Linearly deployed actuators

• US 8,803,256 B2
• Filed: 11/15/2010
• Issued: 08/12/2014
• Est. Priority Date: 11/15/2010
• Status: Expired due to Fees

• Current Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Original Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Inventors: Gutierrez, Roman C.
• Primary Examiner(s): MULLINS, BURTON S
• Application Number:
  US12/946,670
• Publication Number:
  US 20120119614A1
• Time in Patent Office: 1,366 Days
• Field of Search: 310/309, 396/75
• US Class Current: 257/415
• CPC Class Codes: B81B 3/0035 Constitution or structural means for controlling the movement of the flexible or deformable elements
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 7/102 controlled by a microcomputer cameras with interchangeable lenses G03B17/14
• CPC Class Codes: G03B 2205/0084 using other types of actuators
• CPC Class Codes: G03B 3/00 Focusing arrangements of general interest for cameras, projectors or printers
• CPC Class Codes: H02K 41/02 Linear motors; Sectional motors
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type
• CPC Class Codes: H02N 11/006 Motors
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 29/49863 with prestressing of part
• CPC Class Codes: Y10T 74/18072 Reciprocating carriage motions

Abstract

A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced at a selected distance apart from the fixed frame and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

Claims

1. An actuator, comprising a substantially planar actuator device, the actuator device comprising:

an outer frame;

a fixed frame attached to the outer frame;

a moveable frame disposed parallel to the fixed frame;

a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement of the moveable frame relative to the outer frame and the fixed frame;

an element coupled to the moveable frame by a flexure for coplanar, rectilinear movement relative to the fixed and outer frames and for coplanar, rotational movement about a central axis of the element; and

,

a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame,

wherein the moveable frame is mechanically and/or adhesively fixed in a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance that is greater than the length of the teeth and less than twice the length of the teeth for substantially perpendicular movement relative thereto.

2. The actuator of claim 1, further comprising a deployment lever engaged with an over-center latch latching the moveable frame in the deployed position.

3. The actuator of claim 2, further comprising:

a pad coupled to the moveable frame by a deployment flexure, the pad having an opening therethrough; and

,

an upstanding post disposed on a resilient cantilever extending from the outer frame, the post extending into the opening of the pad and latching the moveable frame in the deployed position.

4. The actuator of claim 1, wherein the actuator device is formed of an electrically conductive material.

5. An electronic device incorporating the actuator of claim 1.

6. The electronic device of claim 5, wherein the electronic device comprises a camera.

7. A method for making an actuator, the method comprising:

forming a substantially planar actuator device, the actuator device comprising;

an outer frame;

a fixed frame attached to the outer frame;

a moveable frame disposed parallel to and coplanar with the fixed frame;

a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame; and

a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame;

wherein the fixed frame and the moveable frame are spaced apart by approximately the length of the teeth;

moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance that is greater than the length of the teeth and less than twice the length of the teeth; and

,

mechanically and/or adhesively fixing the moveable frame at in the deployed position for substantially rectilinear movement toward and away from the fixed frame.

8. The method of claim 7, wherein the moving comprises:

forming an over-center latch and a fulcrum on the outer frame;

forming a deployment lever coupled to the moveable frame with a deployment flexure, the deployment lever having a surface at an upper end configured for a camming actuation of and a latching engagement with the latch, and a notch at a lower end engaged with the fulcrum for rotational movement of the lever thereabout; and

,

rotating the deployment lever about the fulcrum such that the lever causes the deployment flexure to urge the moveable frame to the deployed position and the upper end of the deployment lever engages with the latch and latches the moveable frame in the deployed position.

9. The method of claim 8, further comprising forming a pull ring attached to the deployment flexure adjacent to the upper end of the fulcrum lever and using the pull ring to rotate the deployment lever about the fulcrum directly.

10. The method of claim 7, wherein the moving comprises:

forming a socket in the outer frame, the socket including a plurality of radial protrusions on an inner surface thereof;

forming a ball concentrically within the socket, the ball being coupled to the motion control flexure and including a plurality of indentations respectively complementary to the radial protrusions of the socket; and

,

using the protrusions on the socket and the indentations on the socket when moving the moveable frame to the deployed position to reduce the force required to move the moveable frame and such that the moveable frame moves substantially rectilinearly and perpendicularly to the fixed frame.

11. The method of claim 7, wherein the moving comprises:

forming a rectangular socket in the outer frame;

forming a rectangular ball disposed concentrically within the socket, the ball being connected to the outer frame by a ball spring and to the moveable frame by the motion control flexure; and

,

using the ball and the socket when moving the moveable frame to the deployed position such that the moveable frame moves substantially rectilinearly and perpendicularly to the fixed frame.

12. The method of claim 7, wherein the moving comprises:

forming a resilient cantilever on the outer frame, the cantilever having an upstanding post disposed thereon;

forming a pad coupled to the moveable frame by a deployment flexure, the pad having an opening therethrough corresponding in size to the circumferential periphery of the post and a lower surface disposed below an upper surface of the post;

applying a downward force to the cantilever such that the upper surface of the post is disposed below the lower surface of the pad;

urging the pad toward the post such that the pad causes the deployment flexure to urge the moveable frame to the deployed position and the opening in the pad is centered over the post; and

,

releasing the downward force on the cantilever such that post slides up into the opening in the pad and fixes the moveable frame in the deployed position.

13. The method of claim 7, wherein the moving comprises:

forming an engagement pad coupled to the moveable frame by a deployment flexure;

providing a pair of snubs disposed in spaced opposition to each other, each snub having a ramp disposed bilaterally symmetrical with respect to the ramp of the other;

disposing the engagement pad between the snubs; and

,

urging the snubs toward each other such that edges of the engagement pad respectively engage a corresponding one of the ramps and cause the engagement pad to move laterally and thereby cause the deployment flexure to urge the moveable frame to the deployed position.

14. The method of claim 7, wherein the moving comprises:

forming a deployment pad coupled to the moveable frame by a deployment flexure;

providing a fixture having a chamfered pillar upstanding therefrom; and

,

urging the actuator device downward toward the fixture such that an edge of the deployment pad contacts a chamfered surface of the pillar and causes the deployment flexure to move laterally and thereby urge the moveable frame to the deployed position.

15. The method of claim 7, wherein the moving comprises:

forming a deployment stage coupled to the moveable frame by a deployment flexure, the stage having opposite upper and lower surfaces;

providing a pair of snubs disposed in spaced opposition to each other, each snub having a resilient inclined motion converter disposed bilaterally symmetrical with respect to the motion converter of the other;

placing the lower surface of the deployment stage on an upper end of the motion converter of a lower one of the snubs; and

,

urging a lower end of the motion converter of an upper one of the snubs into contact with the upper surface of the deployment stage such that the deployment stage moves laterally and thereby causes the deployment flexure to urge the moveable frame to the deployed position.

16. The method of claim 7, wherein the moving comprises:

forming a deployment stage coupled to the moveable frame by a deployment flexure, the stage having a lateral surface;

providing top and bottom snubs, the bottom snub having a pillar upstanding therefrom, the pillar having a chamfered surface disposed at an upper end thereof and a lateral surface thereon;

placing the actuator device on an upper surface of the bottom snub such that the lateral surface of the deployment stage is disposed in opposition with the lateral surface of the pillar; and

,

urging the top snub downward and into contact with the chamfered surface of the pillar such that the bottom snub moves laterally, causing the lateral surface of the pillar to contact the opposing lateral surface of the deployment stage and to urge the deployment stage laterally, thereby causing the deployment flexure to urge the moveable frame to the deployed position.

17. The method of claim 7, wherein the moving comprises:

forming a deployment pad coupled to the moveable frame by a deployment flexure, the pad having a lateral surface;

providing a MEMS device having a laterally moveable stage with an upstanding deployment peg disposed thereon, the deployment peg having a lateral surface disposed in opposition to the lateral surface of the deployment pad; and

,

actuating the MEMS device such that the stage and deployment peg move laterally, causing the lateral surface of the deployment peg to contact the opposing lateral surface of the deployment pad and to urge the deployment pad laterally, thereby causing the deployment flexure to urge the moveable frame to the deployed position.

18. The method of claim 7, wherein the moving comprises:

forming a deployment pad coupled to the moveable frame by a deployment flexure, the pad having a lateral surface;

providing a fixture having a positive coefficient of thermal expansion and an upstanding deployment peg disposed thereon, the deployment peg having a lateral surface disposed in opposition to the lateral surface of the deployment pad; and

,

heating the fixture such that the fixture and the deployment peg expand laterally, causing the lateral surface of the deployment peg to contact the opposing lateral surface of the deployment pad and to urge the deployment pad laterally, thereby causing the deployment flexure to urge the moveable frame to the deployed position.

19. The method of claim 7, wherein the moving comprises:

forming a deployment pad coupled to the moveable frame by a deployment flexure, the pad having a lateral surface;

providing a fixed frame having a positive coefficient of thermal expansion and a lateral surface disposed in opposition to the lateral surface of the deployment pad; and

,

heating the frame such that the frame expands laterally, causing the lateral surface of the frame to contact the opposing lateral surface of the deployment pad and to urge the deployment pad laterally, thereby causing the deployment flexure to urge the moveable frame to the deployed position.

20. The method of claim 7, wherein the moving comprises:

forming a deployment pad coupled to the moveable frame by a deployment flexure, the pad having a lateral surface;

providing a fixture having a lateral surface disposed in opposition to the lateral surface of the deployment pad and an orifice extending laterally therethrough; and

,

applying a vacuum to the orifice in the fixture such that the lateral surface of the fixture is pulled laterally by the vacuum against the lateral surface of the deployment pad, causing the deployment pad to move laterally and the deployment flexure to urge the moveable frame to the deployed position.

21. The method of claim 7, wherein the moving comprises:

forming a deployment pad coupled to the moveable frame by a deployment flexure, the pad having a magnet disposed thereon; and

,

moving a magnetic field over the magnet on the deployment pad such that the deployment pad moves laterally, thereby causing the deployment flexure to urge the moveable frame to the deployed position.

22. The method of claim 7, wherein the moving comprises:

forming a deployment stage coupled to the moveable frame by a deployment flexure;

providing a stationary stage disposed adjacent to and spaced apart from the deployment stage; and

,

applying a voltages differential to the stationary and deployment stages such that the deployment stage moves laterally relative to the stationary stage and causes the deployment flexure to urge the moveable frame to the deployed position.

23. An actuator made in accordance with claim 7.

24. An electronic device incorporating the actuator of claim 23.

25. The electronic device of claim 24, wherein the electronic device comprises a camera, and wherein the actuator device comprises an element coupled to the moveable frame by a flexure for coplanar, rectilinear movement relative to the fixed and outer frames and for coplanar, rotational movement about a central axis of the element.