Commutation of an electromagnetic propulsion and guidance system

• US 8,823,294 B2
• Filed: 06/27/2007
• Issued: 09/02/2014
• Est. Priority Date: 06/27/2007
• Status: Active Grant

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: Hosek, Martin, Moura, Jairo Terra, Hofmeister, Christopher
• Primary Examiner(s): Chan, Kawing
• Application Number:
  US11/769,688
• Publication Number:
  US 20090001907A1
• Time in Patent Office: 2,624 Days
• Field of Search: 318/115, 318/244, 318/542, 318/733, 318/738
• US Class Current: 318/115
• CPC Class Codes: F16C 2380/26 Dynamo-electric machines or combinations therewith, e.g. electro-motors and generators in general H02K
• CPC Class Codes: F16C 32/0493 integrated in an electrodynamic machine, e.g. self-bearing motor
• CPC Class Codes: F16C 41/008 Identification means, e.g. markings, RFID-tags; Data transfer means
• CPC Class Codes: H02P 2209/07 Trapezoidal waveform
• CPC Class Codes: H02P 6/15 Controlling commutation time

Abstract

A method of commutating a motor includes calculating an adjustment electrical angle, and utilizing the adjustment electrical angle in a common set of commutation equations so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor.

Claims

1. A method of commutating a motor comprising:

calculating an electrical angle offset;

applying the electrical angle offset to an electrical angle in a common set of commutation equations for a three phase motor for producing a one dimensional force so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor; and

varying the electrical angle offset as applied within the common set of commutation equations to control the three phase motor so that both of the two dimensional forces produced by the motor are independently controllable.

2. The method of claim 1, wherein the electrical angle offset is determined from one or more measured position coordinates of a platen of the motor and desired motor forces in one or more directions.

3. The method of claim 1, further comprising applying the electrical angle offset to the electrical angle in the common set of commutation equations so that the two dimensional forces in the motor include Maxwell forces.

4. The method of claim 1, further comprising applying the electrical angle offset in the common set of commutation equations so that the common set of commutation equations is capable of producing three dimensional forces in the motor.

5. The method of claim 4, further comprising applying the electrical angle offset in the common set of commutation equations so that the three dimensional forces in the motor include Maxwell forces.

6. The method of claim 1, further comprising utilizing a winding phase current in combination with the electrical angle offset in the common set of commutation equations.

7. The method of claim 1, further comprising selecting a predetermined parameter relating forces generated by one or more winding sets of the motor, by utilizing a maximum rated force of the one or more winding sets of the motor.

8. The method of claim 7, wherein the maximum rated force of at least one of the one or more winding sets is determined using back electromotive force, and motor speed.

9. The method of claim 1, further comprising selecting a predetermined parameter relating forces generated by one or more winding sets of the motor, by utilizing a maximum phase current amplitude of at least one of the one or more winding sets of the motor.

10. The method of claim 1, further comprising selecting a predetermined parameter relating forces generated by one or more winding sets of the motor by utilizing a maximum rated power of at least one of the one or more winding sets of the motor.

11. The method of claim 1, further comprising applying the electrical angle offset to the electrical angle in the common set of commutation equations to provide open loop roll stabilization of the motor.

12. The method of claim 1, further comprising applying the electrical angle offset to the electrical angle in the common set of commutation equations to provide open loop pitch stabilization of the motor.

13. A method of commutating a motor comprising:

calculating an electrical angle offset;

entering the electrical angle offset as an adjustment to an electrical angle into commutation equations for a three phase motor for commutating motor windings of the three phase motor to produce forces in the motor in one dimension, wherein the electrical angle offset is determined so that the commutation equations for producing forces in the three phase motor in the one dimension are common with commutation equations for simultaneously producing forces in the motor in two dimensions; and

varying the electrical angle offset as applied within the common commutation equations to control the three phase motor so that both of the two dimensional forces produced by the motor are independently controllable.

14. The method of claim 13, further comprising determining the electrical angle offset so that the commutation equations for simultaneously producing forces in the motor in two dimensions produce Maxwell forces.

15. The method of claim 13, wherein the electrical angle offset is determined so that the commutation equations for producing forces in the motor in the at least one dimension are common with commutation equations for simultaneously producing forces in the motor in three dimensions.

16. The method of claim 15, further comprising determining the electrical angle offset so that the commutation equations for simultaneously producing forces in the motor in the three dimensions produce Maxwell forces.

17. An apparatus for commutating a motor comprising:

circuitry for calculating an electrical angle offset; and

an amplifier operable to apply the electrical angle offset to an electrical angle in a common set of commutation equations for a three phase motor for producing a one dimensional force so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor,

the amplifier configured to vary the electrical angle offset as applied within the common set of commutation equations to control the three phase motor so that both of the two dimensional forces produced by the motor are independently controllable.

18. The apparatus of claim 17, further comprising circuitry operable to determine the electrical angle offset from one or more measured position coordinates of a platen of the motor and desired motor forces in one or more directions.

19. The apparatus of claim 17, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the two dimensional forces in the motor include Maxwell forces.

20. The apparatus of claim 17, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the common set of commutation equations is capable of producing three dimensional forces in the motor.

21. The apparatus of claim 20, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the three dimensional forces in the motor include Maxwell forces.

22. The apparatus of claim 17, wherein the amplifier is further operable to utilize a winding phase current in combination with the electrical angle offset in the common set of commutation equations.

23. The apparatus of claim 17, further comprising circuitry for selecting a predetermined parameter relating forces generated by one or more winding sets of the motor utilizing a maximum rated force of the one or more winding sets of the motor.

24. The apparatus of claim 23, wherein the maximum rated force of the one or more winding sets is determined using back electromotive force, and motor speed.

25. The apparatus of claim 17, further comprising circuitry for selecting a predetermined parameter relating forces generated by one or more winding sets of the motor by utilizing a maximum phase current amplitude of at least one of the one or more winding sets of the motor.

26. The apparatus of claim 17, further comprising circuitry for selecting predetermined parameter relating forces generated by one or more winding sets of the motor by utilizing a maximum rated power of at least one of the one or more winding sets of the motor.

27. The apparatus of claim 17, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations to provide open loop roll stabilization of the motor.

28. The apparatus of claim 17, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations to provide open loop pitch stabilization of the motor.

29. A motor comprising:

windings commutated by a controller, the controller having;

circuitry for calculating an electrical angle offset; and

an amplifier operable to apply the electrical angle offset to an electrical angle in a common set of commutation equations for a three phase motor for producing a one dimensional force so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor,

the amplifier further operable to vary the electrical angle offset as applied within the common set of commutation equations to control the three phase motor so that both of the two dimensional forces produced by the motor are independently controllable.

30. The motor of claim 29, wherein the controller further comprises circuitry operable to determine the electrical angle offset from one or more measured position coordinates of a platen of the motor and desired motor forces in one or more directions.

31. The motor of claim 29, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the two dimensional forces in the motor include Maxwell forces.

32. The motor of claim 29, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the common set of commutation equations is capable of producing three dimensional forces in the motor.

33. The motor of claim 32, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the three dimensional forces in the motor include Maxwell forces.

34. The motor of claim 29, wherein the amplifier is further operable to utilize a winding phase current in combination with the electrical angle offset in the common set of commutation equations.

35. The motor of claim 29, wherein the controller further comprises circuitry operable for selecting a predetermined parameter relating forces generated by one or more winding sets of the motor by utilizing a maximum rated force of the one or more winding sets of the motor.

36. The motor of claim 35, wherein the maximum rated force of the one or more winding sets is determined using back electromotive force, and motor speed.

37. The motor of claim 29, wherein the controller further comprises circuitry operable for selecting a predetermined parameter relating forces generated by one or more winding sets of the motor by utilizing a maximum phase of the one or more current amplitude of at least one of the one or more winding sets of the motor.

38. The motor of claim 29, wherein the controller further comprises circuitry operable for selecting a predetermined parameter relating forces generated by one or more winding sets of the motor by utilizing a maximum rated power of at least one or more winding sets of the motor.

39. The motor of claim 29, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations to provide open loop roll stabilization of the motor.

40. The motor of claim 29, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations to provide open loop pitch stabilization of the motor.

41. A substrate processing apparatus comprising:

a controller for commutating a motor including;

circuitry for calculating an electrical angle offset; and

an amplifier operable to apply the electrical angle offset to an electrical angle in a common set of commutation equations for a three phase motor for producing a one dimensional force so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor,

the amplifier further operable to vary the electrical angle offset as applied within the common set of commutation equations to control the three phase motor so that both of the two dimensional forces produced by the motor are independently controllable.

42. The substrate processing apparatus of claim 41, wherein the controller further comprises circuitry operable to determine the electrical angle offset from one or more measured position coordinates of a platen of the motor and desired motor forces in one or more directions.

43. The substrate processing apparatus of claim 41, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the two dimensional forces in the motor include Maxwell forces.

44. The substrate processing apparatus of claim 41, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the common set of commutation equations is capable of producing three dimensional forces in the motor.

45. The substrate processing apparatus of claim 44, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the three dimensional forces in the motor include Maxwell forces.

46. The substrate processing apparatus of claim 41, wherein the amplifier is further operable to utilize a winding phase current in combination with the electrical angle offset in the common set of commutation equations.

47. The substrate processing apparatus of claim 41, wherein the controller further comprises circuitry operable for selecting a predetermined parameter relating forces generated by one or more winding sets of the motor by utilizing a maximum rated force of the one or more winding sets of the motor.

48. The substrate processing apparatus of claim 47, wherein the maximum rated force of the one or more winding sets is determined using back electromotive force, and motor speed.

49. The substrate processing apparatus of claim 41, wherein the controller further comprises circuitry operable for selecting a predetermined parameter relating forces generated by one or more winding sets of the motor by utilizing a maximum current amplitude of at least one of the one or more winding sets of the motor.

50. The substrate processing apparatus of claim 41, wherein the controller further comprises circuitry operable for selecting a predetermined parameter relating forces generated by one or more winding sets of the motor by utilizing a maximum rated power at least one of the one or more winding sets of the motor.

51. The substrate processing apparatus of claim 41, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations to provide open loop roll stabilization of the motor.

52. The substrate processing apparatus of claim 41, wherein the amplifier is further operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations to provide open loop pitch stabilization of the motor.