High-sensitivity transparent gas sensor and method for manufacturing the same
First Claim
Patent Images
1. A transparent gas sensor comprising:
- a transparent substrate;
a transparent electrode formed on the transparent substrate; and
a transparent gas-sensing layer formed on the transparent electrode, wherein the transparent gas-sensing layer has a nanocolumnar structure comprising nanocolumns formed on the transparent electrode and gas diffusion pores formed between the nanocolumns,wherein the nanocolumns are formed to be inclined with an angle of 60-89°
by glancing angle deposition, and the gas diffusion pores are formed in a self-shadowed region where the deposition does not occur.
1 Assignment
0 Petitions
Accused Products
Abstract
Disclosed are a high-sensitivity transparent gas sensor and a method for manufacturing the same. The transparent gas sensor includes a transparent substrate, a transparent electrode formed on the transparent substrate and a transparent gas-sensing layer formed on the transparent electrode. The transparent gas-sensing layer has a nanocolumnar structure having nanocolumns formed on the transparent electrode and gas diffusion pores formed between the nanocolumns.
-
Citations
9 Claims
-
1. A transparent gas sensor comprising:
-
a transparent substrate; a transparent electrode formed on the transparent substrate; and a transparent gas-sensing layer formed on the transparent electrode, wherein the transparent gas-sensing layer has a nanocolumnar structure comprising nanocolumns formed on the transparent electrode and gas diffusion pores formed between the nanocolumns, wherein the nanocolumns are formed to be inclined with an angle of 60-89°
by glancing angle deposition, and the gas diffusion pores are formed in a self-shadowed region where the deposition does not occur. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
Specification