MEMS resonator

• US 8,803,624 B2
• Filed: 06/29/2012
• Issued: 08/12/2014
• Est. Priority Date: 07/06/2011
• Status: Active Grant

• Current Assignee: NXP B.V. (NXP Semiconductors NV)
• Original Assignee: NXP B.V. (NXP Semiconductors NV)
• Inventors: Phan Le, Kim
• Primary Examiner(s): Chang, Joseph
• Assistant Examiner(s): SHIN, JEFFREY M
• Application Number:
  US13/537,303
• Publication Number:
  US 20130009716A1
• Time in Patent Office: 774 Days
• Field of Search: 331/154, 331/116.M, 735/041.2, 735/041.3, 333/186, 333/199
• US Class Current: 331/154
• CPC Class Codes: H03H 9/2431 Ring resonators

Abstract

A MEMS resonator has a resonator mass in the form of a closed ring anchored at points around the ring. A set of ring comb electrode arrangements is fixed to the ring at locations between the anchor points, to couple the input (drive) and output (sense) signals to/from the resonator mass.

Claims

1. A MEMS resonator comprising:

a resonator mass in a form of a closed ring;

a set of anchor points spaced around the ring, where the ring is connected to a fixed substrate at the anchor points by arms that extend inwardly or outwardly from the ring, wherein each of the anchor points comprises a quasi-nodal point of a minimum movement of the ring during a resonant deformation of the ring;

a set of ring comb electrode arrangements fixed to the ring at anti-nodal points of the ring where a vibration amplitude is greatest during the resonant deformation of the ring;

at least one drive comb electrode arrangement attached to the substrate and which interfaces with one of the set of comb electrode arrangements fixed to the ring;

at least one sense comb electrode arrangement attached to the substrate and which interfaces with another one of the set of comb electrode arrangements fixed to the ring; and

a control circuit using feedback from the sense comb electrode for controlling signals applied to the at least one drive comb electrode arrangement such that the resonator mass vibrates as a resonator in response to the signals, wherein the resonator mass, the set of ring comb electrode arrangements, the at least one drive comb electrode arrangement and at least one sense comb electrode arrangement is symmetric around the anchor points, wherein the closed ring has a rest position shape and a deformed shape, and wherein the control circuit uses the feedback to cause the resonator mass to resonantly vibrate between the rest position shape and the deformed shape in response to the signals.

2. A resonator as claimed in claim 1, further comprising a set of exactly four ring comb electrode arrangements, exactly two drive comb electrode arrangements and exactly two sense comb electrode arrangements.

3. A resonator as claimed in claim 2, wherein the four ring comb electrode arrangements are evenly angularly spaced around the ring, the two drive comb electrode arrangements are diametrically opposite, and the two sense comb electrode arrangements are diametrically opposite.

4. A resonator as claimed in claim 1, wherein the ring comprises a circle.

5. A resonator as claimed in claim 1, wherein the ring comprises a square having a plurality of corners, and the anchor points are at at least one of the corners.

6. A resonator as claimed in claim 1, wherein the anchor points are connected to the substrate by arms which extend inwardly from the ring.

7. A resonator as claimed in claim 1, wherein the anchor points are connected to the substrate by arms which extend outwardly from the ring.

8. A resonator as claimed in claim 1, wherein each ring comb electrode arrangement, and each associated drive or sense comb electrode arrangement, comprise a first array of parallel comb fingers in a first line and a second connected array of parallel comb fingers in a second line, spaced from the first line in a direction of the comb fingers.

9. A resonator as claimed in claim 1, wherein each ring comb electrode arrangement is attached to the ring at a mid-point between nodal points of minimum movement of the ring during resonant deformation of the ring.

10. A resonator as claimed in claim 1, further comprising exactly four anchor points.

11. The resonator of claim 1, wherein the control circuit is configured to actuate the resonator mass using a combination of a DC voltage and an AC voltage.