Dimensional probe and methods of use
First Claim
1. A surface sensing apparatus, said apparatus comprising:
- at least one source of coherent radiation capable of outputting at least one wavelength emission to create a first illumination state and to illuminate a surface to create a first speckle pattern;
an emission deviation facility capable of influencing the emission to illuminate the surface to create a second illumination state, a second speckle pattern and a speckle shift; and
at least one sensor capable of sensing a representation of the first and a second speckle intensity from the first and second speckle pattern.
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Abstract
Disclosed is a surface sensing apparatus, one embodiment having a source of coherent radiation capable of outputting wavelength emissions to create a first illumination state to illuminate a surface and create a first speckle pattern, an emission deviation facility capable of influencing the emission to illuminate the surface and create a second illumination state and a second speckle pattern, and a sensor capable of sensing a representation of the first and a second speckle intensity from the first and second speckle pattern. Also disclosed are methods of sensing properties of the surface, one embodiment comprising the steps of illuminating the surface having a first surface state with the source of coherent radiation emission, sensing a first speckle intensity from the surface, influencing a relationship of the surface to the emission to create a second surface state and sensing a second speckle intensity from the surface at the second surface state.
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Citations
24 Claims
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1. A surface sensing apparatus, said apparatus comprising:
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at least one source of coherent radiation capable of outputting at least one wavelength emission to create a first illumination state and to illuminate a surface to create a first speckle pattern; an emission deviation facility capable of influencing the emission to illuminate the surface to create a second illumination state, a second speckle pattern and a speckle shift; and at least one sensor capable of sensing a representation of the first and a second speckle intensity from the first and second speckle pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A surface sensing apparatus, said apparatus comprising:
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at least one source of coherent radiation capable of outputting at least one wavelength emission to illuminate a surface; a relative position of the surface and the emission being variable to create a first surface state and second surface state, each surface state having a speckle pattern; the relative position of the surface and the emission being variable to create a speckle shift; and at least one sensor capable of sensing a representation of a first and a second speckle intensity from the first and second speckle pattern. - View Dependent Claims (9, 10, 11, 12)
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13. A method of sensing properties of a surface, said method comprising:
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illuminating a surface with at least one source of coherent radiation emission with a first illumination state; sensing a first speckle intensity from the surface from the first illumination state; influencing the emission to create a second illumination state; sensing a second speckle intensity from the surface from the second illumination state; and determining a speckle shift between the first and second speckle intensity. - View Dependent Claims (14, 15, 16, 17)
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18. A method of sensing properties of a surface, said method comprising:
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illuminating a surface with at least one source of coherent radiation emission; the surface having a first surface state; sensing a first speckle intensity from the surface at the first surface state; influencing a relationship of the surface to the emission to create a second surface state; sensing a second speckle intensity from the surface at the second surface state; and determining at least one surface parameter using a speckle shift between the first and second surface state. - View Dependent Claims (19, 20, 21, 22, 24)
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23. A method of creating a plurality of speckle patterns, the method comprising the steps of:
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illuminating a surface with at least one source of coherent radiation emission with a first illumination state having a waist to create a first speckle pattern; and influencing the emission to create a second illumination state having a second waist, a second speckle pattern and a speckle shift.
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Specification