Method for the precise measuring operation of a micromechanical rotation rate sensor
First Claim
1. A method for a precise measuring operation of a micromechanical rotation rate sensor, comprising at least one deflectively suspended seismic mass, at least one drive device for driving the seismic mass and at least one first and one second trimming electrode element, which are jointly assigned directly or indirectly to the seismic mass, the method comprising:
- setting a first electrical trimming voltage (UTO1, UTLO1, UTRO1, UTU2, UT1H, UT2V) between the first trimming electrode element and the seismic mass; and
setting a second electrical trimming voltage (UTO2, UTLO2, UTRO2, UTU1, UT2H, UT1V) between the second trimming electrode element and the seismic mass,wherein the first and the second electrical trimming voltages are set at least as a function based on a square root of a summation of a squared quadrature parameter (UT) determined from a measured quadrature signal of the rotation rate sensor and a squared resonance parameter (Uf), andwherein the quadrature parameter is;
a) increased when the measured quadrature signal is above a quadrature threshold,b) decreased when the measured quadrature signal is below the quadrature threshold, andc) maintained the same when the measured quadrature signal is equal to the quadrature threshold.
1 Assignment
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Accused Products
Abstract
A method and apparatus for the precise measuring operation of a micromechanical rotation rate sensor, including at least one deflectively suspended seismic mass, at least one drive device for driving the seismic mass, and at least one first and one second trimming electrode element, which are jointly assigned directly or indirectly to the seismic mass, a first electrical trimming voltage (UTO1, UTLO1, UTRO1) being set between the first trimming electrode element and the seismic mass, and a second electrical trimming voltage (UTO2, UTLO2, UTRO2) being set between the second trimming electrode element and the seismic mass, the first and the second electrical trimming voltages being set at least as a function of a quadrature parameter (UT) and a resonance parameter (Uf).
9 Citations
13 Claims
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1. A method for a precise measuring operation of a micromechanical rotation rate sensor, comprising at least one deflectively suspended seismic mass, at least one drive device for driving the seismic mass and at least one first and one second trimming electrode element, which are jointly assigned directly or indirectly to the seismic mass, the method comprising:
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setting a first electrical trimming voltage (UTO1, UTLO1, UTRO1, UTU2, UT1H, UT2V) between the first trimming electrode element and the seismic mass; and setting a second electrical trimming voltage (UTO2, UTLO2, UTRO2, UTU1, UT2H, UT1V) between the second trimming electrode element and the seismic mass, wherein the first and the second electrical trimming voltages are set at least as a function based on a square root of a summation of a squared quadrature parameter (UT) determined from a measured quadrature signal of the rotation rate sensor and a squared resonance parameter (Uf), and wherein the quadrature parameter is; a) increased when the measured quadrature signal is above a quadrature threshold, b) decreased when the measured quadrature signal is below the quadrature threshold, and c) maintained the same when the measured quadrature signal is equal to the quadrature threshold. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A micromechanical rotation rate sensor, comprising:
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at least one deflectively suspended seismic mass; at least one drive device for driving the seismic mass; and at least one first and one second trimming electrode element, which are jointly assigned directly or indirectly to the seismic mass, in particular at least the first trimming electrode element being connected to a first electrical voltage source, a first electrical trimming voltage (UTO1, UTLO1, UTRO1, UTU2, UT1H, UT2V) being set between the first trimming electrode element and the seismic mass, and a second electrical trimming voltage (UTO2, UTLO2, UTRO2, UTU1, UT2H, UT1V) being set between the second trimming electrode element and the seismic mass, wherein the first and the second electrical trimming voltages are set at least as a function based on a square root of a summation of a squared quadrature parameter (UT) determined from a measured quadrature signal of the rotation rate sensor and a squared resonance parameter (Uf), and wherein the quadrature parameter is; a) increased when the measured quadrature signal is above a quadrature threshold, b) decreased when the measured quadrature signal is below the quadrature threshold, and c) maintained the same when the measured quadrature signal is equal to the quadrature threshold. - View Dependent Claims (12, 13)
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Specification