Methods and apparatus for hybrid outlier detection
First Claim
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1. A test data analysis system for analyzing test data for multiple components fabricated on a wafer, comprising:
- a memory configured to store the test data; and
a computer having access to the memory capable of retrieving the test data from the memory, and comprising a hybrid outlier system capable of, for each of a plurality of test data for each of a plurality of components;
selecting a central component from the plurality of components;
selecting a plurality of local components in a local area near the central component;
determining a derived value of the test data for the plurality of local components;
comparing the test data for the central component to the derived value for the plurality of local components; and
identifying whether the test data for the central component represents a hybrid outlier according to the comparison of the test data for the central component to the derived value for the plurality of local components.
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Abstract
Methods and apparatus for data analysis according to various aspects of the present invention are configured to identify statistical outliers in test data for components, including hybrid outliers representing outliers within subsets of larger data populations. A method and apparatus according to various aspects of the present invention may operate in conjunction with a test system having a tester, such as automatic test equipment (ATE) for testing semiconductors.
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Citations
21 Claims
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1. A test data analysis system for analyzing test data for multiple components fabricated on a wafer, comprising:
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a memory configured to store the test data; and a computer having access to the memory capable of retrieving the test data from the memory, and comprising a hybrid outlier system capable of, for each of a plurality of test data for each of a plurality of components; selecting a central component from the plurality of components; selecting a plurality of local components in a local area near the central component; determining a derived value of the test data for the plurality of local components; comparing the test data for the central component to the derived value for the plurality of local components; and identifying whether the test data for the central component represents a hybrid outlier according to the comparison of the test data for the central component to the derived value for the plurality of local components. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A computer-implemented method for analyzing test data, stored in a memory accessible by a computer, for multiple components fabricated on a wafer, comprising:
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selecting, by the computer, a central component from the multiple components; selecting, by the computer, a plurality of local components in a local area near the central component; retrieving, by the computer, the test data for the selected components from the memory; determining, by the computer, a derived value of the test data for the plurality of local components; comparing, by the computer, the test data for the central component to the derived value for the plurality of local components; and identifying, by the computer, whether the test data for the central component represents a hybrid outlier according to the comparison of the test data for the central component to the derived value for the plurality of local components. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A non-transitory computer-readable medium containing computer instructions stored therein for causing a computer processor to perform analysis on test data, stored in a memory accessible by the computer, for components on a wafer, wherein the instructions cause the computer to:
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select, a central component; select a plurality of local components in a local area near the central component; retrieve the test data for the selected components from the memory; determine a derived value of the test data for the plurality of local components; compare the test data for the central component to the derived value for the plurality of local components; and identify whether the test data for the central component represents a hybrid outlier according to the comparison of the test data for the central component to the derived value for the plurality of local components. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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Specification