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Integrated inertial sensing apparatus using MEMS and quartz configured on crystallographic planes

  • US 8,794,065 B1
  • Filed: 02/26/2011
  • Issued: 08/05/2014
  • Est. Priority Date: 02/27/2010
  • Status: Active Grant
First Claim
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1. An apparatus for inertial sensing, the apparatus comprising:

  • a substrate member comprising a thickness of material and a surface region;

    a first surface region configured from a first crystallographic plane of the substrate member;

    a second plane region configured from a second crystallographic plane of the substrate member, wherein the first crystallographic plane and the second crystallographic plane form an acute angle;

    a quartz inertial sensing device coupled to the first surface region;

    one or more MEMS inertial sensing devices coupled to the second plane region;

    an enclosure housing the one or more MEMS inertial sensing devices and the quartz inertial sensing device and configured overlying a first outer region of the surface region, the enclosure housing have an upper cover region; and

    one or more bonding structures, each of the bonding structures having a bonding pad within a vicinity of the upper cover region and provided within a second outer region of the surface region,wherein the second outer region is characterized by a width of about 100 microns and less, and wherein the first outer region is characterized by a width of about 200 microns and less.

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