Micromechanical system for detecting an acceleration
First Claim
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1. A micromechanical system for detecting an acceleration, comprising:
- a substrate;
a rocker-like mass structure having a first lever arm and a diametrically opposed second lever arm, which are situated tiltably at a distance in relation to the substrate and about an axis of rotation to the substrate; and
first and second electrodes situated on the substrate, each electrode being diametrically opposed to a lever arm, wherein the two electrodes are arranged in mirror symmetry with respect to the axis of rotation,wherein each lever arm includes a section extending from the axis of rotation, the two sections having varying masses that lie above an intermediate space between the electrodes and each section includes an end section having equal masses, such that the first electrode is located under the end section of the first lever arm and the second electrode is located under the end section of the second lever arm, each at a distance farther from the axis of rotation than the two sections having varying masses.
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Abstract
A micromechanical system for detecting an acceleration includes a substrate, a rocker-like mass structure having a first lever arm and a diametrically opposed second lever arm, the lever arms being situated tiltably at a distance to the substrate and about an axis of rotation to the substrate, and first and second electrodes being provided on the substrate. Each electrode is diametrically opposed to a lever arm and each lever arm includes a section extending from the axis of rotation which is located between the electrodes above an intermediate space. The two sections have different masses.
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Citations
9 Claims
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1. A micromechanical system for detecting an acceleration, comprising:
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a substrate; a rocker-like mass structure having a first lever arm and a diametrically opposed second lever arm, which are situated tiltably at a distance in relation to the substrate and about an axis of rotation to the substrate; and first and second electrodes situated on the substrate, each electrode being diametrically opposed to a lever arm, wherein the two electrodes are arranged in mirror symmetry with respect to the axis of rotation, wherein each lever arm includes a section extending from the axis of rotation, the two sections having varying masses that lie above an intermediate space between the electrodes and each section includes an end section having equal masses, such that the first electrode is located under the end section of the first lever arm and the second electrode is located under the end section of the second lever arm, each at a distance farther from the axis of rotation than the two sections having varying masses. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification