Method of manufacturing high frequency thickness shear mode gas and organic vapor sensors
First Claim
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1. A method of fabricating a high frequency thickness shear mode (TSM) gas and organic vapor sensor comprising the steps of:
- providing a quartz piezoelectric crystal;
milling a central region of the piezoelectric crystal to create an oscillating region of reduced thickness surrounded by a comparatively thicker outer region;
depositing a first electrode having two opposing sides in the oscillating region on a first side of the piezoelectric crystal wherein the first electrode is on the oscillating region;
depositing a second electrode having two opposing sides in the oscillating region on a second side of the piezoelectric crystal wherein the second electrode is on the oscillating region; and
coating the side of the first electrode not on the oscillating region and the side of the second electrode not on the oscillating region with a polymer sensing film;
wherein the polymer sensing film is capable of moving with oscillation of the sensor and allows for physisorbtion of an analyte;
wherein the polymer used in the polymer sensing film is dependent on the analyte to be detected;
wherein the polymer sensing film is a chemically-sorbent film that imparts selectivity and sensitivity towards a particular chemical;
wherein the selectivity and sensitivity of the polymer sensing film produces the high frequency TSM gas and organic vapor sensor.
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Abstract
A method of fabricating a thickness shear mode (TSM) gas and organic vapor sensor having a visco-elastic polymer coating and a fundamental frequency greater than 20 MHz. The method begins by providing a piezoelectric crystal and milling a central region of the crystal. Milling the crystal creates a central oscillating region of reduced thickness surrounded by a thicker outer region. Two electrodes are then deposited in the oscillating region of the crystal—one on each side of the crystal. The oscillating region on both sides of the crystal and the electrodes are then coated with a polymer coating.
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Citations
18 Claims
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1. A method of fabricating a high frequency thickness shear mode (TSM) gas and organic vapor sensor comprising the steps of:
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providing a quartz piezoelectric crystal; milling a central region of the piezoelectric crystal to create an oscillating region of reduced thickness surrounded by a comparatively thicker outer region; depositing a first electrode having two opposing sides in the oscillating region on a first side of the piezoelectric crystal wherein the first electrode is on the oscillating region; depositing a second electrode having two opposing sides in the oscillating region on a second side of the piezoelectric crystal wherein the second electrode is on the oscillating region; and coating the side of the first electrode not on the oscillating region and the side of the second electrode not on the oscillating region with a polymer sensing film; wherein the polymer sensing film is capable of moving with oscillation of the sensor and allows for physisorbtion of an analyte; wherein the polymer used in the polymer sensing film is dependent on the analyte to be detected; wherein the polymer sensing film is a chemically-sorbent film that imparts selectivity and sensitivity towards a particular chemical; wherein the selectivity and sensitivity of the polymer sensing film produces the high frequency TSM gas and organic vapor sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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