Electron beam writing apparatus and electron beam writing method

• US 8,816,276 B2
• Filed: 02/15/2013
• Issued: 08/26/2014
• Est. Priority Date: 02/16/2012
• Status: Active Grant

• Current Assignee: NuFlare Technology, Inc. (Toshiba Corporation)
• Original Assignee: NuFlare Technology, Inc. (Toshiba Corporation)
• Inventors: Touya, Takanao, Nakayama, Takahito
• Primary Examiner(s): Wells, Nikita
• Application Number:
  US13/768,327
• Publication Number:
  US 20130214172A1
• Time in Patent Office: 557 Days
• Field of Search: 250/306, 250/307, 250/310, 250/396.R, 250/492.22, 250/492.3
• US Class Current: 250/306
• CPC Class Codes: H01J 2237/12 electrostatic
• CPC Class Codes: H01J 2237/31776 Shaped beam
• CPC Class Codes: H01J 37/09 Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
• CPC Class Codes: H01J 37/3007 Electron or ion-optical systems electron or ion-optical details H01J37/06 - H01J37/153

Abstract

An electron beam writing apparatus comprising a XY stage that a sample is placed on, an electron optical column, an electron gun emitting an electron beam disposed in the optical column, an electrostatic lens provided with electrodes aligned in an axial direction of the electron beam disposed in the optical column, wherein a shield plate is disposed between the XY stage and the electron optical column to block reflected electrons or secondary electrons generated by irradiation to the sample with the electron beam. The electrostatic lens is disposed immediately above the shield plate to change a focal position of the electron beam. A voltage supply device applies a negative voltage constantly to the electrostatic lens.

Claims

1. An electron beam writing apparatus comprising a control unit and a writing unit having an electron optical column and a writing chamber, comprising;

a stage on which a sample is placed in the writing unit;

an electron gun unit, which is disposed in the electron optical column, configured to emit an electron beam;

a shield plate, which is disposed between the stage and the electron optical column, configured to reduce reflected electrons or secondary electrons generated by irradiation to the sample with the electron beam from entering the electron optical column; and

an electrostatic lens positioned in an axial direction of the electron beam in the electron optical column,

wherein the electrostatic lens is disposed immediately above the shield plate and is supplied with negative voltage, from a voltage supply device, constantly during writing patterns on the sample, and is configured to block the reflected electrons or the secondary electrons from entering the electron optical column.

2. The electron beam writing apparatus according to claim 1, wherein a negative voltage in a range between 0 V and −

250 V is applied from the voltage supply device to the electrostatic lens.

3. The electron beam writing apparatus according to claim 2, wherein a negative voltage between −

100 V and −

200 V on average is applied from the voltage supply device to the electrostatic lens.

4. The electron beam writing apparatus according to claim 1, further comprising:

a first aperture for shaping the electron beam that has been emitted from the electron gun;

a second aperture further shaping the electron beam that has passed through the first aperture;

an illumination lens illuminating the first aperture with the electron beam;

a projection lens projecting to the second aperture the electron beam that has passed through the first aperture; and

an objective lens focusing the electron beam that has passed through the second aperture, wherein

the illumination lens, the projection lens, and the objective lens are all electromagnetic type lenses, and

the electrostatic lens is disposed between the objective lens and the shield plate.

5. An electron beam writing apparatus comprising a control unit and a writing unit having an electron optical column and a writing chamber, comprising;

a stage on which a sample is placed in the writing unit;

an electron gun unit, which is disposed in the electron optical column, configured to emit an electron beam;

a shield plate, which is disposed between the stage and the electron optical column, configured to reduce reflected electrons or secondary electrons generated by irradiation to the sample with the electron beam from entering the electron optical column;

an electrostatic lens aligned in an axial direction of the electron beam in the electron optical column, wherein the electrostatic lens is disposed immediately above the shield plate; and

a retarding electrode disposed immediately above the electrostatic lens and supplied with negative voltage constantly, from a voltage supply device, during writing patterns on the sample, and is configured to block the reflected electrons or the secondary electrons from entering the electron optical column.

6. The electron beam writing apparatus according to claim 5, wherein the voltage supply device continues to apply a constant negative voltage to the retarding electrode.

7. The electron beam writing apparatus according to claim 5, further comprising:

a first aperture for shaping the electron beam that has been emitted from the electron gun;

a second aperture further shaping the electron beam that has passed through the first aperture;

an illumination lens illuminating the first aperture with the electron beam;

a projection lens projecting to the second aperture the electron beam that has passed through the first aperture; and

an objective lens focusing the electron beam that has passed through the second aperture, wherein

the illumination lens, the projection lens, and the objective lens are all electromagnetic type lenses, and

the electrostatic lens is disposed between the objective lens and the shield plate.

8. The electron beam writing apparatus according to claim 5, further comprising:

a deflector disposed in the electron optical column for deflecting the electron beam to a predetermined position; and

an insulating plate disposed between the deflector and the retarding electrode.

9. An electron beam writing method comprising:

writing a predetermined pattern on a sample placed on a stage by emitting an electron beam from an electron gun disposed in an electron optical column, wherein

a negative voltage is constantly applied to an electrostatic lens for changing a focal position of the electron beam or a retarding electrode disposed immediately above the electrostatic lens, during the writing of the predetermined pattern on the sample to block reflected electrons or secondary electrons generated by irradiation to the sample with the electron beam from entering the electron optical column.

10. The electron beam writing method according to claim 9, wherein a shield plate is disposed between the stage and the electron optical column to reduce the reflected electrons or the secondary electrons from entering the electron optical column.

11. The electron beam writing method according to claim 9,

wherein the electron beam that has been emitted from the electron gun to a first aperture is illuminated by a illumination lens, and the method further comprises

projecting the electron beam that has passed through the first aperture to a second aperture by a projection lens;

focusing the electron beam that has passed through the second aperture by an objective lens; and

irradiating the electron beam that has passed through the objective lens on the sample through the electrostatic lens.

12. The electron beam writing method according to claim 9,

wherein a negative voltage in a range between 0 V and −

250 V is applied to the electrostatic lens.

13. The electron beam writing method according to claim 12,

wherein a negative voltage between −

100 V and −

200 V on average is applied to the electrostatic lens.