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Method of manufacturing MEMS based quartz hybrid filters

  • US 8,782,876 B1
  • Filed: 06/17/2011
  • Issued: 07/22/2014
  • Est. Priority Date: 11/10/2008
  • Status: Active Grant
First Claim
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1. A process for fabricating an integrated Micro-Electro-Mechanical Systems (MEMS) filter comprising:

  • bonding an insulating substrate having a first side and a second side opposite the first side and a first end and a second end to a base substrate, the second end of the insulating substrate cantilevered over and separated from the base substrate by a gap;

    forming a resonator element on the second end of the insulating substrate;

    forming an inductive element on the first side of the insulating substrate; and

    forming a capacitive element on the first side of the insulating substrate, the capacitive element comprised of two conductive plates, wherein one of the two conductive plates is formed on the insulating substrate.

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