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Method for reducing forming voltage in resistive random access memory

  • US 8,822,265 B2
  • Filed: 11/09/2012
  • Issued: 09/02/2014
  • Est. Priority Date: 10/06/2011
  • Status: Expired due to Fees
First Claim
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1. A method for producing resistive switching elements, the method comprising:

  • depositing a first electrode onto a substrate;

    depositing a first resistive switching film onto the first electrode,wherein the first resistive switching film comprises a first dielectric material configured to develop conductive pathways during application of a predetermined voltage and further configured to maintain said conductive pathways after said predetermined voltage is removed,wherein depositing the first resistive switching film does not cause formation of an interfacial oxide layer on the first electrode;

    depositing a second electrode; and

    further comprising depositing a second resistive switching film onto the first resistive switching film prior to depositing the second electrode, wherein the first resistive switching film and the second resistive switching film form a stack, the stack being configured to develop conductive pathways during application of a predetermined voltage and further configured to maintain said conductive pathways after said predetermined voltage is removed.

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