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MEMS multi-axis gyroscope with central suspension and gimbal structure

  • US 8,813,564 B2
  • Filed: 01/31/2013
  • Issued: 08/26/2014
  • Est. Priority Date: 09/18/2010
  • Status: Active Grant
First Claim
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1. A microelectromechanical die for sensing motion, comprising:

  • a fixed portion;

    an anchor coupled to the fixed portion;

    a first nonlinear suspension member coupled to anchor on a first side of the anchor;

    a second nonlinear suspension member coupled to the anchor on the first side of the anchor, the second nonlinear suspension member having a shape and location mirroring the first nonlinear suspension member about an anchor bisecting plane, wherein the first nonlinear suspension member and the second nonlinear suspension member are part of an inner gimbal of the microelectromechanical die; and

    a proof-mass that is planar, the proof-mass suspended by a first suspension member disposed on a first side of the anchor and a second suspension member disposed on a second side of the anchor opposite the first side, with the die defining a first gap extending along a first side of the anchor and a second gap extending along a second side of the anchor, opposite the first side, with each of the first gap and the second gap extending between the inner gimbal and the proof-mass,wherein the inner gimbal is supported at least in part by the first nonlinear suspension member and the second nonlinear suspension member such that the proof-mass is rotatable about the anchor and is slideable in a plane parallel to the fixed portion.

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