherein said plurality of subsets of said results comprises only result pairs which are adjacent.

39. The method of claim 1, wherein said population of semiconductor devices is contained in wafers and said test is part of a wafer sort test program flow.

40. The method of claim 1, wherein said population of semiconductor devices comprises a population of singulated units that have or have not been packaged.

41. The method of claim 1, wherein said determining includes comparing said estimated maximum test range to other data and a result of said comparison is used as a necessary condition for determining whether or not to perform said action.

42. The method of claim 1, wherein said determining includes comparing said estimated maximum test range to other data and a result of said comparison is used as a sufficient condition for determining whether or not to perform said action.

43. The method of claim 1, wherein said test is conducted at a plurality of sites in parallel and wherein said estimated maximum test range is computed separately for each site or group of sites from among said plurality of sites whose results statistically differ from results of other sites in said plurality of sites.

44. The method of claim 1, wherein

said selecting includes:

normalizing test results of said control set or of said at least one extreme subset;

said plotting includes;

plotting normalized results;

and said defining includes;

applying an inverse normalization function so that said estimated maximum test range includes un-normalized values.

45. The method of claim 1, further comprising:

performing a parametric test on semiconductor devices included in said control set, thereby to generate said results.

46. The method of claim 1, further comprising:

performing said action if determined accordingly.

47. The method of claim 1, wherein said plotting includes:

plotting results of all devices in said control set.

48. The method of claim 47 wherein said selecting is performed after said plotting.

56. The method of claim 10, wherein at least one of said rejected at least one device is used in a different product line than if not had been rejected.

57. The method of claim 10, wherein at least one of said rejected at least one device is discarded.

49. A system for determining whether or not to perform an action based at least partly on an estimated maximum test range, the system comprising:

an attainer for attaining results generated from a parametric test performed on semiconductor devices included in a control set comprising a subset of the population of semiconductor devices;

a selector for selecting from among said semiconductor devices at least one extreme subset including at least one of a high-scoring subset including all devices whose results exceed a high cut-off point and a low-scoring subset including all devices whose results fall below a low cut-off point;

a plotter for plotting at least results of said at least one extreme subset as a normal probability plot located between a zero probability axis and a one probability axis;

a fitter for fitting a plurality of curves to a plurality of subsets of said results of said at least one extreme subset respectively;

an extender for extending each of said plurality of curves to said zero probability axis for said low-scoring subset or to said one probability axis for said high-scoring subset thereby to define a corresponding plurality of intersection points along said zero or one probability axis;

a definer for defining said estimated maximum test range based on at least one of said intersection points; and

a determiner for determining whether or not to perform an action based at least partly on said estimated maximum test range, wherein the system comprises at least one processor.

50. The system of claim 49, further comprising:

a tester for performing a parametric test on semiconductor devices included in said control set, thereby to generate said results.

51. The system of claim 50, wherein said tester is also configured to perform said action independently or in conjunction with at least one other element, if determined accordingly.

52. The system of claim 49, wherein said system is part of a test station host computer.

53. The system of claim 49, wherein said system is part of a tester, said tester also configured to perform a parametric test on semiconductor devices included in said control set, thereby to generate said results.

58. The system of claim 49, further comprising handling equipment, wherein said handling equipment is configured to perform said action independently or in conjunction with at least one other element, if determined accordingly.

59. The system of claim 49, wherein said system is configured to perform said action independently or in conjunction with at least one other element, if determined accordingly.

54. A non-transitory program storage device readable by machine, tangibly embodying a program of instructions executable by the machine to perform a method of determining whether or not to perform an action based at least partly on an estimated maximum test range, the method comprising:

attaining results generated from a parametric test performed on semiconductor devices included in a control set comprising a subset of a population of semiconductor devices;

selecting from among said semiconductor devices at least one extreme subset including at least one of a high-scoring subset including all devices whose results exceed a high cut-off point and a low-scoring subset including all devices whose results fall below a low cut-off point;

plotting at least results of said at least one extreme subset as a normal probability plot located between a zero probability axis and a one probability axis;

fitting a plurality of curves to a plurality of subsets of said results of said at least one extreme subset respectively;

extending each of said plurality of curves to said zero probability axis for said low-scoring subset or to said one probability axis for said high-scoring subset thereby to define a corresponding plurality of intersection points along said zero or one probability axis;

defining an estimated maximum test range based on at least one of said intersection points; and

determining whether or not to perform an action based at least partly on said estimated maximum test range.

55. A non-transitory computer program product comprising a computer useable medium having computer readable program code embodied therein for determining whether or not to perform an action based at least partly on an estimated maximum test range, the computer program product comprising:

computer readable program code for causing the computer to attain results generated from a parametric test performed on semiconductor devices included in a control set comprising a subset of a population of semiconductor devices;

computer readable program code for causing the computer to select from among said semiconductor devices at least one extreme subset including at least one of a high-scoring subset including all devices whose results exceed a high cut-off point and a low-scoring subset including all devices whose results fall below a low cut-off point;

computer readable program code for causing the computer to plot results of said at least one extreme subset as a normal probability plot located between a zero probability axis and a one probability axis;

computer readable program code for causing the computer to fit a plurality of curves to a plurality of subsets of said results of said at least one extreme subset respectively;

computer readable program code for causing the computer to extend each of said plurality of curves to said zero probability axis for said low-scoring subset or to said one probability axis for said high-scoring subset thereby to define a corresponding plurality of intersection points along said zero or one probability axis;

computer readable program code for causing the computer to define an estimated maximum test range based on at least one of said intersection points; and

computer readable program code for causing the computer to determine whether or not to perform an action based at least partly on said estimated maximum test range.