High-sensitivity transparent gas sensor and method for manufacturing the same

• US 8,785,924 B2
• Filed: 07/06/2012
• Issued: 07/22/2014
• Est. Priority Date: 12/12/2011
• Status: Expired due to Fees

• Current Assignee: Korea Advanced Institute of Science and Technology
• Original Assignee: Korea Advanced Institute of Science and Technology
• Inventors: Jang, Ho Won, Yoon, Seok Jin, Kim, Jin Sang, Kang, Chong Yun, Choi, Ji Won, Moon, Hi Gyu
• Primary Examiner(s): SHINGLETON, MICHAEL B
• Application Number:
  US13/542,874
• Publication Number:
  US 20130146865A1
• Time in Patent Office: 746 Days
• Field of Search: 257/43, 257/253, 257/435, 257/E29.068, 257/E21.002, 977/953
• US Class Current: 257/43
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G01N 27/12 of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid , for detecting components in the fluid

Abstract

Disclosed are a high-sensitivity transparent gas sensor and a method for manufacturing the same. The transparent gas sensor includes a transparent substrate, a transparent electrode formed on the transparent substrate and a transparent gas-sensing layer formed on the transparent electrode. The transparent gas-sensing layer has a nanocolumnar structure having nanocolumns formed on the transparent electrode and gas diffusion pores formed between the nanocolumns.

Claims

1. A transparent gas sensor comprising:

a transparent substrate;

a transparent electrode formed on the transparent substrate; and

a transparent gas-sensing layer formed on the transparent electrode, wherein the transparent gas-sensing layer has a nanocolumnar structure comprising nanocolumns formed on the transparent electrode and gas diffusion pores formed between the nanocolumns,

wherein the nanocolumns are formed to be inclined with an angle of 60-89°

by glancing angle deposition, and the gas diffusion pores are formed in a self-shadowed region where the deposition does not occur.

2. The transparent gas sensor according to claim 1, wherein the nanocolumns are arranged on an x-y plane on the transparent electrode such that the gas diffusion pores are formed between the nanocolumns arranged in one of the x and y directions and the nanocolumns arranged in the other direction are connected with each other.

3. The transparent gas sensor according to claim 1, wherein the transparent gas-sensing layer comprises a metal oxide having a band gap of at least 2.7 eV.

4. The transparent gas sensor according to claim 1, wherein the transparent gas-sensing layer comprises at least one metal oxide selected from tungsten oxide (WO₃), tin oxide (SnO₂), niobium oxide (Nb₂O₅), zinc oxide (ZnO), indium oxide (In₂O₃), iron oxide (Fe₂O₃), titanium oxide (TiO₂), cobalt oxide (Co₂O₃) and gallium oxide (Ga₂O₃).

5. The transparent gas sensor according to claim 1, wherein the transparent substrate is a glass, sapphire, quartz or MgO substrate.

6. The transparent gas sensor according to claim 1, wherein the transparent electrode is metal oxide film or carbon film.

7. The transparent gas sensor according to claim 6, wherein the transparent electrode is a metal oxide film, wherein the metal oxide film is an oxide film comprising at least one metal selected from indium (In), tin (Sn), zinc (Zn), aluminum (Al), niobium (Nb), titanium (Ti) and gallium (Ga).

8. The transparent gas sensor according to claim 6, wherein the transparent electrode is a metal oxide film, wherein the metal oxide film is an oxide film selected from indium tin oxide (ITO), fluorine tin oxide (FTO), aluminum zinc oxide (AZO), gallium zinc oxide (GZO), indium zinc oxide (IZO) and niobium titanium oxide (NTO).

9. The transparent gas sensor according to claim 6, wherein the transparent electrode is a carbon film, wherein the carbon film comprises graphene.