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Methods and apparatus for insitu analysis of gases in electronic device fabrication systems

  • US 8,813,538 B2
  • Filed: 09/20/2011
  • Issued: 08/26/2014
  • Est. Priority Date: 07/31/2006
  • Status: Expired due to Fees
First Claim
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1. A method for testing a sample gas comprising:

  • adjusting a pressure level of a sample gas; and

    determining a composition of the adjusted sample gas;

    wherein the adjusting includes adjusting the pressure level from a low pressure at which measurement by spectroscopy would not be accurate to a higher pressure within a high enough suitable range at which the composition of the sample gas is capable of being accurately determined by spectroscopy; and

    wherein adjusting the pressure level includes;

    adding additional sample gas to the sample gas in an isolatable chamber; and

    controlling a booster pump and a variable outlet orifice.

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