Semiconductor device and method for manufacturing the semiconductor device
First Claim
1. A method for manufacturing a semiconductor device, comprising the steps of:
- forming a gate electrode layer over a substrate;
forming a gate insulating layer comprising an oxide over the gate electrode layer;
performing a first oxygen radical treatment on a surface of the gate insulating layer;
forming an oxide semiconductor layer over the gate insulating layer after the first oxygen radical treatment;
performing a second oxygen radical treatment on a surface of the oxide semiconductor layer; and
forming an insulating film on the oxide semiconductor layer after the second oxygen radical treatment.
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Abstract
An object is to provide favorable interface characteristics of a thin film transistor including an oxide semiconductor layer without mixing of an impurity such as moisture. Another object is to provide a semiconductor device including a thin film transistor having excellent electric characteristics and high reliability, and a method by which a semiconductor device can be manufactured with high productivity. A main point is to perform oxygen radical treatment on a surface of a gate insulating layer. Accordingly, there is a peak of the oxygen concentration at an interface between the gate insulating layer and a semiconductor layer, and the oxygen concentration of the gate insulating layer has a concentration gradient. The oxygen concentration is increased toward the interface between the gate insulating layer and the semiconductor layer.
156 Citations
19 Claims
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1. A method for manufacturing a semiconductor device, comprising the steps of:
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forming a gate electrode layer over a substrate; forming a gate insulating layer comprising an oxide over the gate electrode layer; performing a first oxygen radical treatment on a surface of the gate insulating layer; forming an oxide semiconductor layer over the gate insulating layer after the first oxygen radical treatment; performing a second oxygen radical treatment on a surface of the oxide semiconductor layer; and forming an insulating film on the oxide semiconductor layer after the second oxygen radical treatment. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for manufacturing a semiconductor device, comprising the steps of:
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forming a gate electrode layer over a substrate; forming a gate insulating layer comprising an oxide over the gate electrode layer; performing an oxygen radical treatment on a surface of the gate insulating layer; forming an oxide semiconductor layer over the gate insulating layer after the oxygen radical treatment; and forming an insulating film on the oxide semiconductor layer. - View Dependent Claims (9, 10, 11, 12)
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13. A method for manufacturing a semiconductor device, comprising the steps of:
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forming a gate electrode layer over a substrate; forming a gate insulating layer over the gate electrode layer; forming an oxide semiconductor layer over the gate insulating layer; performing an oxygen radical treatment on a surface of the oxide semiconductor layer; and forming an insulating film on the oxide semiconductor layer after the oxygen radical treatment, wherein the oxygen radical treatment is performed by using ozone. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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Specification