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Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers

  • US 8,801,894 B2
  • Filed: 03/12/2010
  • Issued: 08/12/2014
  • Est. Priority Date: 03/22/2007
  • Status: Active Grant
First Claim
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1. A template for etching a substrate, comprising:

  • a cross-linked hydrogel within a trench in a material on the substrate, the cross-linked hydrogel formed from a water-soluble polymer and spaced from sidewalls of the trench by an elongate gap exposing the substrate at a floor of the trench.

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