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Techniques for bonding substrates using an intermediate layer

  • US 8,796,109 B2
  • Filed: 12/23/2010
  • Issued: 08/05/2014
  • Est. Priority Date: 12/23/2010
  • Status: Active Grant
First Claim
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1. A method comprising:

  • depositing a thin film on a first surface of a first substrate;

    moving a second surface of a second substrate into contact with the thin film such that the thin film is located between the first and second surfaces;

    generating electromagnetic (EM) radiation of a first wavelength, the first wavelength selected such that the thin film absorbs EM radiation at the first wavelength; and

    directing the EM radiation through one of the first and second substrates and onto a region of the thin film until the first and second substrates are fused in the region, wherein directing the EM radiation through one of the first and second substrates and onto the region of the thin film until the first and second substrates are fused in the region does not cause the first substrate or the second substrate to melt or flow.

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