Apparatus and method for near field scan calibration
First Claim
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1. An apparatus for near field scan calibration, comprising:
- a plane-type test fixture having a plane shape;
an antenna spaced apart from the plane-type test fixture by a set spacing distance and acquiring data including a magnetic field; and
a spectrum analyzer analyzing the data acquired by the antenna,wherein the plane-type test fixture has a circular shape.
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Abstract
Disclosed are a method and an apparatus of near field scan calibration, and more particularly, a method and an apparatus for near field scan calibration for calibrating a characteristic of an antenna for near field scan measurement of a semiconductor chip. The apparatus for near field scan calibration includes: a plane-type text fixture having a plane shape; an antenna positioned spaced apart from the plane-type test fixture by a set spacing distance and acquiring data including a magnetic field; and a spectrum analyzer analyzing the data acquired by the antenna.
4 Citations
12 Claims
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1. An apparatus for near field scan calibration, comprising:
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a plane-type test fixture having a plane shape; an antenna spaced apart from the plane-type test fixture by a set spacing distance and acquiring data including a magnetic field; and a spectrum analyzer analyzing the data acquired by the antenna, wherein the plane-type test fixture has a circular shape. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method for near field scan calibration, comprising:
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feeding power to a center of a plane-type test fixture; acquiring data including a magnetic field from an antenna for near field scan measurement spaced apart from the plane-type test fixture by a set spacing distance; and extracting a characteristic of the antenna by using the data, wherein the plane-type test fixture has a circular shape. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification