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Flow monitored particle sensor

  • US 8,800,383 B2
  • Filed: 08/24/2010
  • Issued: 08/12/2014
  • Est. Priority Date: 08/24/2009
  • Status: Active Grant
First Claim
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1. A method of monitoring flow rate of a gas in a particle sensor, said method comprising the steps of:

  • providing a particle sensor comprising;

    a flow measurement orifice comprising a differential pressure sensor for measuring differential pressure across said flow measurement orifice;

    a critical orifice;

    a vacuum system for generating gas flow across said flow measurement orifice and said critical orifice;

    generating a flow of gas through said particle sensor by establishing a vacuum pressure at a position downstream of said critical orifice;

    determining a pressure drop (DPI) across said flow measurement orifice;

    determining atmospheric pressure (API);

    determining a pressure in said particle sensor (BPI) at a position that is upstream of said critical orifice;

    identifying a flow condition from said DPI, API and BPI values, wherein said flow condition is a flow rate error condition; and

    identifying said flow rate error condition as a vacuum-induced flow loss or an inlet-induced flow loss;

    thereby monitoring said flow rate in said particle sensor.

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