Glass substrate for a magnetic disk and magnetic disk

• US 8,785,010 B2
• Filed: 09/29/2009
• Issued: 07/22/2014
• Est. Priority Date: 09/30/2008
• Status: Active Grant

• Current Assignee: Hoya Corporation
• Original Assignee: Hoya Corporation
• Inventors: Eda, Shinji, Isono, Hideki, Maeda, Takashi, Tsuchiya, Hiroshi, Marumo, Yoshinori
• Primary Examiner(s): Bernatz, Kevin M.
• Assistant Examiner(s): FALASCO, LOUIS V
• Application Number:
  US13/120,320
• Publication Number:
  US 20110171415A1
• Time in Patent Office: 1,757 Days
• Field of Search: 428/64.2, 428/800, 428/846.9, 428/832, 428/826, 428/141, 428/848.8, 428/848.2, 250/372, 250/559.4, 250/492.1, 360/135, 65/301.3, 65/301.4, 65/291, 65/292.1, 65/331, 65/334, 65/339, 65/61, 65/66, 651/04, 65/171, 65/64, 65/291.2, 656/42, 83/56, 427/128, 427/129, 134/1, 451/5, 451/56, 451/47, 451/51, 451/41, 451/44, 451/128, 451/259, 216/22
• US Class Current: 428/846.9
• CPC Class Codes: C03C 19/00 Surface treatment of glass, not in the form of fibres or filaments, by mechanical means sand-blasting, grinding, or polishing glass B24
• CPC Class Codes: C03C 21/008 in solid phase, e.g. using pastes, powders
• CPC Class Codes: C03C 2204/08 Glass having a rough surface
• CPC Class Codes: C03C 23/0075 Cleaning of glass specially adapted to plate glass B08B11/00
• CPC Class Codes: C03C 23/009 Poling glass
• CPC Class Codes: C09G 1/02 containing abrasives or grinding agents abrasives as such C09K3/14; polishing of semi-conductors H01L
• CPC Class Codes: G11B 5/73921 Glass or ceramic substrates
• CPC Class Codes: G11B 5/8404 manufacturing base layers
• CPC Class Codes: G11B 5/8408 protecting the magnetic layer

Abstract

Provided are a magnetic disk substrate and a method of manufacturing the same, wherein the magnetic disk substrate has very few defects present on its surface with an arithmetic mean roughness (Ra) at a level in the vicinity of 0.1 nm and thus is suitable as a substrate for a magnetic disk with high recording density. The magnetic disk glass substrate is such that the arithmetic mean roughness (Ra) of the main surface of the glass substrate measured using an atomic force microscope with a resolution of 256×256 pixels in a 2 μm×2 μm square is 0.12 nm or less and the number of defects detected to have a size of 0.1 μm to 0.6 μm in plan view and a depth of 0.5 nm to 2 nm is less than 10 per 24 cm², wherein the defects are each detected using a shift in wavelength between incident light and reflected light upon irradiating and scanning helium neon laser light with a wavelength of 632 nm on the main surface of the glass substrate.

Claims

1. A magnetic disk glass substrate, wherein an arithmetic mean roughness (Ra) of a polished main surface of the glass substrate measured using an atomic force microscope with a resolution of 256×

256 pixels in a 2 μ

m×

2 μ

m square is 0.12 nm or less and, among defects detected to have a size of 0.1 μ

m or more and 0.3 μ

m or less upon irradiating light with a wavelength of 405 nm onto the glass substrate with a spot size of 5 μ

m and detecting scattered light from the glass substrate, the number of the defects fixed to the glass substrate, whose position on the glass substrate is not changed before and after the glass substrate is immersed for 200 seconds in the dilute sulfuric acid solution adjusted to pH4, is 1 or less per 24 cm²,

wherein the glass substrate is an amorphous aluminosilicate glass, and

wherein a ratio (Ra/Rp) of the arithmetic mean roughness (Ra) to a maximum peak height (Rp) on the main surface of the glass substrate is 0.15 or more.

3. The magnetic disk glass substrate according to claim 1 or 2, wherein the glass substrate has a disk shape with a hole at a center thereof and, assuming that a distance from the center to an outermost periphery is 100%, a difference (Ra_O−

Ra_I) between an arithmetic mean roughness (Ra_O) of the main surface in a range of 80% or more and 90% or less from the center and an arithmetic mean roughness (Ra_I) of the main surface in a range of 10% or more and 20% or less from the center is 0.01 nm or less.

4. The magnetic disk glass substrate according to claim 1, wherein the glass substrate has the main surface and an end face,

the main surface and the end face each have a compressive stress layer, and

the compressive stress layer of the main surface has a depth which is shallower than that of the compressive stress layer of the end face.

5. A magnetic disk, wherein at least a magnetic layer is formed on the magnetic disk glass substrate according to claim 1.

6. The magnetic disk according to claim 5, wherein the magnetic disk is a patterned medium in which at least adjacent recording tracks are magnetically isolated from each other.

7. The magnetic disk glass substrate according to claim 1, wherein the magnetic disk glass substrate is an isotropic substrate in which the surface roughness (arithmetic mean roughness (Ra)) of the glass substrate in its circumferential direction and the surface roughness thereof in its radial direction are equal to each other.

2. A magnetic disk glass substrate, wherein an arithmetic mean roughness (Ra) of a polished main surface of the glass substrate measured using an atomic force microscope with a resolution of 256×

256 pixels in a 2 μ

m×

2 μ

m square is 0.12 nm or less and the number of concave defects detected to have a size of 0.1 μ

m or more and 0.6 μ

m or less in plan view and a depth of 0.5 nm or more and 2 nm or less is less than 10 per 24 cm², the defects each being detected using a shift in wavelength between incident light and reflected light upon irradiating and scanning helium neon laser light with a wavelength of 632 nm on the main surface of the glass substrate,

wherein the glass substrate is an amorphous aluminosilicate glass, and

wherein a ratio (Ra/Rv) of the arithmetic mean roughness (Ra) to a maximum valley depth (Rv) on the main surface of the glass substrate is 0.15 or more.

8. The magnetic disk glass substrate according to claim 2, wherein the magnetic disk glass substrate is an isotropic substrate in which the surface roughness (arithmetic mean roughness (Ra)) of the glass substrate in its circumferential direction and the surface roughness thereof in its radial direction are equal to each other.