Microspeaker with piezoelectric, metal and dielectric membrane

• US 8,811,636 B2
• Filed: 11/29/2011
• Issued: 08/19/2014
• Est. Priority Date: 11/29/2011
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Stephanou, Philip Jason, Burns, David William, Shenoy, Ravindra V.
• Primary Examiner(s): Ni, Suhan
• Application Number:
  US13/306,397
• Publication Number:
  US 20130136280A1
• Time in Patent Office: 994 Days
• Field of Search: 381/151, 381/190, 381/191, 381/431
• US Class Current: 381/190
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G06F 1/1626 with a single-body enclosure integrating a flat display, e.g. Personal Digital Assistants [PDAs]
• CPC Class Codes: G06F 1/1637 Details related to the display arrangement, including those related to the mounting of the display in the housing
• CPC Class Codes: H04R 17/00 Piezoelectric transducers; Electrostrictive transducers piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners H10N30/00
• CPC Class Codes: H04R 2201/003 Mems transducers or their use
• CPC Class Codes: H04R 2201/401 2D or 3D arrays of transducers
• CPC Class Codes: H04R 2499/15 Transducers incorporated in visual displaying devices, e.g. televisions, computer displays, laptops
• CPC Class Codes: H04R 31/00 Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor manufacture of microstructural arrangements of deformable or non-deformable structures in general B81C1/00182
• CPC Class Codes: H10N 30/07 Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
• CPC Class Codes: H10N 30/40 with electrical input and electrical output, e.g. functioning as transformers
• CPC Class Codes: H10N 30/80 Constructional details
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

This disclosure provides systems, methods and apparatus for microspeaker devices. In one aspect, a microspeaker element may include a deformable dielectric membrane that spans a speaker cavity. The deformable dielectric membrane can include a piezoactuator and a dielectric layer. Upon application of a driving signal to the piezoactuator, the dielectric layer can deflect, producing sound. In some implementations, an array of microspeaker elements can be encapsulated between a glass substrate and a cover glass. Sound generated by the microspeaker elements can be emitted through a speaker grill formed in the cover glass.

Claims

1. An apparatus comprising:

a substrate;

a deformable membrane; and

a speaker cavity disposed between the substrate and the deformable membrane such that the deformable membrane spans the speaker cavity, wherein the speaker cavity is a sealed speaker cavity that it is enclosed on all sides,

the deformable membrane including a first piezoelectric layer sandwiched between first and second metal layers and including a dielectric layer, wherein the dielectric layer is configured to deform on application of a drive voltage across the first piezoelectric layer.

2. The apparatus of claim 1, wherein the dielectric layer includes at least one of an oxide, nitride or oxynitride material.

3. The apparatus of claim 1, wherein the first piezoelectric layer is disposed between the dielectric layer and the substrate.

4. The apparatus of claim 1, wherein the first piezoelectric layer spans the speaker cavity.

5. The apparatus of claim 1, wherein the first piezoelectric layer is centered over the speaker cavity.

6. The apparatus of claim 1, wherein the first piezoelectric layer overlies a peripheral region of the speaker cavity.

7. The apparatus of claim 1, wherein the deformable membrane further includes a second piezoelectric layer sandwiched between third and fourth metal layers.

8. The apparatus of claim 7, wherein the first and second piezoelectric layers are located on opposite sides of the dielectric layer.

9. The apparatus of claim 1, wherein the first piezoelectric layer includes aluminum nitride.

10. The apparatus of claim 1, wherein the substrate is a glass substrate.

11. The apparatus of claim 1, wherein dimensions of the apparatus include one or more of the following:

a speaker cavity thickness between about 1 and 5 microns, a dielectric layer thickness between about 1 and 10 microns, or a first piezoelectric layer thickness between about 1 and 3 microns.

12. The apparatus of claim 1, wherein the first and second metal layers are each about 100 to 3000 Angstroms thick.

13. The apparatus of claim 1, further comprising an acoustic cavity formed in the substrate, wherein the acoustic cavity is connected to the speaker cavity.

14. The apparatus of claim 1, wherein the deformable membrane is configured to generate sound on application of the drive voltage across the first piezoelectric layer.

15. The apparatus of claim 1, further comprising:

a display;

a processor that is configured to communicate with the display, the processor being configured to process image data; and

a memory device that is configured to communicate with the processor.

16. The apparatus of claim 15, further comprising:

a driver circuit configured to send at least one signal to the display; and

a controller configured to send at least a portion of the image data to the driver circuit.

17. The apparatus of claim 15, further comprising:

an image source module configured to send the image data to the processor, wherein the image source module includes at least one of a receiver, transceiver, and transmitter.

18. The apparatus of claim 15, further comprising:

an input device configured to receive input data and to communicate the input data to the processor.

19. The apparatus of claim 1, wherein the substrate is a first glass substrate, the deformable membrane and the speaker cavity are part of a piezoactuated microspeaker element in an array of piezoactuated microspeaker elements between the first glass substrate and a second glass substrate joined to the first glass substrate, the second glass substrate including one or more acoustic ports disposed over the array.

20. An apparatus comprising:

an array of piezoactuated microspeaker elements between first and second joined glass substrates;

each piezoactuated microspeaker element including a speaker cavity and a deformable membrane spanning the speaker cavity, the deformable membrane including a first piezoelectric layer sandwiched between first and second metal layers and including a dielectric layer, wherein the dielectric layer is configured to deform on application of a drive voltage across the piezoelectric layer; and

the second glass substrate including one or more acoustic ports such that the acoustic ports are disposed over the array.

21. The apparatus of claim 20, further comprising an integrated circuit device positioned in a cavity between the first and second glass substrates, the integrated circuit configured to drive the piezoactuated microspeaker elements.

22. The apparatus of claim 20, wherein the array is configured to connect to an external integrated circuit device.

23. The apparatus of claim 20, wherein the joined glass substrates are configured to attach to a flexible connector.

24. The apparatus of claim 20, wherein the dielectric layer of each piezoactuated microspeaker element is configured to generate sound on application of the drive voltage across the piezoelectric layer.

25. An apparatus comprising:

a substrate;

a deformable membrane; and

a speaker cavity disposed between the substrate and the deformable membrane such that the deformable membrane spans the speaker cavity, wherein the speaker cavity is defined only by the substrate and the deformable membrane and wherein at least the portion of the substrate that defines the speaker cavity is planar,

the deformable membrane including a first piezoelectric layer sandwiched between first and second metal layers and including a dielectric layer, wherein the dielectric layer is configured to deform on application of a drive voltage across the first piezoelectric layer.

26. The apparatus of claim 25, wherein the deformable membrane is configured to generate sound on application of the drive voltage across the first piezoelectric layer.

27. The apparatus of claim 25, wherein the speaker cavity is open to ambient.