Cooling arrangement and lithographic apparatus comprising a resilient wall creating a gap between a detector module housing and a heat sink of the cooling arrangement

• US 8,817,228 B2
• Filed: 03/30/2010
• Issued: 08/26/2014
• Est. Priority Date: 04/13/2009
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Knarren, Bastiaan Andreas Wilhelmus Hubertus, Turk, Raymond, Kooiker, Allard Eelco, Boonen, Nico Antonius Hubertus Johannes
• Primary Examiner(s): LIU, CHIA HOW MICHAEL
• Application Number:
  US12/750,337
• Publication Number:
  US 20100259734A1
• Time in Patent Office: 1,610 Days
• Field of Search: 355/30, 355/55, 355/53
• US Class Current: 355/30
• CPC Class Codes: G03B 27/52 Details
• CPC Class Codes: G03F 7/70825 Mounting of individual elements, e.g. mounts, holders or supports workpiece or mask holders G03F7/707
• CPC Class Codes: G03F 7/7085 Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
• CPC Class Codes: G03F 7/70858 Environment aspects, e.g. pressure of beam-path gas, temperature pollution aspects G03F7/70916
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A cooling arrangement is described and includes a heat sink having a first thermal contact surface, an object having a second thermal contact surface and a resilient wall. The first thermal contact surface and the second thermal contact surface face each other and define a gap. The resilient wall is part of an enclosure that surrounds a space at least comprising the gap, and the cooling arrangement includes a facility to maintain a pressure difference between the space and an environment of the cooling arrangement. Additionally, a lithographic apparatus comprising such a cooling arrangement is described.

Claims

1. A cooling arrangement comprising:

a detector module comprising a detector and a housing partially enclosing the detector, wherein the housing has a first thermal contact surface;

a heat sink having a second thermal contact surface facing the first thermal contact surface; and

a resilient wall configured to create a gap between the first thermal contact surface and the second thermal contact surface, and surrounding the heat sink and a space at least comprising the gap, and

wherein the cooling arrangement is configured to maintain a pressure difference between said space and an environment of the cooling arrangement and to transport heat from the first thermal contact surface to the second thermal contact surface to thereby cool the detector module.

2. A cooling arrangement according to claim 1, wherein the space is filled with a gas.

3. A cooling arrangement according to claim 1, wherein the space is configured to receive a gas.

4. A cooling arrangement according to claim 1, wherein the resilient wall is a bellows.

5. A cooling arrangement according to claim 1, wherein the resilient wall has a first end coupled to at least one of the housing of the detector module and the heat sink, and a second end configured to contact the other one of the at least one of the housing of the detector module and the heat sink to define the gap.

6. A cooling arrangement according to claim 5, wherein the second end comprises a sealing ring configured to contact the other one of the at least one of the housing of the detector module and the heat sink.

7. A cooling arrangement according to claim 6, wherein the sealing ring is provided with an opening.

8. A cooling arrangement according to claim 7, wherein the opening is formed by at least one groove on surface that contacts the other one of the at least one of the housing of the detector module and the heat sink.

9. A cooling arrangement according to claim 1, wherein the detector module is configured to receive radiation, and wherein the first thermal contact surface is on a side of the housing of the detector module opposite of a side of the housing of the detector module configured to receive the radiation.

10. A cooling arrangement according to claim 9, wherein the resilient wall contacts the first thermal contact surface.

11. A cooling arrangement according to claim 1, wherein the housing of the detector module comprises a first body and a separate second body thermally coupled to the first body, the first body comprising an outer surface defining the first thermal contact surface.

12. A cooling arrangement according to claim 11, wherein the detector is positioned within a cavity defined by the first and second bodies.

13. A cooling arrangement according to claim 12, wherein the detector module is configured to receive radiation, and wherein the detector is coupled to an outside surface of the second body on a side of the housing of the detector module configured to receive the radiation.

14. A cooling arrangement according to claim 12, wherein the detector is coupled to an inside surface of the first body.

15. A lithographic apparatus comprising:

an imaging system configured to direct electromagnetic radiation at an object plane so as to illuminate the object plane;

a first grating positioned in the object plane;

a projection optical system configured to project an image of the first grating onto a focal plane; and

a cooling arrangement comprising;

a detector module comprising a detector and a housing partially enclosing the detector, wherein the housing has a first thermal contact surface;

a heat sink haying a second thermal contact surface facing the first thermal contact surface; and

a resilient wall configured to create gap between the first thermal contact surface and the second thermal contact surface, and surrounding the heat sink and a space at least comprising the gap,

wherein the cooling arrangement is configured to maintain a pressure difference between said space and an environment of the cooling arrangement and to transport heat from the first thermal contact surface to the second thermal contact surface to thereby cool the detector module, and

wherein the detector module is configured to receive the image projected by the projection optical system.

16. A method of cooling a detector module, the detector module comprising a detector and a housing partially enclosing the detector, wherein the housing has a first thermal contact surface, the method comprising:

mounting the detector module to a cooling device comprising;

a heat sink having a second thermal contact surface facing the first thermal contact surface; and

a resilient wall configured to create a gap between the first thermal contact surface and the second thermal contact surface, and surrounding the heat sink and a space at least comprising the gap;

maintaining a pressure difference between the space and an environment of the cooling arrangement; and

transport heat from the first thermal contact surface to the second thermal contact surface to thereby cool the detector module.

17. A method of measuring a wavefront, the method comprising;

directing electromagnetic radiation to an object plane so as to illuminate the object plane;

projecting an image of a first grating positioned in the object plane onto a focal plane at a detector module, the detector module comprising a detector and a housing partially enclosing the detector, wherein the housing has a first thermal contact surface; and

arranging the first thermal contact surface proximate to and facing a second thermal contact surface of a heat sink such that a gap is formed between the first thermal contact surface and the second thermal contact surface;

arranging a resilient wall to surround the heat sink and a space at least comprising the gap;

maintaining a pressure difference between the space and an environment external to the resilient wall; and

measuring the wavefront at the focal plane;

wherein heat from the first thermal contact surface is transported to the second thermal contact surface to cool the detector module.