Fabrication of MOS device with schottky barrier controlling layer
First Claim
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1. A method of fabricating a semiconductor device, comprising:
- forming a gate trench in an epitaxial layer overlaying a semiconductor substrate;
depositing gate material in the gate trench;
forming a body;
forming a source;
forming an active region contact trench that extends through the source and the body into a drain;
forming a Schottky barrier controlling layer in the epitaxial layer in bottom region of the active region contact trench, wherein the Schottky barrier controlling layer does not extend substantially into the body; and
disposing a contact electrode within the active region contact trench.
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Abstract
Fabricating a semiconductor device includes: forming a gate trench in an epitaxial layer overlaying a semiconductor substrate; depositing gate material in the gate trench; forming a body; forming a source; forming an active region contact trench that extends through the source and the body into the drain; forming a Schottky barrier controlling layer in the epitaxial layer in bottom region of the active region contact trench; and disposing a contact electrode within the active region contact trench.
11 Citations
8 Claims
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1. A method of fabricating a semiconductor device, comprising:
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forming a gate trench in an epitaxial layer overlaying a semiconductor substrate; depositing gate material in the gate trench; forming a body; forming a source; forming an active region contact trench that extends through the source and the body into a drain; forming a Schottky barrier controlling layer in the epitaxial layer in bottom region of the active region contact trench, wherein the Schottky barrier controlling layer does not extend substantially into the body; and disposing a contact electrode within the active region contact trench. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification