Method of manufacturing high frequency thickness shear mode gas and organic vapor sensors

• US 8,793,849 B1
• Filed: 06/05/2009
• Issued: 08/05/2014
• Est. Priority Date: 07/28/2005
• Status: Active Grant

• Current Assignee: University of South Florida (State University System of Florida)
• Original Assignee: University of South Florida (State University System of Florida)
• Inventors: Bhethanabotla, Venkat R., Williams, Randolph D.
• Primary Examiner(s): Tugbang, A. Dexter
• Application Number:
  US12/478,964
• Time in Patent Office: 1,887 Days
• Field of Search: 29/253.5, 295/94, 298/41, 298/42, 298/46, 310/312, 310/367, 310/369, 310/348, 204/192.18, 204/192.34, 216/66, 216/94, 428/458, 428/456, 252/62.9 R, 252/62.9 PZ, 73/240.3, 73/240.6, 73/617.9
• US Class Current: 29/25.35
• CPC Class Codes: G01N 2291/021 Gases
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/02809 Concentration of a compound, e.g. measured by a surface mass change
• CPC Class Codes: G01N 2291/0426 Bulk waves, e.g. quartz crystal microbalance, torsional waves
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/036 by measuring frequency or resonance of acoustic waves
• CPC Class Codes: Y10T 29/42 Piezoelectric device making
• CPC Class Codes: Y10T 29/49005 Acoustic transducer
• CPC Class Codes: Y10T 29/49147 Assembling terminal to base
• CPC Class Codes: Y10T 29/49155 Manufacturing circuit on or in base

Abstract

A method of fabricating a thickness shear mode (TSM) gas and organic vapor sensor having a visco-elastic polymer coating and a fundamental frequency greater than 20 MHz. The method begins by providing a piezoelectric crystal and milling a central region of the crystal. Milling the crystal creates a central oscillating region of reduced thickness surrounded by a thicker outer region. Two electrodes are then deposited in the oscillating region of the crystal—one on each side of the crystal. The oscillating region on both sides of the crystal and the electrodes are then coated with a polymer coating.

Claims

1. A method of fabricating a high frequency thickness shear mode (TSM) gas and organic vapor sensor comprising the steps of:

providing a quartz piezoelectric crystal;

milling a central region of the piezoelectric crystal to create an oscillating region of reduced thickness surrounded by a comparatively thicker outer region;

depositing a first electrode having two opposing sides in the oscillating region on a first side of the piezoelectric crystal wherein the first electrode is on the oscillating region;

depositing a second electrode having two opposing sides in the oscillating region on a second side of the piezoelectric crystal wherein the second electrode is on the oscillating region; and

coating the side of the first electrode not on the oscillating region and the side of the second electrode not on the oscillating region with a polymer sensing film;

wherein the polymer sensing film is capable of moving with oscillation of the sensor and allows for physisorbtion of an analyte;

wherein the polymer used in the polymer sensing film is dependent on the analyte to be detected;

wherein the polymer sensing film is a chemically-sorbent film that imparts selectivity and sensitivity towards a particular chemical;

wherein the selectivity and sensitivity of the polymer sensing film produces the high frequency TSM gas and organic vapor sensor.

2. The method of claim 1, wherein the piezoelectric crystal is an AT-cut piezoelectric crystal.

3. The method of claim 1, further comprising depositing an adhesive layer on to the piezoelectric crystal.

4. The method of claim 3, wherein the adhesive layer is formed from chromium.

5. The method of claim 3, wherein the electrodes are deposited upon the oscillating region and over the adhesive layer.

6. The method of claim 1, wherein the diameter of the oscillating region is about 0.127 cm.

7. The method of claim 1, wherein the first and second electrodes are circular electrodes fabricated in gold.

8. The method of claim 1, wherein the first and second electrodes are approximately the same size and shape.

9. The method of claim 1, wherein the polymer sensing film is a viscoelastic polymer.

10. The method of claim 1, wherein the polymer in the polymer sensing film is selected from the group consisting of polyvinyl acetate, polyvinyl pyrrolidone, polyisobutylene, polystyrene and polystyrenebutadiene.

11. The method of claim 1, wherein the coated oscillating region of the piezoelectric crystal has a frequency greater than about 50 MHz.

12. The method of claim 1, wherein the coated oscillating region of the piezoelectric crystal has a frequency greater than about 20 MHz.

13. The method of claim 1, wherein the oscillating region is chemically milled.

14. The method of claim 1, wherein the step of coating the piezoelectric crystal with the chemically-sorbent polymer comprises:

cleaning the piezoelectric crystal;

aspirating a dilute solution of the polymer dissolved in a volatile solvent; and

evaporating the volatile solvent.

15. The method of claim 1, wherein the polymer sensing film is coated to equal thickness on each side of the piezoelectric crystal.

16. The method of claim 1, further comprising drying the piezoelectric crystal after each coating application.

17. The method of claim 1, further comprising curing the piezoelectric crystal to anneal the polymer coating.

18. The method of claim 1, wherein the method of coating is chosen from the group consisting of spin coating, spray coating, drop coating, and coating using an oscillating capillary nebulizer.