Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods

• US 8,790,470 B2
• Filed: 12/15/2011
• Issued: 07/29/2014
• Est. Priority Date: 05/24/2006
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Lee, Hyo-san, Hong, Chang-Ki, Lee, Kun-Tack, Shim, Woo-Gwan, Han, Jeong-Nam, Oh, Jung-Min, Lim, Kwon-Taek, Hwang, Ha-Soo, Yuvaraj, Haldorai, Jung, Jae-Mok
• Primary Examiner(s): Barr, Michael
• Assistant Examiner(s): Bucci, Thomas
• Application Number:
  US13/326,940
• Publication Number:
  US 20120085495A1
• Time in Patent Office: 957 Days
• Field of Search: 134/18, 134/30, 134/61, 134/99.1, 134/110
• US Class Current: 134/56.R
• CPC Class Codes: H01L 21/02101 only involving supercritical fluids
• CPC Class Codes: H01L 21/31111 by chemical means
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles
• CPC Class Codes: H01L 21/6708 using mainly spraying means, e.g. nozzles
• CPC Class Codes: H10B 12/033 the capacitor extending over the transistor
• CPC Class Codes: Y10S 134/902 Semiconductor wafer

Abstract

Provided herein are etching, cleaning and drying methods using a supercritical fluid, and a chamber system for conducting the same. The etching method includes etching the material layer using a supercritical carbon dioxide in which an etching chemical is dissolved, and removing an etching by-product created from a reaction between the material layer and the etching chemical using a supercritical carbon dioxide in which a cleaning chemical is dissolved. Methods of manufacturing a semiconductor device are also provided.

Claims

1. A semiconductor processing apparatus, comprising:

a process chamber configured to accept a substrate for processing; and

a supercritical material supplying unit configured to supply a first material in a supercritical condition to the process chamber, the supercritical material supplying unit comprising

a first fluid path to provide the first material from a first source to the process chamber;

a first pressure pump within the first fluid path;

a second fluid path to provide a second material from a second source to the process chamber, the second fluid path disposed between the second source and a first location along the first fluid path upstream of the process chamber to provide a mixture of the first material and the second material downstream of the first location;

a first regulator disposed in the first fluid path between the first location and the process chamber, configured to regulate an amount of a mixture of the first material and the second material introduced into the process chamber; and

a first temperature control jacket disposed around at least a portion of the first fluid path between the first location and the first regulator,

wherein the first pressure pump and the first temperature control jacket are configured to maintain temperature and pressure of the mixture of the first material and the second material so that the first material is above a critical point.

2. The apparatus of claim 1, further comprising a temperature controller positioned in the first fluid path between the source and the first pressure pump.

3. The apparatus of claim 1, further comprising:

a mixer, the mixer comprising the first regulator; and

a third fluid path between the process chamber and the mixer, the third fluid path configured to deliver supercritical material within the process chamber to the mixer.

4. The apparatus of claim 3, further comprising a circulation pump disposed in the third fluid path.

5. The apparatus of claim 3, further comprising a vent portion, disposed in the third fluid path between the process chamber and the mixer, configured to discharge at least a portion of used supercritical material provided from the process chamber.

6. The apparatus of claim 5, wherein the supercritical material supplying unit is configured to supply additional supercritical material to the mixer upon discharging at least a portion of used supercritical material.

7. The apparatus of claim 1, further comprising:

a third fluid path between the process chamber and the first location along the first fluid path upstream of the process chamber, the third fluid path configured to deliver supercritical material within the process chamber to the first fluid path.

8. The apparatus of claim 7, further comprising a second temperature control jacket disposed around at least a portion of the third fluid path.

9. The apparatus of claim 1, wherein the first location is upstream of the first regulator.

10. The apparatus of claim 9, further comprising:

a mixer, the mixer comprising the first regulator,

wherein the first location is upstream of the mixer.

11. The apparatus of claim 10, further comprising the first source, the first material, the second source and the second material, wherein the first source and second sources are containers.

12. The apparatus of claim 11, wherein the second material is selected from the group consisting of:

a fluoride, a pyridine, F-AOT, a fluorine-based surfactant, and an alcohol.

13. The apparatus of claim 11, wherein the first material comprises a solvent and the second material comprises an etching chemical.

14. The apparatus of claim 13, wherein the first material is carbon dioxide.

15. The apparatus of claim 11, wherein the first material comprises a solvent and the second material comprises a cleaning chemical.

16. The apparatus of claim 15, wherein the first material is carbon dioxide.

17. The apparatus of claim 10, further comprising a second regulator, the second regulator being disposed in the second fluid path between the second source and the first location.

18. The apparatus of claim 17, wherein the second regulator comprises a valve.

19. The apparatus of claim 1, further comprising the first source and the first material, wherein the first material is carbon dioxide and the supercritical material supplying unit is configured to supply supercritical carbon dioxide to the process chamber.

20. The apparatus of claim 1, further comprising a separator configured to receive process chamber material from the process chamber and separate the first material from other materials of the process chamber material.

21. The apparatus of claim 20, wherein the separator is configured to receive a material for neutralizing a chemical of the process chamber material.

22. The apparatus of claim 20, wherein the first material is a solvent.

23. The apparatus of claim 22, further comprising the first source and the first material, wherein the first material is carbon dioxide and the supercritical material supplying unit is configured to supply supercritical carbon dioxide to the process chamber.

24. The apparatus of claim 22, further comprising a discharge fluid path between the process chamber and the separator, the discharge fluid path configured to provide pressurized solvent from the process chamber to the separator.

25. The apparatus of claim 24, further comprising a second temperature control jacket disposed around at least a portion of the discharge fluid path.

26. The apparatus of claim 24, further comprising a discharge valve disposed in the discharge fluid path, between the process chamber and the separator.

27. The apparatus of claim 24, further comprising a rupture disk in fluid communication with the discharge fluid path configured to address an abrupt discharge of the pressurized solvent from the process chamber.

28. The apparatus of claim 27, wherein the pressurized solvent is a supercritical material.

29. The apparatus of claim 22, wherein the solvent is carbon dioxide.

30. The apparatus of claim 1, further comprising a temperature control unit, wherein the first temperature control jacket is controlled by the temperature control unit.

31. The apparatus of claim 30, wherein the first fluid path comprises a first pipe disposed between the first pressure pump and the first regulator, wherein the first control jacket is disposed around the first pipe.

32. The apparatus of claim 31, wherein the first fluid path comprises a second pipe disposed between the first regulator and the process chamber, and the apparatus further comprises a second temperature control jacket, controlled by the control unit, disposed around the second pipe.

33. The apparatus of claim 1, further comprising:

a mixer, the mixer comprising the first regulator,

wherein the first fluid path comprises a first pipe connected to the mixer, and

wherein the first control jacket is disposed about the first pipe.

34. The apparatus of claim 33, further comprising:

a second pipe disposed in the first fluid path between the mixer and the process chamber; and

a second temperature control jacket disposed about the second pipe.

35. The apparatus of claim 1, wherein the temperature at which the process chamber is configured to be maintained is in a range of about 31.1°

C. to 100°

C., and the pressure at which the process chamber is configured to be maintained is in a range of about 1085 psi to 4000 psi.