Electromechanical systems device

• US 8,803,861 B2
• Filed: 02/23/2012
• Issued: 08/12/2014
• Est. Priority Date: 02/23/2012
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Kao, Tsongming, Leu, Charles, Djordjev, Kostadin, He, Rihui
• Primary Examiner(s): LEE, NICHOLAS J
• Application Number:
  US13/403,792
• Publication Number:
  US 20130222351A1
• Time in Patent Office: 901 Days
• Field of Search: None
• US Class Current: 345/205
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

This disclosure provides systems, methods and apparatus for EMS devices. In one aspect, an EMS device includes an array of display elements and a plurality of driver lines with at least a portion of the plurality of driver lines routed above or below the array between one or more driver circuits and the array. In some implementations, at least a portion of the plurality of driver lines is disposed above a non-active area of the array. In one aspect, an EMS device can form a portion of at least one of the plurality of driver lines. In some implementations, movable layers of the array can be disposed between at least a portion of the plurality of driver lines and stationary electrodes of the display.

Claims

1. An apparatus comprising:

an array of display elements defining an array footprint, the array of display elements including;

a plurality of movable layers extending in a first direction and a plurality of stationary electrodes extending in a second direction, the plurality of movable layers and stationary electrodes forming a portion of a plurality of the display elements;

a plurality of electrical connection pads, each connection pad disposed at an end of a movable layer; and

a plurality of driver lines each having a first end connected to a connection pad and a second end connectable to a driver circuit,

wherein at least a portion of the plurality of driver lines is routed within the array footprint above or below the array of display elements.

2. The apparatus of claim 1, wherein at least a portion of the plurality of driver lines is disposed above a non-active area of the array of display elements, and wherein the stationary electrodes are disposed between the movable layers and the portion of the plurality of driver lines disposed over the non-active area of the array of display elements.

3. The apparatus of claim 1, wherein at least a portion of the plurality of driver lines is disposed over an active area of the array of display elements.

4. The apparatus of claim 2, further comprising an electrically conductive optical mask structure disposed over the array of display elements and extending between at least some of the display elements to mask non-active areas of the display, wherein the optical mask structure forms a portion of at least one of the plurality of driver lines.

5. The apparatus of claim 4, wherein the optical mask structure includes a film stack including a conductive first reflective layer, a conductive second reflective layer, and a non-conductive layer disposed between the first reflective layer and the second reflective layer forms a portion of at least one of the plurality of driver lines.

6. The apparatus of claim 4, wherein the optical mask structure includes at least one non-conductive space to electrically isolate the at least one driver line formed by the optical mask structure from the rest of the optical mask structure.

7. The apparatus of claim 1, wherein the plurality of movable layers is disposed between the plurality of stationary electrodes and at least a portion of the plurality of driver lines.

8. The apparatus of claim 7, further comprising at least one passivation layer, wherein at least a portion of the plurality of driver lines is disposed over the at least one passivation layer.

9. The apparatus of claim 1, further comprising a driver circuit connected to the second end of the plurality of driver lines and configured to send signals to the movable layers through the plurality of driver lines.

10. The apparatus of claim 1, further comprising:

a processor that is configured to communicate with the array of display elements, the processor being configured to process image data; and

a memory device that is configured to communicate with the processor.

11. The apparatus of claim 10, further comprising:

a driver circuit configured to send at least one signal to the array of display elements; and

a controller configured to send at least a portion of the image data to the driver circuit.

12. The apparatus of claim 10, further comprising an image source module configured to send the image data to the processor, wherein the image source module includes at least one of a receiver, transceiver, and transmitter.

13. The apparatus of claim 12, further comprising an input device configured to receive input data and to communicate the input data to the processor.

14. An apparatus comprising:

an array of display elements defining an array footprint, the array of display elements including;

a plurality of movable layers extending in a first direction and a plurality of stationary electrodes extending in a second direction, the plurality of movable layers and stationary electrodes forming a portion of a plurality of the display elements;

a plurality of electrical connection pads, each connection pad disposed at an end of a movable layer; and

a plurality of means for electrically connecting each of the plurality of movable layers to a driver circuit, each electrical connection means being electrically connected to a connection pad and connectable to a driver circuit,

wherein at least a portion of the plurality of electrical connection means is routed within the array footprint above or below the array of display elements.

15. The apparatus of claim 14, wherein the plurality of electrical connection means include a plurality of driver lines each having a first end connected to a connection pad and a second end connectable to the driver circuit.

16. A method of manufacturing an apparatus, comprising:

forming an array of display elements defining an array footprint, wherein forming the array of display elements includes;

forming a plurality of movable layers extending in a first direction and a plurality of stationary electrodes extending in a second direction;

forming an electrical connection pad at an end of each movable layer; and

forming a plurality of driver lines each having a first end connected to a connection pad and a second end connectable to a driver circuit, wherein at least a portion of the driver lines passes within the array footprint above or below the array of display elements.

17. The method of claim 16, wherein at least a portion of the plurality of driver lines is formed above a non-active area of the array of display elements, and wherein the stationary electrode are disposed between the movable layers and the portion of the plurality of driver lines disposed over the non-active area of the array of display elements.

18. The method of claim 17, further comprising forming an electrically conductive optical mask structure over the array of display elements and extending between at least some of the display elements to mask non-active areas of the display, wherein forming the optical mask structure includes forming a portion of at least one of the plurality of driver lines.

19. The method of claim 18, wherein forming the optical mask structure includes forming a film stack including a conductive first reflective layer, a conductive second reflective layer, and a non-conductive layer disposed between the first reflective layer and the second reflective layer, and wherein forming the least one of the plurality of driver lines includes forming the first reflective layer or second reflective layer.

20. The method of claim 18, wherein forming the optical mask structure includes forming at least one non-conductive space to electrically isolate the at least one driver line formed by the optical mask structure from the rest of the optical mask structure.

21. The method of claim 16, wherein the plurality of movable layers is formed between the stationary electrodes and at least a portion of the plurality of driver lines.

22. The method of claim 16, further comprising electrically connecting the second ends of the plurality of driver lines to a driver circuit, the driver circuit being configured to send signals to the movable layers through the plurality of driver lines.

23. The method of claim 16, further comprising forming a sacrificial layer over the plurality of movable layers, and wherein forming the plurality of driver lines includes forming the portion of the driver lines that passes above or below the array of display elements over the sacrificial layer.

24. The method of claim 16, further comprising encapsulating the array of display elements between a first substrate and a second substrate.