Method for manufacturing chemical sensor with multiple sensor cells
First Claim
1. Method for manufacturing a chemical sensor with multiple sensor cells, comprising the steps ofproviding a substrate,applying an expansion inhibitor to the substrate for preventing a sensitive material to be applied to an area on the substrate for building a sensitive film of a sensor cell to expand from said area,providing the sensitive material, andbuilding the sensitive film by contactless dispensing the sensitive material to said area,wherein applying the expansion inhibitor includes treating a surface of the substrate for providing a first surface energy in said area, and for providing a second surface energy outside said area, which second surface energy is less than the first surface energy for making said area a preferred zone for the sensitive material to wet to.
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Abstract
In a method for manufacturing a chemical sensor with multiple sensor cells, a substrate is provided and an expansion inhibitor is applied to the substrate for preventing a sensitive material to be applied to an area on the substrate for building a sensitive film of a sensor cell to expand from said area. The sensitive material is provided and the sensitive film is built by contactless dispensing the sensitive material to said area.
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Citations
21 Claims
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1. Method for manufacturing a chemical sensor with multiple sensor cells, comprising the steps of
providing a substrate, applying an expansion inhibitor to the substrate for preventing a sensitive material to be applied to an area on the substrate for building a sensitive film of a sensor cell to expand from said area, providing the sensitive material, and building the sensitive film by contactless dispensing the sensitive material to said area, wherein applying the expansion inhibitor includes treating a surface of the substrate for providing a first surface energy in said area, and for providing a second surface energy outside said area, which second surface energy is less than the first surface energy for making said area a preferred zone for the sensitive material to wet to.
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21. Method for manufacturing multiple chemical sensors with multiple sensor cells each, comprising the steps of
providing a wafer, applying expansion inhibitors to the wafer for preventing a sensitive material to be applied to multiple areas on the wafer for building sensitive films of the multiple sensor cells for the chemical sensors to expand from said multiple areas, providing the sensitive material, building the sensitive films by contactless dispensing the sensitive material to said multiple areas, and separating the wafer into the chemical sensors, wherein applying the expansion inhibitors includes treating a surface of the substrate fir providing a first surface energy in said areas, and for providing a second surface energy outside said areas, which second surface energy is less than the first surface energy for making said areas preferred zones for the sensitive material to wet to.
Specification