Semiconductor method and device of forming a fan-out PoP device with PWB vertical interconnect units
First Claim
1. A method of making a semiconductor device, comprising:
- providing a carrier with a die attach area;
disposing a semiconductor die over the die attach area;
disposing a modular interconnect unit over the carrier in a peripheral region around the semiconductor die;
depositing an encapsulant over the carrier, semiconductor die, and modular interconnect unit;
removing a first portion of the encapsulant to expose the semiconductor die while leaving a second portion of the encapsulant over the modular interconnect unit;
removing the carrier; and
forming an interconnect structure over the semiconductor die or modular interconnect unit.
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0 Petitions
Accused Products
Abstract
A semiconductor device has a carrier with a die attach area. A semiconductor die is mounted to the die attach area with a back surface opposite the carrier. A modular interconnect unit is mounted over the carrier and around or in a peripheral region around the semiconductor die such that the modular interconnect unit is offset from the back surface of the semiconductor die. An encapsulant is deposited over the carrier, semiconductor die, and modular interconnect unit. A first portion of the encapsulant is removed to expose the semiconductor die and a second portion is removed to expose the modular interconnect unit. The carrier is removed. An interconnect structure is formed over the semiconductor die and modular interconnect unit. The modular interconnect unit includes a vertical interconnect structures or bumps through the semiconductor device. The modular interconnect unit forms part of an interlocking pattern around the semiconductor die.
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Citations
32 Claims
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1. A method of making a semiconductor device, comprising:
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providing a carrier with a die attach area; disposing a semiconductor die over the die attach area; disposing a modular interconnect unit over the carrier in a peripheral region around the semiconductor die; depositing an encapsulant over the carrier, semiconductor die, and modular interconnect unit; removing a first portion of the encapsulant to expose the semiconductor die while leaving a second portion of the encapsulant over the modular interconnect unit; removing the carrier; and forming an interconnect structure over the semiconductor die or modular interconnect unit. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of making a semiconductor device, comprising:
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providing a plurality of individual modular interconnect units; disposing a first individual modular interconnect unit of the plurality of individual modular interconnect units offset from a semiconductor die in a peripheral region around the semiconductor die; depositing an encapsulant over the semiconductor die and first individual modular interconnect unit; and removing the encapsulant to expose the semiconductor die. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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14. A method of making a semiconductor device, comprising:
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providing a semiconductor die; disposing a modular interconnect unit in a peripheral region around the semiconductor die and offset from the semiconductor die; and depositing an encapsulant over the semiconductor die and modular interconnect unit. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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21. A semiconductor device, comprising:
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a semiconductor die; a modular interconnect unit disposed in a peripheral region around the semiconductor die with a height of the modular interconnect unit less than a height of the semiconductor die; and an encapsulant deposited around the semiconductor die and modular interconnect unit. - View Dependent Claims (22, 23, 24, 25, 26)
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27. A method of making a semiconductor device, comprising:
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providing a modular interconnect unit including a vertical interconnect structure; and disposing a semiconductor die around the modular interconnect unit. - View Dependent Claims (28, 29, 30, 31, 32)
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Specification