Method and apparatus to automatically create virtual sensors with templates
First Claim
1. A method to automatically provide a virtual sensor in real-time, comprising:
- providing a plurality of virtual sensor templates to a display on a computer system, the plurality of virtual sensor templates include different types of data tags and associated parameters of process recipes;
selecting, based on user input received with the computer system, one or more virtual sensor templates from a plurality of virtual sensor templates, each virtual sensor template including the one or more selected virtual sensor templates having an algorithm to provide a desired functionality including at least one of fault detection, error detection, and process monitoring in real-time during data collection for semiconductor manufacturing;
selecting, with the computer system, at least one parameter to configure the one or more selected virtual sensor templates; and
automatically creating a first virtual sensor configured from the one or more selected virtual sensor templates.
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Abstract
A method and apparatus for automatically providing a virtual sensor have been described. In one embodiment, a method for automatically providing a virtual sensor includes receiving a plurality of virtual sensor templates from a server. The method further includes selecting a virtual sensor template from the plurality of virtual sensor templates. The selected virtual sensor template has an algorithm to provide a desired functionality. The method further includes selecting at least one parameter to configure the selected virtual sensor template. The method further includes automatically creating a virtual sensor associated with the selected virtual sensor template.
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Citations
18 Claims
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1. A method to automatically provide a virtual sensor in real-time, comprising:
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providing a plurality of virtual sensor templates to a display on a computer system, the plurality of virtual sensor templates include different types of data tags and associated parameters of process recipes; selecting, based on user input received with the computer system, one or more virtual sensor templates from a plurality of virtual sensor templates, each virtual sensor template including the one or more selected virtual sensor templates having an algorithm to provide a desired functionality including at least one of fault detection, error detection, and process monitoring in real-time during data collection for semiconductor manufacturing; selecting, with the computer system, at least one parameter to configure the one or more selected virtual sensor templates; and automatically creating a first virtual sensor configured from the one or more selected virtual sensor templates. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A non-transitory machine-accessible medium including data that, when accessed by a machine, cause the machine to perform a method comprising:
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providing a plurality of virtual sensor templates to a display on a computer system, the plurality of virtual sensor templates include different types of data tags and associated parameters of process recipes; selecting, based on user input, one or more selected virtual sensor templates from a plurality of virtual sensor templates, each virtual sensor template including the one or more selected virtual sensor templates having an algorithm to provide a desired functionality including at least one of fault detection, error detection, and process monitoring in real-time during data collection for semiconductor manufacturing; selecting, with the computer system, at least one parameter to configure the one or more selected virtual sensor templates; and automatically creating a first virtual sensor configured from the one or more selected virtual sensor templates. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification