MEMS gyroscope for detecting rotational motions about an X-, Y-, and/or Z-axis
First Claim
1. MEMS gyroscope for detecting rotary movements about an x, y and/or z axis comprising,a substrate;
- at least two driving masses, wherein the driving masses are movable radially relative to a central point; and
drive elements for oscillating vibration of the driving masses in order to generate Coriolis forces on the driving masses in event of rotation of the substrate about the x, y and/or z axis,wherein the oscillating driving masses are connected to at least one additional sensor mass, which is non-oscillating but which can be rotated on the substrate about the x, y and/or z axis together with the oscillating driving masses and with sensor elements, in order to detect displacements of sensor mass and/or the driving masses in relation to the substrate as a result of generated Coriolis forces, and with at least two anchoring devices for rotary attachment of the sensor mass to the substrate by means of springs andthe driving masses are driven in as oscillatory manner in drive direction without exerting a relevant influence on the sensor mass.
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Accused Products
Abstract
The invention relates to a MEMS gyroscope for detecting rotational motions about an x-, y-, and/or Z-axis, in particular a 3-D sensor, containing a substrate, several, at least two, preferably four, drive masses (2) that are movable radially With respect to a center and drive elements (7) for the oscillating vibration of the drive masses (2) in order to generate Coriolis forces on the drive masses (2) in the event of rotation of the substrate about the x-, y-, and/or Z-axis. The oscillating drive masses (2) are connected to at least one further non oscillating sensor mass (3) that however can be rotated about the x-, y-, and/or Z-axis together With the oscillating drive masses (2) on the substrate. Sensor elements (9, 10) are used to detect detections of the sensor mass (3) and/or drive masses (2) in relation to the substrate due to the generated Coriolis forces. At least two, preferably four anchors (5) are used to rotatably fasten the sensor mass (3) to the substrate by means of springs (4).
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Citations
17 Claims
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1. MEMS gyroscope for detecting rotary movements about an x, y and/or z axis comprising,
a substrate; -
at least two driving masses, wherein the driving masses are movable radially relative to a central point; and drive elements for oscillating vibration of the driving masses in order to generate Coriolis forces on the driving masses in event of rotation of the substrate about the x, y and/or z axis, wherein the oscillating driving masses are connected to at least one additional sensor mass, which is non-oscillating but which can be rotated on the substrate about the x, y and/or z axis together with the oscillating driving masses and with sensor elements, in order to detect displacements of sensor mass and/or the driving masses in relation to the substrate as a result of generated Coriolis forces, and with at least two anchoring devices for rotary attachment of the sensor mass to the substrate by means of springs and the driving masses are driven in as oscillatory manner in drive direction without exerting a relevant influence on the sensor mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification