Non-linear element, display device including non- linear element, and electronic device including display device

• US 8,791,456 B2
• Filed: 03/15/2013
• Issued: 07/29/2014
• Est. Priority Date: 10/30/2009
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Kawae, Daisuke
• Primary Examiner(s): Mandala, Michelle
• Application Number:
  US13/835,435
• Publication Number:
  US 20130222955A1
• Time in Patent Office: 501 Days
• Field of Search: 257/43, 257/212, 257/233, 257/288, 257/292, 257/293, 257/910, 257/E29.117, 257/E29.122
• US Class Current: 257/43
• CPC Class Codes: H01L 27/0255 using diodes as protective elements
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/1255 integrated with passive devices, e.g. auxiliary capacitors
• CPC Class Codes: H01L 29/78642 Vertical transistors
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
• CPC Class Codes: H01L 29/861 Diodes
• CPC Class Codes: H02H 9/044 Physical layout, materials not provided for elsewhere varistors H01C7/12; spark-gaps H01T; Ovshinsky devices H10N70/00
• CPC Class Codes: Y10S 257/91 Diode arrays, e.g. diode read-only memory array

Abstract

A non-linear element, such as a diode, in which an oxide semiconductor is used and a rectification property is favorable is provided. In a thin film transistor including an oxide semiconductor in which the hydrogen concentration is less than or equal to 5×10¹⁹/cm³, the work function φms of a source electrode in contact with the oxide semiconductor, the work function φmd of a drain electrode in contact with the oxide semiconductor, and electron affinity χ of the oxide semiconductor satisfy φms≦χ<φmd. By electrically connecting a gate electrode and the drain electrode of the thin film transistor, a non-linear element with a more favorable rectification property can be achieved.

Claims

1. A protection circuit comprising:

a resistor;

a diode;

a first power supply line;

a second power supply line electrically connected to a first terminal of the resistor; and

a signal line electrically connected to a first terminal of the diode and a second terminal of the resistor;

wherein a second terminal of the diode is electrically connected to one of the first power supply line and the second power supply line,

wherein the diode is a diode-connected transistor including an oxide semiconductor layer including In—

Ga—

Zn—

O based oxide semiconductor, and

wherein a hydrogen concentration in the oxide semiconductor layer is less than or equal to 5×

10¹⁹/cm³.

2. The protection circuit according to claim 1, further comprising:

a first capacitor; and

a second capacitor,

wherein a first terminal of the first capacitor and a first terminal of the second capacitor are electrically connected to the signal line,

wherein a second terminal of the first capacitor is electrically connected to the first power supply line, and

wherein a second terminal of the second capacitor is electrically connected to the second power supply line.

3. A display device comprising the protection circuit according to claim 1.

4. A protection circuit comprising:

a resistor;

a first power supply line;

a second power supply line electrically connected to a first terminal of the resistor;

a signal line electrically connected to a second terminal of the resistor;

a first transistor a gate electrode of which is electrically connected to one of a source electrode and a drain electrode of the first transistor; and

a second transistor a gate electrode of which is electrically connected to one of a source electrode and a drain electrode of the second transistor;

wherein the other of the source electrode and the drain electrode of the first transistor is electrically connected to the first power supply line,

wherein the one of the source electrode and the drain electrode of the first transistor, the other of the source electrode and the drain electrode of the second transistor are electrically connected to the signal line, and

wherein the one of the source electrode and the drain electrode of the second transistor is electrically connected to the second power supply line,

wherein each of the first transistor and the second transistor comprises an oxide semiconductor layer including In—

Ga—

Zn—

O based oxide semiconductor, and

wherein a hydrogen concentration in the oxide semiconductor layer is less than or equal to 5×

10¹⁹/cm³.

5. The protection circuit according to claim 4, further comprising:

a third transistor a gate electrode of which is electrically connected to the gate electrode of the first transistor; and

a fourth transistor a gate electrode of which is electrically connected to the gate electrode of the second transistor,

wherein one of a source electrode and a drain electrode of the third transistor is electrically connected to the other of the source electrode and the drain electrode of the first transistor,

wherein the other of the source electrode and the drain electrode of the third transistor is electrically connected to the first power supply line,

wherein one of a source electrode and a drain electrode of the fourth transistor is electrically connected to the other of the source electrode and the drain electrode of the second transistor, and

wherein the other of the source electrode and the drain electrode of the fourth transistor is electrically connected to the signal line.

6. The protection circuit according to claim 5, wherein each of the third transistor and the fourth transistor comprises an oxide semiconductor layer.

7. The protection circuit according to claim 4, further comprising:

a first capacitor; and

a second capacitor,

wherein a first terminal of the first capacitor and a first terminal of the second capacitor are electrically connected to the signal line,

wherein a second terminal of the first capacitor is electrically connected to the first power supply line, and

wherein a second terminal of the second capacitor is electrically connected to the second power supply line.

8. The protection circuit according to claim 4,

wherein, in each of the first transistor and the second transistor, the oxide semiconductor layer is in contact with the source electrode and the drain electrode, and

wherein a work function φ

ma of the one of the source electrode and the drain electrode, an electron affinity χ

of the oxide semiconductor layer, and a work function φ

mc of the other of the source electrode and the drain electrode satisfy φ

mc≦

χ

<

φ

ma.

9. The protection circuit according to claim 8, wherein, in each of the first transistor and the second transistor, an area of contact between the one of the source electrode and the drain electrode and the oxide semiconductor layer is different from an area of contact between the other of the source electrode and the drain electrode and the oxide semiconductor layer.

10. The protection circuit according to claim 8, wherein a difference between the work function φ

ma and the electron affinity χ

is greater than or equal to 0.2 eV.

11. The protection circuit according to claim 8, wherein, in each of the first transistor and the second transistor, a carrier concentration of the oxide semiconductor layer is less than or equal to 5×

10¹⁴/cm³.

12. A display device comprising the protection circuit according to claim 4.

13. A protection circuit comprising:

a resistor;

a first line electrically connected a first terminal of the resistor;

a second line electrically connected to a second terminal of the resistor;

a first transistor a gate electrode of which is electrically connected to one of a source electrode and a drain electrode of the first transistor;

a second transistor a gate electrode of which is electrically connected to one of a source electrode and a drain electrode of the second transistor;

a third transistor a gate electrode of which is electrically connected to one of a source electrode and a drain electrode of the third transistor;

a fourth transistor a gate electrode of which is electrically connected to one of a source electrode and a drain electrode of the fourth transistor;

a first power supply line electrically connected to the one of the source electrode and the drain electrode of the first transistor and to the one of the source electrode and the drain electrode of the second transistor; and

a second power supply line electrically connected to the other of the source electrode and the drain electrode of the third transistor and the other of the source electrode and the drain electrode of the fourth transistor;

wherein the other of the source electrode and the drain electrode of the first transistor and the one of the source electrode and the drain electrode of the third transistor are electrically connected to the first terminal of the resistor, and

wherein the other of the source electrode and the drain electrode of the second transistor and the one of the source electrode and the drain electrode of the fourth transistor are electrically connected to the second terminal of the resistor,

wherein each of the first transistor, the second transistor, the third transistor, and the fourth transistor comprises an oxide semiconductor layer including In—

Ga—

Zn—

O based oxide semiconductor, and

wherein a hydrogen concentration in the oxide semiconductor layer is less than or equal to 5×

10¹⁹/cm³.

14. The protection circuit according to claim 13, further comprising:

a fifth transistor a gate electrode of which is electrically connected to one of a source electrode and a drain electrode of the fifth transistor;

a sixth transistor a gate electrode of which is electrically connected to one of a source electrode and a drain electrode of the sixth transistor,

a seventh transistor a gate electrode of which is electrically connected to one of a source electrode and a drain electrode of the seventh transistor; and

an eighth transistor a gate electrode of which is electrically connected to one of a source electrode and a drain electrode of the eighth transistor,

wherein the other of the source electrode and the drain electrode of the fifth transistor and the one of the source electrode and the drain electrode of the seventh transistor are electrically connected to the first terminal of the resistor,

wherein the other of the source electrode and the drain electrode of the sixth transistor and the one of the source electrode and the drain electrode of the eighth transistor are electrically connected to the second terminal of the resistor,

wherein the one of the source electrode and the drain electrode of the fifth transistor is electrically connected to the other of the source electrode and the drain electrode of the first transistor,

wherein the one of the source electrode and the drain electrode of the sixth transistor is electrically connected to the other of the source electrode and the drain electrode of the second transistor,

wherein the other of the source electrode and the drain electrode of the seventh transistor is electrically connected to the one of the source electrode and the drain electrode of the third transistor, and

wherein the other of the source electrode and the drain electrode of the eighth transistor is electrically connected to the one of the source electrode and the drain electrode of the fourth transistor.

15. The protection circuit according to claim 13,

wherein, in each of the first transistor, the second transistor, the third transistor, and the fourth transistor, the oxide semiconductor layer is in contact with the source electrode and the drain electrode, and

wherein a work function φ

ma of the one of the source electrode and the drain electrode, an electron affinity χ

of the oxide semiconductor layer, and a work function φ

mc of the other of the source electrode and the drain electrode satisfy φ

mc≦

χ

<

φ

ma.

16. The protection circuit according to claim 15, wherein, in each of the first transistor, the second transistor, the third transistor, and the fourth transistor, an area of contact between the one of the source electrode and the drain electrode and the oxide semiconductor layer is different from an area of contact between the other of the source electrode and the drain electrode and the oxide semiconductor layer.

17. The protection circuit according to claim 15, wherein a difference between the work function φ

ma and the electron affinity χ

is greater than or equal to 0.2 eV.

18. The protection circuit according to claim 15, wherein a carrier concentration of the oxide semiconductor layer is less than or equal to 5×

10¹⁴/cm³.

19. A display device comprising the protection circuit according to claim 13.

20. A protection circuit comprising:

a resistor;

a first line electrically connected a first terminal of the resistor;

a second line electrically connected to a second terminal of the resistor;

a first diode an anode of which is electrically connected to the first terminal of the resistor;

a second diode an anode of which is electrically connected to the second terminal of the resistor;

wherein each of the first diode and the second diode includes an electrode and an oxide semiconductor layer including In—

Ga—

Zn—

O based oxide semiconductor, and

wherein a hydrogen concentration in the oxide semiconductor layer is less than or equal to 5×

10¹⁹/cm³.

21. The protection circuit according to claim 20, wherein the first terminal of the resistor is electrically connected to a wiring.

22. The protection circuit according to claim 20,

wherein the first diode is a first n-channel thin film transistor, and

wherein the second diode is a second n-channel thin film transistor.

23. The protection circuit according to claim 20,

wherein each of the first diode and the second diode further includes a drain electrode in contact with the oxide semiconductor layer,

wherein the electrode of each of the first diode and the second diode is a source electrode in contact with the oxide semiconductor layer, and

wherein, in each of the first diode and the second diode, a work function φ

ma of the one of the source electrode and the drain electrode, an electron affinity χ

of the oxide semiconductor layer, and a work function φ

mc of the other of the source electrode and the drain electrode satisfy φ

mc≦

χ

<

φ

ma.

24. A protection circuit comprising:

a resistor; and

a transistor electrically connected to the resistor,

wherein a gate electrode of the transistor is electrically connected to one of a source electrode and a drain electrode of the transistor,

wherein the transistor comprises an oxide semiconductor layer including In—

Ga—

Zn—

O based oxide semiconductor, and

wherein a hydrogen concentration in the oxide semiconductor layer is less than or equal to 5×

10¹⁹/cm³.