Shutter disk having a tuned coefficient of thermal expansion

• US 8,807,075 B2
• Filed: 08/17/2009
• Issued: 08/19/2014
• Est. Priority Date: 09/22/2008
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Brown, Karl
• Primary Examiner(s): CHEN, KEATH T
• Application Number:
  US12/542,501
• Publication Number:
  US 20100071625A1
• Time in Patent Office: 1,828 Days
• Field of Search: 118/504, 156/345.3, 156/345.19
• US Class Current: 118/504
• CPC Class Codes: C23C 14/564 Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
• CPC Class Codes: H01J 37/3408 Planar magnetron sputtering
• CPC Class Codes: H01J 37/3447 Collimators, shutters, apertures

Abstract

A shutter disk having a tuned coefficient of thermal expansion is provided herein. In some embodiments, a shutter disk having a tuned coefficient of thermal expansion may include a body formed from a first material comprising at least two components, wherein a ratio of each of the at least two components to one another is selected to provide a coefficient of thermal expansion of the body that is substantially similar to a coefficient of thermal expansion of a second material to be deposited atop the body.

Claims

1. A shutter disk having a tuned coefficient of thermal expansion, comprising:

a body having a top surface, a bottom surface, and a peripheral surface coupling the top surface to the bottom surface, the bottom surface having an outer step adjacent the peripheral surface, an inner step adjacent the outer step, and an annular groove formed in the bottom surface, wherein the inner step is disposed radially inward of the outer step and the annular groove is disposed radially inward of the inner step, wherein a thickness of the body increases from the outer step to the inner step, wherein the body is formed from a first material comprising aluminum and silicon provided in a ratio of aluminum to silicon of about 1;

4 to about 7;

3, and wherein the ratio of aluminum to silicon provides coefficient of thermal expansion of the body that is substantially similar to a coefficient of thermal expansion of a second material comprising titanium (Ti) to be deposited atop the body.

2. The shutter disk of claim 1, wherein the coefficient of thermal expansion of the first material is about 5 to about 17 ppm/°

C.

3. The shutter disk of claim 1, wherein at least one of the top surface, bottom surface or peripheral surface is textured.

4. The shutter disk of claim 3, wherein at least one of the top surface, bottom surface or peripheral surface is textured to a roughness average of up to between about 600 to about 800 R_a.

5. The shutter disk of claim 1, wherein the first material is a spray formed composite material.

6. The shutter disk of claim 1, wherein the coefficient of thermal expansion of the second material is between about 9 to about 11 ppm/°

C.

7. A process chamber, comprising:

a chamber body defining an inner volume having a target comprising titanium (Ti) to be deposited atop a substrate disposed therein;

a substrate support disposed within the chamber body for supporting the substrate;

a shutter disk for protecting the substrate support, the shutter disk comprising a body having a top surface, a bottom surface and a peripheral surface coupling the top surface to the bottom surface, the bottom surface having an outer step adjacent the peripheral surface, an inner step adjacent the outer step, and an annular groove formed in the bottom surface, wherein the inner step is disposed radially inward of the outer step and the annular groove is disposed radially inward of the inner step, wherein a thickness of the body increases from the outer step to the inner step, wherein the body is formed from a composite material comprising aluminum and silicon provided in a ratio of aluminum to silicon of about 1;

4 to about 7;

3, and wherein the ratio of aluminum to silicon provides a coefficient of thermal expansion of the body that is substantially similar to a coefficient of thermal expansion of the titanium (Ti) to be deposited on the shutter disk; and

a transfer robot movably coupled to the chamber body for transferring the shutter disk to the substrate support.

8. The shutter disk of claim 7, wherein the coefficient of thermal expansion of the composite material is between about 5 to about 17 ppm/°

C.

9. The shutter disk of claim 7, wherein the composite material is a spray formed composite material.

10. The shutter disk of claim 7, wherein at least one of the top surface, bottom surface or peripheral surface is textured.

11. The shutter disk of claim 10, wherein at least one of the top surface, bottom surface or peripheral surface is textured to a roughness average of up to between about 600 to about 800 R_a.

12. The process chamber of claim 7, wherein the coefficient of thermal expansion of the materials to be deposited atop the substrate is between about 9 to about 11 ppm/°

C.