Micro device transfer head heater assembly and method of transferring a micro device
First Claim
Patent Images
1. A transfer head assembly comprising:
- a heater assembly; and
a base substrate supporting an array of electrostatic transfer heads;
wherein each electrostatic transfer head comprises a mesa structure of 1 to 100 μ
m scale in both x and y dimensions, and the heater assembly is configured to heat each electrostatic transfer head to a temperature above 156.7°
C.
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Accused Products
Abstract
A method of transferring a micro device and an array of micro devices are disclosed. A carrier substrate carrying a micro device connected to a bonding layer is heated to a temperature below a liquidus temperature of the bonding layer, and a transfer head is heated to a temperature above the liquidus temperature of the bonding layer. Upon contacting the micro device with the transfer head, the heat from the transfer head transfers into the bonding layer to at least partially melt the bonding layer. A voltage applied to the transfer head creates a grip force which picks up the micro device from the carrier substrate.
178 Citations
28 Claims
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1. A transfer head assembly comprising:
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a heater assembly; and a base substrate supporting an array of electrostatic transfer heads; wherein each electrostatic transfer head comprises a mesa structure of 1 to 100 μ
m scale in both x and y dimensions, and the heater assembly is configured to heat each electrostatic transfer head to a temperature above 156.7°
C. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A transfer tool comprising:
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a transfer head assembly comprising; a heater assembly; and a base substrate supporting an array of electrostatic transfer heads; wherein each electrostatic transfer head comprises a mesa structure of 1 to 100 μ
m scale in both x and y dimensions, and the heater assembly is configured to heat each electrostatic transfer head to a temperature above 156.7°
C.; anda carrier substrate heater assembly. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification