Method and apparatus for organic vapor printing
First Claim
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1. A method for printing a plurality of discrete film segments of substantially uniform thickness over a target print area, comprising:
- providing an array of multipore nozzles, wherein each multipore nozzle is fabricated to have a plurality of micropores arranged in a pattern and further wherein each multipore nozzle is configured to deposit a discrete film segment over the target print area;
directing a gas stream comprising a carrier gas carrying a vaporized material through the array of multipore nozzles, wherein the gas stream is divided into a plurality of micron-scale gas sub-streams by the plurality of micropores in the multipore nozzles, each gas sub-stream comprising the carrier gas carrying the vaporized material;
directing the gas sub-streams comprising the carrier gas carrying the vaporized material onto a substrate; and
condensing the vaporized material on the substrate to form a plurality of substantially solid discrete film segments;
wherein the plurality of micron-scale gas sub-streams from each multipore nozzle are positioned relative to each other to deposit a discrete film segment having a substantially uniform film thickness profile over the target print area.
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Abstract
In one embodiment, the disclosure relates to providing a first gas stream carrying vaporized material and depositing the vaporized material onto a substrate by directing a plurality of gas streams containing the vaporized material to a substrate, forming an gas curtain around the streams to prevent its dissemination beyond a target print area, and allowing the vaporized material to condense on the target print area. In another embodiment, heat is used to regulate the flow of the material and the thickness of the deposited layer.
130 Citations
19 Claims
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1. A method for printing a plurality of discrete film segments of substantially uniform thickness over a target print area, comprising:
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providing an array of multipore nozzles, wherein each multipore nozzle is fabricated to have a plurality of micropores arranged in a pattern and further wherein each multipore nozzle is configured to deposit a discrete film segment over the target print area; directing a gas stream comprising a carrier gas carrying a vaporized material through the array of multipore nozzles, wherein the gas stream is divided into a plurality of micron-scale gas sub-streams by the plurality of micropores in the multipore nozzles, each gas sub-stream comprising the carrier gas carrying the vaporized material; directing the gas sub-streams comprising the carrier gas carrying the vaporized material onto a substrate; and condensing the vaporized material on the substrate to form a plurality of substantially solid discrete film segments; wherein the plurality of micron-scale gas sub-streams from each multipore nozzle are positioned relative to each other to deposit a discrete film segment having a substantially uniform film thickness profile over the target print area. - View Dependent Claims (2, 3, 4, 5, 14, 15, 16, 17)
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6. A method for printing a plurality of discrete film segments of uniform thickness profile, comprising:
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providing a multipore nozzle having a plurality of fabricated micropores, the plurality of fabricated micropores comprising; a first set of micropores, said first set of micropores in fluid communication with a first gas stream comprising a carrier gas and a quantity of organic material that is carried by the carrier gas; and a second set of micropores, wherein the second set of micropores are proximal to the first set of micropores and in fluid communication with a second gas stream; directing the first gas stream through the first set of micropores, wherein the first gas stream is divided into a plurality of gas sub-streams by the first set of micropores, each gas sub-stream comprising the carrier gas carrying the organic material; forming a pattern of a plurality of discrete film segments over a target print area on a substrate, such that each of the plurality of film segments in the pattern is configured to define one of the colors red, green or blue in a color pixel suitable for use in an OLED display, wherein each of the plurality of discrete film segments in the pattern is formed in the target print area by; directing the gas sub-streams comprising the carrier gas carrying the organic material onto the target print area, wherein the gas sub-streams have a higher temperature than the substrate to thereby condense the organic material in the target print area; and directing the second gas stream through the second set of micropores to form auxiliary gas sub-streams that form a gas curtain about the gas sub-streams comprising the carrier gas carrying the organic material, wherein the gas curtain contacts the edge of the discrete film segment such that the discrete film segment is formed with a substantially sharp sidewall. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 18)
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19. A method for printing a plurality of discrete film segments having uniform thickness profiles, comprising:
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providing an array of multipore nozzles, each multipore nozzle having a plurality of fabricated micropores, the plurality of fabricated micropores comprising; a first set of micropores; and a second set of micropores, wherein the second set of micropores are proximal to the first set of micropores; directing a first gas stream through the first set of micropores in each multipore nozzle, the first gas stream comprising a carrier gas and a quantity of organic material that is carried by the carrier gas, wherein the first gas stream is divided into a plurality of gas sub-streams by the first set of micropores, each gas sub-stream comprising the carrier gas carrying the organic material; and forming a pattern of a plurality of discrete film segments over a target print area on a substrate, wherein the discrete film segments in the pattern are configured to define one of the colors red, green or blue in color pixel suitable for use in an OLED display, wherein each of the plurality of discrete film segments in the pattern is formed in the target print area by; directing the gas sub-streams from the multipore nozzles onto the target print area, wherein the gas sub-streams have a higher temperature than the substrate to thereby condense the organic material into a plurality of discrete film segments in the target print area; and directing a second gas stream through the second set of micropores in each multipore nozzle to form auxiliary sub-streams that form a gas curtain about the gas sub-streams comprising the carrier gas carrying the organic material from each on the multipore nozzles, wherein the gas curtains contact the edges of the discrete film segments such that the discrete film segments are formed with substantially sharp sidewalls.
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Specification